This paper presents the structural, optical and electrical characterization of ZnO thin films obtained by ultrasonic spray pyrolysis (USP). Based on these characterizations, the deposition conditions that provide films with higher crystallinity and greater absorption were determined. The resistivity of the films was reduced by annealing in nitrogen environment and was measured with a 4-point probe. The annealed films were characterized by AFM, SEM and XPS. Two photoconductive detectors were fabricated, with high and low resistivity films, and the responsivity was obtained for both. The two detectors showed a high UV response, but the photodetector developed from the annealed film demonstrated a maximum responsivity of 3000 A W−1 at 369 nm with a 2 V bias voltage. This result is higher than results obtained with low-cost techniques such as sol-gel, pneumatic spray pyrolysis, and even some results reported by sputtering.
Read full abstract