Piezoelectric Ceramic Tube Research Articles

Theoretical and experimental investigation of traveling wave propagation on a several- millimeter-long cylindrical pipe driven by piezoelectric ceramic tubes

A novel method is presented for investigation of the traveling wave propagation generated on a thin film pipe with a short length of several millimeters. As a bridge to connect two piezoelectric ceramic (lead zirconate titanate, PZT) tubes, a thin-film metallic glass (TFMG) pipe is fabricated by a new technique of rotating magnetron sputtering. The vibrator combines the vibration of the axial mode of the PZT tube and the radial mode of the TFMG pipe. Theoretical analyses of the TFMG pipe and PZT tube, with a comparison of the finite element modeling, clarify the vibration characteristics so that the proper geometrical sizes, suitable boundary conditions, and driving voltage signals are designed. In the experiment, the designed vibrator was fabricated and the vibration characteristics were measured by a laser Doppler vibrometer system. The pure traveling wave propagation obtained theoretically and experimentally demonstrates the validity of this work. This study shows a new way to achieve a pure traveling wave on a short cylindrical pipe driven by PZT tubes.

A piezoelectric linear ultrasonic motor with the structure of a circular cylindrical statorand slider

A piezoelectric linear ultrasonic motor is proposed, with a cylindrical stator and sliderstructure. The length and diameter of the motor are about 10 and 1.5 mm, respectively. Thestator consists of two piezoelectric ceramic (PZT) tubes connected by a thinfilm metallic glass (TFMG) pipe. The stator is designed based on theoreticalanalyses and finite element method (FEM) simulation. The traveling wavepropagation is obtained in the FEM simulation under the proper geometricalsizes, suitable boundary conditions and driving voltage signals. The trajectoriesof particles on the TFMG pipe are elliptical motion. In the experiment, a 25 µm thick TFMG pipe is fabricated using the rotating magnetron sputtering technique and thevibration characteristics of the stator are measured by a laser Doppler vibrometer (LDV) system.Bidirectional motion of the slider is observed around 600 kHz, the maximum velocity is near to 40 mm s − 1 at 50 Vp–p for the loose slider and the maximum output force is 6 mN at 70 Vp–p for thetight slider.

MNM-3B-4 円筒形超音波リニアマイクロアクチュエータ(セッション 3B 情報・精密機器におけるマイクロ・ナノテクノロジー2)

A piezoelectric ultrasonic microactuator with a cylindrical stator and slider structure is presented. The length and diameter of the microactuator are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe, which is fabricated using the rotating magnetron sputtering technique. Traveling wave propagation is generated on the TFMG pipe in finite element method (FEM) simulations. In the experiment, bi-directional motion of the slider was observed at the frequency of around 600 kHz and applied voltage of 70 V_<p-p>. At this condition, the maximum output force and maximum velocity were about 6mN and 340mm/s, respectively.

Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube

A novel ultrasonic linear microactuator with a circular cylindrical stator and slider structure is presented. The stator consists of a cylindrical piezoelectric ceramic tube and an elastic material, a thin film metallic glass (TFMG) pipe. In finite element simulations, a quasi-traveling wave is generated on the TFMG pipe, and trajectories of particles on the pipe are determined to be elliptical motion. There is good agreement between the simulations and measurement results for the vibration of the fabricated stator. Bi-directional motion of the slider is successfully observed at 613 kHz, and the maximum velocity is about 25 mm/s at 30 V.

The analysis of the electro-mechanical model of the cylindrical radial composite piezoelectric ceramic transducer

The cylindrical radial composite piezoelectric ceramic transducer is presented and studied. The transducer consists of an inner radially polarized piezoelectric ceramic thin-walled circular tube and an outer metal thin-walled cylindrical shell which are composed in the radial direction. The radial vibrations of a metal thin-walled cylindrical shell and a piezoelectric ceramic thin-walled circular tube are analyzed. Their radial electro-mechanical equivalent circuits are obtained. Based on the equivalent circuits and the radial boundary conditions, the composite electro-mechanical equivalent circuit of a cylindrical radial composite piezoelectric ceramic transducer is obtained, the resonance frequency and anti-resonance frequency equations of the cylindrical radial composite piezoelectric transducer are derived. Then the relationship between the resonance frequency, the anti-resonance frequency, the effective electro-mechanical coupling coefficient and the geometrical dimensions of the cylindrical radial composite piezoelectric ceramic transducer is analyzed. It is illustrated that the resonance frequencies and the anti-resonance frequencies from the frequency equations are in a good agreement with that of the experimental results.

A 300 kHz High-Frequency Underwater Transducer

A new type of piezoelectric composite ultrasonic transducer with high frequency in radial vibration is studied. A high-frequency acoustic transducer has been designed and prepared with pzt-5-type piezoelectric ceramic cylinder. When the piezoelectric ceramic cylinder vibrates along the direction of its radial direction, the working frequency is high. It is composed of a piezoelectric ceramic tube and a steel bracket which is inserted in the inner of the ceramic tube. Use the finite element method by ANSYS for analyzing the radial vibration of a piezoelectric tube. On that basis, through managing ANSYS simulation the vibration mode of transducer system is obtained, and analyzed the working frequency of transducer. According to the simulation, the high-frequency cylindrical acoustic transducer has been produced. Comparing the products and the traditional cylindrical transducers, the products haven’t only a good all-round circle directional, but it also has a high working frequency (300 kHz).

Vibration characteristics of a cylindrical shell with 25 &amp;#x003BC;m thickness fabricated by the rotating sputtering system

A thin film rotating sputtering system is presented for fabrication of a circular cylindrical shell (CCS). The length, diameter, and thickness of the CCS are 5.0 mm, 1.5 mm, and 25 mum, respectively. To investigate the vibration characteristics, the CCS is fabricated on the outer surface of a piezoelectric ceramic tube (PCT). The vibration of PCT excited by driving voltage signals causes the vibration of the CCS, and the vibration characteristics can be measured using a laser Doppler vibrometer system. Furthermore, a finite element method (FEM) simulation and 2 analytical calculation methods are proposed for comparison with the measurement results. The frequency factor, the key factor that dominates the effective ranges of the 2 analytical methods, is determined as a value of 0.92 through a series of discussions. Combining the results of the 2 analytical calculation methods, good agreement of the analytical, FEM, and measurement results is obtained.

Coupled vibration analysis of the thin-walled cylindrical piezoelectric ceramic transducers

Analysis of electromechanical transducers employing axially symmetric vibrations of piezoelectric ceramic thin-walled tubes of arbitrary aspect ratio is presented based on application of the energy method [B. S. Aronov, J. Acoust. Soc. Am. 117, 210-220 (2005)]. The suggestion made by Giebe and Blechshmidt [Ann. Physik, Ser. 5 18, 417-485 (1933)] regarding representation of a tube vibration as a coupled vibration of two partial systems is used to choose the assumed modes of the piezoceramic tube vibration, and the energy of the flexural deformations accompanying the extensional vibration of a tube is also taken into consideration. The Lagrange type equations describing the transducer vibrations are derived, and the equivalent electromechanical circuit is introduced that conveniently represents the solution. The resonance frequencies, effective coupling coefficients, and velocity distributions for differently poled piezoceramic tubes as functions of their height-to-diameter aspect ratio are calculated. The validity of the equivalent circuit is extended to the case that a piezoceramic tube is mechanically and acoustically loaded on the ends and acoustically loaded on its outer surface. The results of calculations are in good agreement with the results of experimental investigations.

Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator

A novel ultrasonic linear microactuator with bi-directional motion is presented, which is composed of the compact structure of the cylindrical stator and slider. The stator consists of a cylindrical piezoelectric ceramic (PZT) tube and an elastic material, which is a thin film metallic glass (TFMG) pipe. The basic principle is based on the traveling wave propagation generated on the TFMG pipe, which is investigated by using the finite element method (FEM) software. There is good agreement between the simulation and measurement results for the vibration of the fabricated stator. For the prototype, the bi-direction motion of the slider is observed, and the initial performance is tested. The driving frequency is 613 kHz, and the maximum velocity is about 25 mm/s at the voltage of 30 V. This kind device is promising to make the stable performance microactuator with higher energy efficiency.

PRE-10 DESIGN AND FABRICATION ON A NOVEL TRAVELING WAVE TYPE CYLINDRICAL ULTRASONIC LINEAR MICROACTUATOR(MM/Micro/Nano Precision Equipments IV,Technical Program of Oral Presentations)

A piezoelectric ultrasonic microactuator is presented, with a cylindrical stator and slider structure. The length and diameter of the microactuator are about 10 and 1.5 mm, respectively. The stator consists of two piezoelectric ceramic (PZT) tubes connected by a thin film metallic glass (TFMG) pipe, which is fabricated using the rotating magnetron sputtering technique. Traveling wave propagation is generated on the TFMG pipe in finite element method (FEM) simulations. Bi-directional motion of the slider was observed successfully around 600 kHz, and the maximum velocity was about 40 mm/s at 25 V.

Investigation on a cylindrical ultrasonic micromotor

The relationship between the arrangement of ceramics and the force coefficient shows that the maximum excitation efficiency will be obtained when the ceramics are placed at the trough of the first bending mode of the stator. Therefore, a cylindrical ultrasonic micromotor with a novel stator is proposed. The prototype motor is 5 mm in diameter, 30 mm in length and 4.2 g in weight. The micromotor operates with the first bending mode at 53 kHz. Its maximum speed is 350 r/min when the drive voltage is 200 V and the stall torque reaches 2.5 mN · m. As this motor is suitable for miniaturization because of its simple structure, another cylindrical ultrasonic micromotor is developed. Piezoelectric ceramic tube is used as its stator. This micromtor is 2 mm in diameter, 7 mm in length and 0.258 g in weight. Its speed reaches 813 r/min when the drive voltage is 60 V at 75 kHz. The operation mechanism, structure and design method of these two motors are introduced.

Flexural vibration analyses of piezoelectric ceramic tubes with mass loads in ultrasonic actuators

Based on Timoshenko beam model, a theoretical model of radially polarized piezoelectric ceramic tubes is investigated. In the model, the piezoelectric effects are considered, and the shear correction factor is introduced which reveals effects of the size of the cross-section and Poisson’s ratio. Based on the model, the particular attentions are devoted to effects of the boundary conditions at two ends on flexural resonance frequencies of the piezoelectric ceramic tubes. Changing the sizes of the tubes and the mass loads at both free ends, the variations of the flexural resonance frequencies of free–free piezoelectric ceramic tubes are calculated theoretically. Besides, the flexural resonance frequencies of the piezoelectric ceramic tube cantilevers with mass loads at one free end are also investigated theoretically. To verify accuracy of the theoretical mode, the flexural resonance frequencies for different lengths of the piezoelectric ceramic tubes and different loaded masses are measured experimentally. The theoretical results agree well with the experimental measurement, which demonstrates that the model is accurate for analyzing the flexural resonance frequencies of the piezoelectric ceramic tubes with mass loads.

Compound piezoelectric cylindrical resonators as sensors of the rheological parameters of viscoelastic media

The electro-elastic behavior of a viscoelastically loaded layered cylindrical resonator (sensor) comprising two coupled hollow cylinders is presented. The inner cylinder is a piezoelectric ceramic tube. The outer cylinder is a non-piezoelectric (passive) metallic cylinder. An analytical formula for the electrical admittance of a compound layered cylindrical resonator loaded with a viscoelastic liquid is established. Admittance (conductance) diagrams were obtained using a continuum electromechanical model. The established analytical formulas enable the determination of the influence of the liquid viscosity, material, and geometrical parameters of a compound cylindrical resonator on the response characteristics of the compound sensor. In the paper, the sensor implications resulting from the performed analysis are described. Moreover, the algorithm of the method developed by the authors to evaluate the rheological parameters of a viscoelastic liquid is presented. Good agreement between the theoretical results and experimental data is shown. The analysis presented in this paper can be utilized for the design and construction of cylindrical piezoelectric viscosity sensors, annular accelerometers, filters, transducers, and multilayer resonators.

Ultrasonic micro-motor using miniature piezoelectric tube with diameter of 1.0 mm

At the present moment, the smallest piezoelectric ultrasonic micro-motors utilizing miniature PZT piezoelectric ceramic tubes were developed. The motor consists of a PZT-metal composite tube stator, two steel rotors and a thin shaft that keeps the two rotors pressing on both ends of the stator elastically. The dimensions of the PZT tube are 1.0 mm in outer diameter, 0.6 mm in inner diameter and 5.0 mm in length. The diameter and total length of the assembled micro-motor is 1.0 mm and 8 mm (including an adjusting spring), respectively. The tube-type micro-motor is driven by two pairs of alternative voltages with phase shift 90° between the adjacent electrodes and operated in the first circular-bending vibration mode of the stator with the resonance frequency about 58 kHz. The experimental results show that the tube-type micro-motors have perfect performances: (i) high rotation frequency over 3000 rpm and (ii) large starting torque over 7.8 μN m under the conditions of the input voltage of 110 V p–p and the resonance frequency. The micro-motor is well suitable for operating in micro-spaces, such as in intravascular, micro-robots and micro-craft applications.

A piezoelectric tube with a double-layer configuration

A piezoelectric ceramic tube with a double-layer configuration was proposed in this paper. This actuator, made of a hard piezoelectric ceramic, was successfully prepared using an advanced technique, known as electrophoretic deposition (EPD). The fabrication process was introduced and the prepared piezoelectric tube showed a uniform structure. The bending displacement of the tube at clamped-free boundary condition was then theoretically derived and experimentally confirmed at various driving conditions. The predicted values showed good consistency with the experimental values.

Low-frequency and high-frequency all-fiber modulators based on birefringence modulation

In-line optical modulators with low insertion losses and high maximum optical powers are required for Q switching and cavity dumping of fiber lasers as well as for nonlinear optical-fiber experiments. We report the design of polarimetric all-fiber modulators based on optical-fiber birefringence modulation combined with an all-fiber polarizer. Birefringence modulation involves a piezoelectric ceramic tube. This simple technique permits efficient low-frequency and high-frequency harmonic modulation, up to the megahertz range, as well as modulation of pulses shorter than 1 micros.

A fiber optic frequency shifter

A fiber optic frequency shifter capable of shifting the frequency of light traveling through the fiber has been designed, constructed, and tested. The frequency of the transmitted light is shifted by stretching and contracting the optical fiber that is wound around two piezoelectric ceramic tubes. The frequency of the light is shifted by linearly changing the path length along which the light must travel. The diameters of two piezoelectric ceramic tubes are changed when a linearly increasing electric field is applied to the tubes. A servo control system is used to correct and compensate for nonlinearity of the piezoelectric material and assembly. A frequency shift of up to 305 Hz for up to 2.5 s with a linewidth of less than 1 Hz is achieved with the present setup. This frequency shifter has been successfully applied to a laser light scattering apparatus for which heterodyne experiments are made for particle electrophoretic mobility and zeta potential measurements.

Extrusion and properties of lead zirconate titanate piezoelectric ceramics

The purpose of this work was to develop a procedure for fabricating electroceramic actuators with good piezoelectric properties. The preparation of lead zirconate titanate (PZT) piezoelectric ceramic rods and tubes by extrusion processing is described. The microstructure of extrudates was investigated in comparision with different processing conditions. Finally, the measuremental results of density, dielectric and piezoelectric properties are reported and analyzed.

Torsional vibration of coaxially segmented, tangentially polarized piezoelectric ceramic tubes

Piezoelectric ceramic materials are often used in ultrasonic and underwater sound transducers by stacking a number of identical pieces together. In this paper, the theoretical behavior is derived for a piezoelectric ceramic cylindrical tube consisting of any number of tangentially polarized coaxial segments. The resonance frequency equation of the torsional tube is obtained and the electromechanical equivalent circuits are developed that greatly simplify and improve the analysis of composite resonators in transducer design. A new parameter which is defined as the cross-sectional torsional coefficient is presented. The relations between the theoretical parameters and the experimentally measured quantities of the segmented electromechanical system in torsional vibration are obtained so that the material parameters can be evaluated even though the lateral dimensions are large relative to the length of each individual segment and the analysis of the vibrational characteristics of the torsional transducer can be simplified.

Study of the sandwiched piezoelectric ultrasonic torsional transducer

The sandwiched piezoelectric ultrasonic torsional transducer was studied. The transducer consists of front and back metal cylinders, and coaxially segmented, tangentially polarized, piezoelectric ceramic tubes. The torsional vibration of the tangentially polarized piezoelectric ceramic slender tube was studied first and its electromechanical equivalent circuit was derived. Based on the network theory and the electromechanical equivalent circuit, the torsional vibration of the piezoelectric ceramic cylinder, formed by stacking a number of identical short piezoelectric ceramic rings, was analysed and the electromechanical equivalent circuit of the piezoelectric ceramic stack in torsional vibration was developed. Finally, the sandwiched ultrasonic torsional transducer was studied and resonance frequency equations were derived which can be used to design and calculate the torsional transducers for different applications.