Technology Development Plan Research Articles

Tunable wavelength filters using polymer long-period waveguide gratings based on metal-cladding directly defined technique**Project supported by the National Natural Science Foundation of China (Grant Nos. 61575076, 61475061, and 61405070), the Fundamental Research Funds for the Central Universities, China (Grant No. JCKY-QKJC08), the Science and Technology Development Plan of Jilin Province, China (Grant Nos. 20130522151JH, 20140519006JH, and 20160520091JH), and the China

In this work, long-period waveguide grating-based tunable wavelength filters using organic–inorganic grafting poly(methyl methacrylate) (PMMA) materials are designed and fabricated by metal-cladding directly defined technique. The thermal stabilities and optical properties of the organic–inorganic grafting PMMA core materials are analyzed. Structures and performance parameters of the waveguide gratings and self-electrode heaters are designed and simulated. The contrast of the filter is about 15 dB and the resonant wavelength can be tuned by different electric powers applied to the metal-cladding self-electrode heaters. The temperature sensitivity is 3.5 nm/°C and the switching time is about 1 ms. The technique is very suitable for realizing the optoelectronic integrated wavelength-division-multiplexing systems.

Планирование научно-технического прогресс а: от плана к целевым программам 1975—1986 годов

Researched experience of the planning of scientific and technological progress in the USSR in 1975 -1986 years. In the context of public production problems highlighted creation and development of scientific forecasting and program-oriented planning methods development school in which macroeconomic analysis and research of economic processes are combined and summarized in the whole system of specific national economic research. Revealed the key ideas of academician A. I. Anchishkin about use of forecasting in the planning of scientific and technological development. Analyzed organization of works on design and development of a comprehensive program of scientific and technological progress.

Life cycle assessment of onshore and offshore wind energy-from theory to application

This study aims to assess the environmental impacts related to the provision of 1kWh to the grid from wind power in Europe and to suggest how life cycle assessment can inform technology development and system planning. Four representative power plants onshore (with 2.3 and 3.2MW turbines) and offshore (4.0 and 6.0MW turbines) with 2015 state-of-the-art technology data provided by Siemens Wind Power were assessed. The energy payback time was found to be less than 1year for all technologies. The emissions of greenhouse gases amounted to less than 7g CO2-eq/kWh for onshore and 11g CO2-eq/kWh for offshore. Climate change impacts were found to be a good indicator for overall hotspot identification however attention should also be drawn to human toxicity and impacts from respiratory inorganics. The overall higher impact of offshore plants, compared to onshore ones, is mainly due to larger high-impact material requirements for capital infrastructure. In both markets the bigger turbines with more advanced direct drive generator technology is shown to perform better than the smaller geared ones. Capital infrastructure is the most impactful life cycle stage across impacts. It accounts for more than 79% and 70% of climate change impacts onshore and offshore respectively. The end-of-life treatment could lead to significant savings due to recycling, ca. 20–30% for climate change. In the manufacturing stage the impacts due to operations at the case company do not exceed 1% of the total life cycle impacts. This finding highlights the shared responsibility across multiple stakeholders and calls for collaborative efforts for comprehensive environmental management across organizations in the value chain. Real life examples are given in order to showcase how LCA results can inform decisions, e.g. for concept and product development and supply chain management. On a systems level the results can be used by energy planners when comparing with alternative energy sources.

The establishment of reliability model for LED lamps**Project supported by the National High Technology Research and Development Program of China (Nos. 2015AA03A101, 2013AA03A116), the Cuican Project of Chinese Academy of Sciences (No. KZCC-EW-102), and the Jilin Province Science and Technology Development Plan Item (No. 20130206018GX).

In order to verify which of the distributions and established methods of reliability model are more suitable for the analysis of the accelerated aging of LED lamp, three established methods (approximate method, analytical method and two-stage method) of reliability model are used to analyze the experimental data under the condition of the Weibull distribution and Lognormal distribution, in this paper. Ten LED lamps are selected for the accelerated aging experiment and the luminous fluxes are measured at an accelerated aging temperature. AIC information criterion is adopted in the evaluation of the models. The results show that the accuracies of the analytical method and the two-stage method are higher than that of the approximation method, with the widths of confidence intervals of unknown parameters of the reliability model being the smallest for the two-stage method. In a comparison between the two types of distributions, the accuracies are nearly identical.

Optimized routing strategy for complex network with multiple priorities**Project supported by the Fundamental Research Funds for the Central University, China (Grant Nos. 24720152047A and 15CX05025A), the Natural Science Foundation of Shandong Province, China (Grant No. ZR2014FM017), the Science and Technology Development Plan of Huangdao District, Qingdao, China (Grant No. 2014-1-45).

Different loads in the network require distinct QoS standard, while present routing strategies for complex networks ignored this fact. To solve this problem, we designed a routing strategy RS-MP with multiple priorities by which packets are classified into privileged-packets and common-packets. In RS-MP, privileged-packets route by the Shortest Path Algorithm, and do not need to queue up. Common-packets’ routes are determined by a new factor BJmax of the network. The BJmax stands for the largest betweenness centrality. By minimizing BJmax, the throughout capacity of the network can be maximized. The simulation results show that RS-MP can guarantee privileged-packets with the shortest path length and smallest delay, and maximized throughout capacity for common packets in the no-congestion state.

Effects of grinding-induced grain boundary and interfaces on electrical transportation and structure phase transition in ZnSe under high pressure**Project supported by the National Natural Science Foundation of China (Grant Nos. 11404133 and 11374121) and the Program of Science and Technology Development Plan of Jilin Province, China (Grant No. 20140520105JH).

Interface and scale effects are the two most important factors which strongly affect the structure and the properties of nano-/micro-crystals under pressure. We conduct an experiment under high pressure in situ alternating current impedance to elucidate the effects of interface on the structure and electrical transport behavior of two ZnSe samples with different sizes obtained by physical grinding. The results show that (i) two different-sized ZnSe samples undergo the same phase transitions from zinc blend to cinnabar-type phase and then to rock salt phase; (ii) the structural transition pressure of the 859-nm ZnSe sample is higher than that of the sample of 478 nm, which indicates the strong scale effect. The pressure induced boundary resistance change is obtained by fitting the impedance spectrum, which shows that the boundary conduction dominates the electrical transport behavior of ZnSe in the whole experimental pressure range. By comparing the impedance spectra of two different-sized ZnSe samples at high pressure, we find that the resistance of the 478-nm ZnSe sample is lower than that of the 859-nm sample, which illustrates that the sample with smaller particle size has more defects which are due to physical grinding.

The 650-nm variable optical attenuator based on polymer/silica hybrid waveguide**Project supported by the National Natural Science Foundation of China (Grant Nos. 61205032, 61475061, 61405070, 61177027, 61275033, and 61261130586) and the Science and Technology Development Plan of Jilin Province, China (Grant No. 20140519006JH).

Visible light variable optical attenuators (VOA) are essential devices in the application of channel power regulation and equalization in wavelength-division multiplexing cross-connect nodes in plastic optical fiber (POF) transmission systems. In this paper, a polymer/silica hybrid waveguide thermo–optic attenuator based on multimode interference (MMI) coupler is designed and fabricated to operate at 650 nm. The single-mode transmission condition, MMI coupler, and transition taper dimensions are optimized through the beam propagation method. Thermal analysis based on material properties provides the optimized heater placement angle. The fabricated VOA presents an attenuation of 26.5 dB with a 21-mW electrical input power at 650 nm. The rise time and fall time are 51.99 and 192 μs, respectively. The time–stability measurement results prove its working reliability.

The optimization of FA/O barrier slurry with respect to removal rate selectivity on patterned Cu wafers**Project supported by the Special Project Items No. 2 in National Long-Term Technology Development Plan (No. 2009ZX02308), the Natural Science Foundation of Hebei Province (No. F2012202094), and the Doctoral Program Foundation of Xinjiang Normal University Plan (No. XJNUBS1226).

Because the polishing of different materials is required in barrier chemical mechanical planarization (CMP) processes, the development of a kind of barrier slurry with improved removal rate selectivity for Cu/barrier/TEOS would reduce erosion and dishing defects on patterned Cu wafers. In this study, we developed a new benzotriazole-free barrier slurry named FA/O barrier slurry, containing 20 mL/L of the chelating agent FA/O, 5 mL/L surfactant, and a 1:5 concentration of abrasive particles. By controlling the polishing slurry ingredients, the removal rate of different materials could be controlled. For process integration considerations, the effect of the FA/O barrier slurry on the dielectric layer of the patterned Cu wafer was investigated. After CMP processing by the FA/O barrier slurry, the characteristics of the dielectric material were tested. The results showed that the dielectric characteristics met demands for industrial production. The current leakage was of pA scale. The resistance and capacitance were 2.4 kω and 2.3 pF, respectively. The dishing and erosion defects were both below 30 nm in size. CMP-processed wafers using this barrier slurry could meet industrial production demands.

Generating technology development paths to the desired future through system dynamics modeling and simulation

Technology foresight is usually conducted by government or industry associations and can serve to provide companies with information on critical technologies that a country or industry intends to develop in the next ten to twenty years. For individual companies to benefit from foresight results and transform them into specific technology development plans, the relationships between the desired technologies and the dynamic business environment need to be understood. In this article, an innovation diffusion model implemented via system dynamics simulation is used to operationalize the link between foresight and planning. It helps company decision makers visualize the diffusion process of the innovation inhabiting the chosen technology and determine the critical parameters quantitatively through experiments and analysis. Using these results, possible paths leading to the desired future of the chosen technology can be generated and plans be prepared to guide the effective development of the technology, essential infrastructure, and key applications. An example is presented at the end to illustrate the application of the proposed method that helps a Chinese service carrier to plan for its 4G wireless communication network expansion.

FORWARD-LOOKING PLANNING OF TECHNOLOGY DEVELOPMENT

The main aim of this article is to adapt the Future-Oriented Technology Analysis (FTA) to prospective planning of technology development. Firstly, the article presents the assumptions, methods and idea, as well as the concept of the FTA method. Moreover, selected publications on the use of this method were analysed. Then, an original, base model of forward-looking planning of technology development was constructed and presented. The end result of this process will be the development of the localized in time, presented in graphic form, action plan referred to as the route of technology development. Basing on the literature review and the research projects a preliminary route of development of arbitrarily chosen technology was also built and presented.

Influence of oxidant passivation on controlling dishing in alkaline chemical mechanical planarization**Project supported by the Special Project Items No. 2 in National Long-Term Technology Development Plan, China (No. 2009ZX02308).

The article studied the electrochemical behavior of P2 alkaline polishing slurry. The main research is the changing discipline of Ecorr and Icorr in the Cu electrolyte at different concentrations of oxidant H2O2. It compares potentiodynamic polarization curves in different P2 slurries and analyzes the passivation function of H2O2 acting on controlling dishing. The result implies that the potential increases gradually and then levels off while the current density on the contrary decreases with the augment of H2O2 concentration. In addition, dishing declines with the increasing of H2O2 along with the optimization of planarization of the alkaline P2 slurry.

A novel compound cleaning solution for benzotriazole removal after copper CMP**Project supported by the Special Project Items No.2 in National Long-Term Technology Development Plan, China (Nos. 2009ZX02308-003, 2014ZX02301003-007).

After the chemical mechanical planarization (CMP) process, the copper surface is contaminated by a mass of particles (e.g. silica) and organic residues (e.g. benzotriazole), which could do great harm to the integrated circuit, so post-CMP cleaning is essential. In particular, benzotriazole (BTA) forms a layer of Cu-BTA film with copper on the surface, which leads to a hydrophobic surface of copper. So an effective cleaning solution is needed to remove BTA from the copper surface. In this work, a new compound cleaning solution is designed to solve two major problems caused by BTA: one is removing BTA and the other is copper surface corrosion that is caused by the cleaning solution. The cleaning solution is formed of alkaline chelating agent (FA/O II type), which is used to remove BTA, and a surfactant (FA/O I type), which is used as a corrosion inhibitor. BTA removal is characterized by contact angle measurements and electrochemical techniques. The inhibiting corrosion ability of the surfactant is also characterized by electrochemical techniques. The proposed compound cleaning solution shows advantages in removing BTA without corroding the copper surface.

A novel cleaner for colloidal silica abrasive removal in post-Cu CMP cleaning**Project supported by the Specific Project Items No. 2 in National Long-Term Technology Development Plan (No. 2009zx02308-003) and the Hebei Province Department of Education Fund (No. QN2014208).

A novel cleaning solution, named FA/O alkaline cleaner, was proposed and demonstrated in the removal of colloidal silica abrasives. In order to remove both the chemical and physical absorbed colloidal silica abrasives, an FA/OII chelating agent and non-ionic surfactant were added into the cleaner. By varying the concentration of chelating agent and non-ionic surfactant, a series of experiments were performed to determine the best cleaning results. This paper discusses the mechanism of the removal of colloidal silica abrasives with a FA/O alkaline cleaner. Based on the experiment results, it is concluded that both the FA/OII chelating and non-ionic surfactant could benefit the removal of colloidal silica abrasives. When the concentration of FA/OII chelating agent and FA/O non-ionic surfactant reached the optima value, it was demonstrated that silica abrasives could be removed efficiently by this novel cleaning solution.

A quantitative investigation of the influence with the components of the CMP alkali slurry on the polishing rate**Project supported by the Special Project Items No. 2 in National Long-Term Technology Development Plan, China (No. 2009ZX02308) and the Natural Science Foundation of Hebei Province, China (No. F2013202104).

The influence of the components of an alkali polishing slurry and the mutual influences on the Cu polishing rate were investigated by a CMP polishing rate prediction model established with a modified artificial neural network based on the artificial bee colony algorithm. The quantitative method of sensitivity analysis was employed to fulfill the purpose of quantizing the influence on the polishing rate. The result of the analysis indicates that under certain CMP conditions, the Cu polishing rate was controlled by the silica abrasives, the FA/O chelating agent, the surfactant and the oxidant agent in the polishing slurry. Such factors showed the different sensitivity coefficients with 0.78, 0.53, 0.29 and 0.19 respectively on all the sample points. The mutual influence between the FA/O chelating agent and the oxidant agent on the polishing rate seemed obviously strongest when the proportion of them was 2 to 7, with the global sensitivity coefficients between 5 to 9; the mutual influence of silica abrasives and oxidant on the polishing rate was greater as the proportion of the above additives was beyond 5, with the global sensitivity coefficients between 2.5 and 6; the mutual influence of the surfactant and oxidant on the polishing rate was not obvious, with global sensitivity coefficients less than 3. Thus, it provides a kind of effective method for quantitating the influence with the components of the CMP alkali slurry on the polishing rate.

A Technology Valuation Model Using Quantitative Patent Analysis: A Case Study of Technology Transfer in Big Data Marketing

Technology valuation (TV) is an important issue in management of technology (MOT). We use TV results for technology transfer, research and development (R&D) planning, and technology marketing. Diverse TV studies have been applied to MOT. Most of them were dependent on domain experts’ knowledge, so their TV results could be subjective and unstable. To solve this problem, we propose an objective TV model using quantitative patent analysis. In this article, we consider text mining, social network analysis, technology clustering, and descriptive statistics in constructing our TV model. To verify the performance of our model, we perform a case study of technology transfer in big data marketing.

High Responsivity Organic Ultraviolet Photodetector Based on NPB Donor and C60 Acceptor**Supported by the National Natural Science Foundation of China under Grant Nos 61274068 and 61404058, the Project of Science and Technology Development Plan of Jilin Province under Grant Nos 20150204003GX and 20130206021GX, and the Project of Science and Technology Plan of Changchun City under Grant No 14KG020.

We report fabrication and characterization of organic heterojunction UV detectors based on N,N'-bis(naphthalenl-yl)-N,N'-bis (phenyl) benzidine (NPB)and fullerene C60. The effects of different thicknesses of NPB and C60 layers are studied and compared. Notably, the optimal thicknesses of electron acceptor C60 and electron donor NPB are 40 nm and 80 nm, respectively. The J–V characteristic curves of the device demonstrate a three-order-of-magnitude difference when illuminated under a 350 nm UV light and in the dark at −0.5 V. The device exhibits high sensitivity in the region of 320–380 nm with the peak located around 350 nm. Especially, it shows excellent photo-response characteristic with a responsivity as high as 315 mA/W under the illumination of 192 μW·cm−2 350 nm UV light at −5 V. These results indicate that the NPB/C60 heterojunction structure device might be used as low-cost low-voltage UV photodetectors.

Effect of FA/O complexing agents and H2O2 on chemical mechanical polishing of ruthenium in weakly alkaline slurry**Project supported by the Special Project Items No. 2 in National Long-Term Technology Development Plan (No. 2009ZX02308), the Natural Science Foundation of Hebei Province (No. E2013202247), the Science and Technology Plan Project of Hebei Province (Nos. Z2010112, 10213936), the Hebei Provincial Department of Education

This paper investigated the effect of FA/O and hydrogen peroxide (H2O2) on ruthenium (Ru) removal rate (RR) and static etching rate (SER). It was revealed that Ru RR and SER first linearly increased then slowly decreaseed with the increasing H2O2 probably due to the formation of uniform Ru oxides on the surface during polishing. Their corrosion behaviors and states of surface oxidation were analyzed. In addition, FA/O could chelate Ru oxides (such as (RuO4)2– and RuO4− changed into soluble amine salts [R(NH3)4] (RuO4)2) and enhance Ru RR. The non-ionic surfactant AD was used to improve the Ru CMP performance. In particular, the addition of AD can lead to significant improvement of the surface roughness.

Guan-hua Xu: China's move toward being a country of innovation

Abstract As the former Minister of China's Ministry of Science & Technology (MoST), Guan-hua Xu has witnessed, and personally contributed to, China's science and technology (S&T) development during the critical period of the country's transition into a great economic power. During his tenure at MoST and its predecessor (1995–2007), he promoted the reform of research institutions, initiated some of the Nation's most significant research and development (R&D) projects, and coordinated the formulation of China's National Outline for the Medium to Long Term Science and Technology Development Plan (2006–2020). As a distinguished scientist specializing in remote sensing, Xu has devoted much of his career over the past two decades to S&T policy and management. Since leaving the ministry, he has further explored fundamental issues surrounding China's S&T development, and recently collected his thoughts in a book entitled ‘Towards a Country of Innovation’ (Beijing: Science Press, 2014). In this recent interview with NSR, Xu summarized his view of the problems China faces in becoming an innovative country, and offered his recommendations for drastic reform of China's S&T system.

A novel credibility-based group decision making method for Enterprise Architecture scenario analysis using Data Envelopment Analysis

Analysis and selection of Enterprise Architecture (EA) scenarios is a difficult and complex decision making process directly effecting the long-term business strategies realization. This complexity is associated with contradictory objectives and significant uncertainties involved in analysis process. Although a large body of intuitive and analytical models for EA analysis has evolved over the last few years, none of them leads to an efficient and optimized ranking in fuzzy environments. Moreover, it is necessary to simultaneously employ some complementary methods to reflect the ambiguity and vagueness as the main sources of uncertainty. This paper incorporates the concept of Data Envelopment Analysis (DEA) model into EA scenario analysis through a group analysis under uncertain conditions. To resolve the vagueness and ambiguity of the EA analysis, fuzzy credibility constrained programming and p-robustness technique are applied, respectively. Not only is the proposed DEA model linear, robust, and flexible in aggregating experts’ opinion in a group decision making process, but it also is successful in discrimination power improvement – a major shortcoming associated with classic DEA model. The proposed model provides useful solutions to support decision making process for large-scale Information Technology (IT) development planning.

Novel missense mutation in WNT6 in 100 couples with unexplained recurrent miscarriage.

Do mutations and/or polymorphisms in coding sequences in Wingless-Type MMTV Integration Site Family, Member 6 (WNT6) play a role in unexplained recurrent miscarriage (unexplained RM) in Chinese couples? We found four mutations in the coding sequences of WNT6 which appear to exist in a small proportion of Chinese women with unexplained RM. WNT6 has been proved to be essential for stromal cell proliferation during decidualization in mice, but in humans WNT6 has not been studied in recurrent miscarriage populations. For this study, 100 couples with unexplained RM (at least three or more unexplained spontaneous miscarriages), and 100 ethnically matched fertile couples (at least one live birth and no history of pregnancy pathologies) were recruited. All the participants were chosen over a 7-year period from the National Research Center for Assisted Reproductive Technology and Reproductive Genetics at Shandong University, Jinan, China. Patients were recruited following extensive clinical studies. Genomic DNA was isolated from peripheral blood. Mutation analysis in the coding regions of WNT6 was performed by PCR amplification and DNA sequences testing in all participants. Functional effects of missense variants were predicted using Polyphen-2 and sorting intolerant from tolerant (SIFT). Four rare novel mutations, including one missense mutation, were found in intron 1, exon 3 and the 3' untranslated region of WNT6 in four women with unexplained RM. Gene software predictions showed that the missense mutation in exon 3 could alter the function of WNT6. No mutations or polymorphisms were detected in the male partners of the unexplained RM patients or in the fertile controls. To further validate the findings, we continued to screen this missense mutation site in another 100 peripheral blood samples of normal fertile females, and there was still no positive result. There is no direct evidence to validate whether these novel mutations discovered in the present research are related to unexplained RM. Further studies are warranted to investigate the role of WNT6 in unexplained RM, including larger studies in an independent group. These results provide evidence to suggest the importance of WNT6 in reproductive failure and may support the hypothesis that WNT6 is essential for stromal cell proliferation during decidualization. This work was supported by Science and Technology Development Planning of Shandong (2013GGE27001), the National Natural Science Foundation of China (81300459), the Science Projection of Bureau of Public Health in Weifang (2012044) and the Science Research Foundation Item of No-earnings Health Vocation. The authors have no competing interests to declare.