Abstract
A novel ultrasonic linear microactuator with bi-directional motion is presented, which is composed of the compact structure of the cylindrical stator and slider. The stator consists of a cylindrical piezoelectric ceramic (PZT) tube and an elastic material, which is a thin film metallic glass (TFMG) pipe. The basic principle is based on the traveling wave propagation generated on the TFMG pipe, which is investigated by using the finite element method (FEM) software. There is good agreement between the simulation and measurement results for the vibration of the fabricated stator. For the prototype, the bi-direction motion of the slider is observed, and the initial performance is tested. The driving frequency is 613 kHz, and the maximum velocity is about 25 mm/s at the voltage of 30 V. This kind device is promising to make the stable performance microactuator with higher energy efficiency.
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