Design Of Pressure Sensor Research Articles

Design, fabrication, and thermal zero drift compensation of a SOI pressure sensor for high temperature applications

Design, fabrication, and thermal zero drift compensation of a SOI pressure sensor for high temperature applications

Modeling and Relative Permittivity Modulation of Cu/PDMS Capacitive Flexible Sensor for Pressure Sensing

This study aims to establish an equivalent parallel capacitance model for a copper/polydimethylsiloxane (Cu/PDMS) capacitive flexible pressure sensor and modulate its relative permittivity to optimize pressure sensing performance. The Cu/PDMS composite material is an ideal dielectric layer for sensors due to its high dielectric constant and tunable elasticity. By adjusting the different mixing ratios of PDMS and copper particles in micro size, the components and structure properties of the composite material can be modified, thereby affecting the electrical and mechanical performance of the sensor. We used finite element analysis (FEA) to model the sensor structure and studied the capacitance changes under various normal loading conditions to assess its sensitivity and distribution characteristics. Experimental results show that the sensor has good sensitivity and repeatability in the pressure range of 0 to 50 kPa. Additionally, we explored the effect of the addition of carbon black particles. It could be inferred that the added carbon black can enhance electrical properties due to its conductivity, which would be consequenced by the distribution optimization of Cu particles for carbon black’s low density, and it can mechanically restore some flexibility up to nearly 20%. Through these studies, our work can provide theoretical support for the design and application of flexible pressure sensors.

Repackaging and Performance Analysis of Implantable Pressure Sensor

In recent years, repackaging technology has been widely used in miniaturized implantable pressure sensors. However, the current packaging structure still has significant problems regarding biocompatibility, environmental adaptability, and measurement accuracy, which greatly limits its application in vivo measurement systems. In this paper, we report a method for implantable pressure sensor repackaging based on silicone oil, polydimethylsiloxane (PDMS) film, and polymer (parylene) coating. A systematic investigation using finite element analysis is conducted to assess the impact of packaging components on sensor performance, providing a solid theoretical foundation for packaging optimization. Experimental results demonstrate that when the parylene coating thickness is below 30 µm, the sensors exhibit superior linearity, repeatability, and reliability, along with exceptional stability and dynamic response across clinically relevant pressure ranges. This research provides valuable insights into the packaging design of implantable pressure sensors, facilitating the development of more stable, reliable, and cost-effective sensors for in vivo measurement systems.

A 3D printed pressure sensor based on a bossed diaphragm with straight-annular grooves

PurposeTo supply temporary pressure testing devices with favorable performance for emergency environments, this paper aims to present a pressure sensor with a central boss and straight-annular grooves. The structural feature is modeled and optimized by neural network-based method, and the device prototype is fabricated by 3D printing techniques.Design/methodology/approachThe study initially compares mechanical properties of the proposed structure with two conventional designs using finite element analysis. The impacts from structural dimensions on sensor performance are modeled using a Backpropagation neural network and optimized through genetic algorithms. The sensing diaphragm is fabricated using stereolithography (SLA) 3D printing, while the piezoresistors and necessary interconnects are realized with screen printing techniques.FindingsThe experimental results demonstrate that the fabricated sensor exhibits a sensitivity of 2.8866 mV/kPa and a nonlinearity of 6.81% within the pressure range of 0–100 kPa. This performance is an improvement of 118% in sensitivity and a decrease of 54% in nonlinearity compared to flat diaphragm structure, highlighting the effectiveness of proposed diaphragm configuration.Originality/valueThis research offers a holistic methodology that encompasses the structural design, optimization and fabrication of pressure sensors. The proposed diaphragm and corresponding modelling method can provide a practical approach to enhance the measurement capabilities of pressure sensors. By leveraging SLA printing for diaphragm and screen printing for circuit, the prototype can be produced in a timely manner.

Flexible Pressure Sensor Composed of Multi-Layer Textile Materials for Human-Machine Interaction Applications.

Flexible pressure sensors have shown significant application prospects in fields such as artificial intelligence and precision manufacturing. However, most flexible pressure sensors are often prepared using polymer materials and precise micronano processing techniques, which greatly limits the widespread application of sensors. Here, this work chooses textile material as the construction material for the sensor, and its latitude and longitude structure endows the sensor with a natural structure. The flexible pressure sensor was designed using a multilayer stacking strategy by combining multilayer textile materials with two-dimensional MXene materials. The experiment shows that its sensitivity is 52.08 kPa-1 at 30 and 7.29 kPa-1 within 30-120 kPa. As a demonstration, these sensors are applied to wireless human motion monitoring, as well as related applications involving auxiliary communication and robotic arm integration. Furthermore, relevant demonstrations of sensor array applications are presented. This work provides inspiration for the design and application of flexible pressure sensors.

Method for Sensitivity Improvement of MEMS Pressure Sensor: Structural Design and Optimization of Concave Resonant Pressure Sensor

Method for Sensitivity Improvement of MEMS Pressure Sensor: Structural Design and Optimization of Concave Resonant Pressure Sensor

Flexible Piezoresistive Film Pressure Sensor Based on Double-Sided Microstructure Sensing Layer.

Flexible thin-film pressure sensors have garnered significant attention due to their applications in industrial inspection and human-computer interactions. However, due to their ultra-thin structure, these sensors often exhibit lower performance, including a narrow pressure response range and low sensitivity, which constrains their further application. The most commonly used microstructure fabrication methods are challenging to apply to ultra-thin functional layers and may compromise the structural stability of the sensors. In this study, we present a novel design of a film pressure sensor with a double-sided microstructure sensing layer by adopting the template method. By incorporating the double-sided microstructures, the proposed thin-film pressure sensor can simultaneously achieve a high sensitivity value of 5.5 kPa-1 and a wide range of 140 kPa, while maintaining a short response time of 120 ms and a low detection limit. This flexible film pressure sensor demonstrates considerable potential for distributed pressure sensing and industrial pressure monitoring applications.

MEMS capacitive pressure sensor: analysis, theoretical modeling, simulation and performance comparison of the effect of a conical notch

Abstract Micro-Electro-Mechanical Systems (MEMS) pressure sensors are widely used in various applications due to their high sensitivity, low power consumption, and compactness. This work involves the design and simulation of a MEMS-based Touch Mode Capacitive Pressure Sensor (TMCPS). The proposed sensor is based on a substrate with an integrated conical notch featuring a circular diaphragm, aiming to enhance the key performance parameters of the sensor. The integration of a conical notch in the substrate increases the touch area between the diaphragm and substrate compared to the literature, ensuring increased capacitance and capacitive sensitivity. In this work the mathematical analysis of deflection of a circular diaphragm employing thin plate theory, capacitance, and capacitive sensitivity, along with step-by-step explanations, is provided. The results are obtained from MATLAB simulations. The deflection of the diaphragm is validated through Finite Element Analysis (FEA) using COMSOL Multiphysics. The proposed work demonstrates a significant improvement in sensor sensitivity compared to the existing literature.

Modeling and Simulation of 2D Transducers Based on Suspended Graphene-Based Heterostructures in Nanoelectromechanical Pressure Sensors.

Graphene-based two-dimensional (2D) heterostructures exhibit excellent mechanical and electrical properties, which are expected to exhibit better performances than graphene for nanoelectromechanical pressure sensors. Here, we built pressure sensor models based on suspended heterostructures of graphene/h-BN, graphene/MoS2, and graphene/MoSe2 by using COMSOL Multiphysics finite element software. We found that suspended circular 2D membranes show the best sensitivity to pressures compared to rectangular and square ones. We simulated the deflections, strains, resonant frequencies, and Young's moduli of suspended graphene-based heterostructures under the conditions of different applied pressures and geometrical sizes, built-in tensions, and the number of atomic layers of 2D membranes. The Young's moduli of 2D heterostructures of graphene, graphene/h-BN, graphene/MoS2, and graphene/MoSe2 were estimated to be 1.001 TPa, 921.08, 551.11, and 475.68 GPa, respectively. We also discuss the effect of highly asymmetric cavities on device performance. These results would contribute to the understanding of the mechanical properties of graphene-based heterostructures and would be helpful for the design and manufacture of high-performance NEMS pressure sensors.

Ultrahighly Sensitive Flexible Pressure Sensors with Dual-Mode Response Based on Monolayer Films of Calcium Niobate Nanosheets.

Flexible pressure sensors present enormous potential for applications in health monitoring, human-machine interfacing, and electronic skins (e-skin). However, at the cost of flexibility, the design of flexible pressure sensors has been facing the trade off between high sensitivity and wide sensing range. Herein, we propose a sandwiched structure composed of monolayer films of calcium niobate nanosheets to endow the device with both ultrahigh sensitivity and a wide sensing range. Tunable contact between the two electrodes of the pressure sensor through the gaps in the insulative monolayer film and precise thickness modulation of the monolayer films at the nanoscale result in an ultrahigh sensitivity and wide sensing range of the sensors. By virtue of these two traits, the pressure sensor distinguishes itself with unprecedented performances of ultrahigh sensitivity (6.43 × 104 kPa-1), a wide sensing range (1.94-60.00 kPa), a fast response time (<165 ms), and reliable repeatability. In addition, the sensor has a sensing mechanism transition from capacitive mode to piezoresistive mode from low pressure to high pressure. The sensors demonstrates the ability for motion detection of the human body. This work sheds light on the development of highly sensitive flexible pressure sensors.

A Design and Analysis of a Square Diaphragm-Comb Structure Capacitive Pressure Sensor (SD-CSCPS)

A Design and Analysis of a Square Diaphragm-Comb Structure Capacitive Pressure Sensor (SD-CSCPS)

An intrinsic electromechanical design method for MXene-based electrodes of ultra-highly sensitive and stable pseudocapacitive pressure device

To achieve the optimal performances of flexible pressure devices, the current approaches typically involve extensive experimental trials. However, such methods lack guidance from theoretical models in a positive fashion, not only introducing unpredictability and uncertainty into results but also potentially limiting the applicability of any achieved advancements to the alternative material systems. Here, an electrical-mechanical design model, combining density functional theory and molecular dynamics simulations, was proposed for calculating the specific capacitance and mechanical strength of various modified MXene films. Based on which, the optimal hybrid film entailed the cross-linking of holey reduced graphene oxide and MXene via cysteamine was prepared. This film, upon electromechanical characterizations, has effectively overcome the issues of MXene self-stacking and brittleness, thus validating the conclusions of theoretical predictions. Subsequently, the proposed film was integrated as electrode into a pseudocapacitive pressure sensor, achieving highly sensitivity (∼143,258 kPa−1) and mechanical stability (with capacitance drift below 1.2 % after 10,000-repeated test). Ultimately, the fabricated sensors were developed into sound collection system and robotic skins, respectively, to achieve recognition of distinctive sounds and stable perception of gravity. The calculation-based approach holds enormous potential for the design of two-dementional materials-based pressure sensors.

Rechargeable Self-Powered pressure sensor based on Zn-ion battery with high sensitivity and Broad-Range response

Flexible pressure sensors find broad applications in electronic skin, human–computer interaction, and health monitoring. However, developing self-powered flexible sensors capable of detecting both dynamic and static pressures with high sensitivity and a wide detection range remains a significant challenge. Here, we report the design and fabrication of a new rechargeable Zn-ion battery-type flexible self-powered pressure sensor (RZIB-FPS). In the device, the anode of a flexible Zn-ion battery is designed into a sandwich configuration with a porous isolation layer in between a conductive layer decorated with polymethylmethacrylate microspheres and a flexible Zn electrode. The self-powered pressure sensing mechanism relies on the variation in output voltage resulting from the resistance change of the anode when subjected to external pressure. This RZIB-FPS exhibits an open-circuit voltage of 1.46 V, an energy density of 392 µWh cm−2, a high sensitivity (up to 42.6 mV kPa−1), a wide pressure detection range (up to 330 kPa), and excellent cycling stability (up to 12,000 cycles). Furthermore, the proposed all-in-one device design demonstrates excellent charge–discharge performance, manifesting its high integration level and potential for sensor miniaturization. This study introduces a new strategy for developing high-performance sensors for future self-powered smart wearable electronics.

Mechanical Structure Design of Pressure Sensors with Temperature Self-compensation for Invasive Blood Pressure Monitoring

Abstract Invasive blood pressure (IBP) is a fundamental part of basic cardiovascular monitoring. Conventional piezoresistive pressure sensors are limited in usage due to the high cost associated with equipment and intricate fabrication processes. Meanwhile, low-cost strain gauge pressure sensors have poor performance in the gauge factor (GF) and temperature insensitivity. Here, we report a mechanical structure design for diaphragm pressure sensors (DPSs) by introducing a compensation grid to overcome the aforementioned challenges. A simplified model is established to analyze the mechanical deformation and obtain the optimal design parameters of the DPS. By rationally arranging the placement of sensitive grids to eliminate the discrepancy of relative resistance changes within four arms of the Wheatstone full-bridge circuit, the appropriate GF and high temperature insensitivity are simultaneously achieved. The blood pressure sensor with the DPS is then fabricated and characterized experimentally, which demonstrates an appropriate GF (ΔU/U0)/P = 3.56 × 10−5 kPa−1 and low temperature coefficient of voltage (ΔU/U0)/ΔT = 3.4 × 10−7 °C−1. The developed mechanical structure design offers valuable insights for other resistive pressure sensors to improve the GF and temperature insensitivity.

Rational design of a laminate-structured flexible sensor for human dynamic plantar pressure monitoring

Flexible sensors are essential components in emerging fields such as epidermal electronics, biomedicine, and human-computer interactions, and creating high-performance sensors through simple structural design for practical applications is increasingly needed. Presently, challenges still exist in establishing efficient models of flexible piezoresistive pressure sensors to predict the design required for achieving target performance. This work establishes a theoretical model of a flexible pressure sensor with a simple laminated and enclosed structure. In the modeling, the electrical constriction effect is innovatively introduced to explain the sensitization mechanism of the laminated structure to a broad range of pressures and to predict the sensor performance. The experimental results confirmed the effectiveness of the theoretical model. The sensor exhibited excellent stability for up to three million cycles and superior durability when exposed to salt solution owing to its simple laminated and enclosed structural design. Finally, a wearable sensing system for real-time collection and analysis of plantar pressure is constructed for exercise and rehabilitation monitoring applications. This work aims to provide theoretical guidance for the rapid design and construction of flexible pressure sensors with target performance for practical applications.

Novel Design of Double Touch Plano-Convex MEMS Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison

Due to advancements in Micro-Electro-Mechanical Systems (MEMS) fabrication technologies, researchers are incorporating numerous innovations in the design of capacitive pressure sensors (CPS). This work aims to present a novel CPS design using a plano-convex substrate to enhance the capacitance and sensitivity. Diaphragm deflection occurs due to its elastic property when pressure is applied to the diaphragm. This deflection reduces the distance between the diaphragm and substrate, thereby remarkably increasing capacitance. The Plano-Convex design offers added advantages of increased contact area between the diaphragm and substrate under applied pressure, hence significantly enhancing sensor sensitivity and range. More efficient and miniaturized CPSs are in high demand in medical instrumentation, aerospace, aviation, power plants and automotive industries. This work presents all the required mathematical calculations, modeling and simulations to support the proposed design. The diaphragm deflection simulation concerning pressure is conducted using COMSOL Multiphysics, while MATLAB is employed for analytical simulations related to changes in capacitance and capacitive sensitivity.

Pressure-dependent bandgap characteristics in photonic crystals with sensing applications

The present study elucidates a photonic crystal (PhC)-based pressure sensor exploiting the change in refractive index with pressure and the corresponding structural deformation of the dielectric material. The stress-sensitive refractive indices of the constituent materials of the PhC have been considered to study the effect of applied pressure on the photonic bandgap (PBG) characteristics of the structure. The designed pressure sensor, proposed using a two-dimensional hexagonal lattice arrangement of air holes in a dielectric slab, operates in the high-pressure range of 1–6 GPa. A comparative study of the PBG characteristics with the application of high pressure has been reported for three semiconducting materials—GaAs, Ge and Si, used for the dielectric slab in the proposed structure. GaAs is found to exhibit the highest sensitivity to pressure variations and shows more pronounced shifting of the midgap wavelength with pressure in comparison to Ge and Si. The largest PBG is seen in the Ge-based structure, closely followed by the GaAs and Si-based structures. The proposed structure is suitable for high-pressure sensing applications.

Nonlinear Analysis of Electric Potential in a Piezoelectric Thin Plate as Pressure Sensor

Piezoelectric materials are widely applied in electronic components due to their ability to couple electric and mechanical fields. For the piezoelectric thin plate as a pressure sensor, we extend the modified first-order piezoelectric plate theory to explore the nonlinear solution of electric potential and discuss the relevant regulation mechanisms. Based on the piezoelectric effect, the electric potential generated by deformation is not linear with thickness. A quadratic function of electric potential across thickness is introduced. However, the electric potential on upper and lower electrodes is an unknown constant, which can be determined by the nonlinear complementary equation based on the Gauss theorem. It is shown that the nonlinear results of electric potential are consistent with outcomes by the three-dimensional finite element method. Furthermore, relevant regulation mechanisms are discussed on electric potential, including supported conditions, plate thickness, and load area. In addition, the influence of load locations on the electric potential response is analyzed. It is expected that these findings will be instructive to the structural design of piezoelectric pressure sensors.

Data-driven inverse design of flexible pressure sensors

Artificial skins or flexible pressure sensors that mimic human cutaneous mechanoreceptors transduce tactile stimuli to quantitative electrical signals. Conventional trial-and-error designs for such devices follow a forward structure-to-property routine, which is usually time-consuming and determines one possible solution in one run. Data-driven inverse design can precisely target desired functions while showing far higher productivity, however, it is still absent for flexible pressure sensors because of the difficulties in acquiring a large amount of data. Here, we report a property-to-structure inverse design of flexible pressure sensors, exhibiting a significantly greater efficiency than the conventional routine. We use a reduced-order model that analytically constrains the design scope and an iterative "jumping-selection" method together with a surrogate model that enhances data screening. As an exemplary scenario, hundreds of solutions that overcome the intrinsic signal saturation have been predicted by the inverse method, validating for a variety of material systems. The success in property design on multiple indicators demonstrates that the proposed inverse design is an efficient and powerful tool to target multifarious applications of flexible pressure sensors, which can potentially advance the fields of intelligent robots, advanced healthcare, and human-machine interfaces.

On the Development of a New Flexible Pressure Sensor.

The rapid advancement of the Internet of Things (IoT) serves as a significant driving force behind the development of innovative sensors and actuators. This technological progression has created a substantial demand for new flexible pressure sensors, essential for a variety of applications ranging from wearable devices to smart home systems. In response to this growing need, our laboratory has developed a novel flexible pressure sensor, designed to offer an improved performance and adaptability. This study aims to present our newly developed sensor, detailing the comprehensive investigations we conducted to understand how different parameters affect its behaviour. Specifically, we examined the influence of the resistive layer thickness and the elastomeric substrate on the sensor's performance. The resistive layer, a critical component of the sensor, directly impacts its sensitivity and accuracy. By experimenting with varying thicknesses, we aimed to identify the optimal configuration that maximizes sensor efficiency. Similarly, the elastomeric substrate, which provides the sensor's flexibility, was scrutinized to determine how its properties affect the sensor's overall functionality. Our findings highlight the delicate balance required between the resistive layer and the elastomeric substrate to achieve a sensor that is both highly sensitive and durable. This research contributes valuable insights into the design and optimization of flexible pressure sensors, paving the way for more advanced IoT applications.