CuO-loaded TiO2 nanomaterials have applications in pollutant degradation via photocatalysis. However, the existing methods of fabricating these nanomaterials involve liquid-phase processes, which require several steps and typically generate liquid waste. In this study, TiO2 and TiO2-CuO nanoparticulate thin films were successfully fabricated through a one-step gas-phase approach involving a combination of plasma-enhanced chemical vapor deposition and physical vapor deposition. The resulting films consisted of small, spherical TiO2 nanoparticles with observable CuO on the TiO2 surface. Upon annealing in air, the TiO2 nanoparticles were crystallized, and CuO was completely oxidized. The photocatalytic activity of TiO2-CuO/H2O2, when introduced into the rhodamine 6G degradation system, was substantially enhanced under both ultraviolet and visible light irradiation. Moreover, this study highlights the influence of pH on the photocatalytic activity; TiO2-CuO/H2O2 exhibited the highest photocatalytic activity at pH 13, with a reaction rate constant of 0.99 h-1 cm-2 after 180 min of visible light irradiation. These findings could facilitate the development of nanoparticulate thin films for enhanced pollutant degradation in wastewater treatment.