A technique for sub-keV x-ray spectroscopy over a large area at room temperature is presented. Photon-induced ionization electron trails deposited in a low-pressure gas are efficiently counted by a multi-stage electron multiplier. The analysis of the number of deposited electrons and the electron trail length, combined with a detailed simulation of the detection process, provide a powerful method for resolving x-ray lines down to 70 eV. Detection efficiencies above 40% and an energy resolution of 55% (FWHM) were measured for the Be K (108.5 eV) x-ray line. It is demonstrated that light elements with an abundance below 1% in composite samples can be quantitatively resolved. The experimental technique, analysis method and x-ray spectroscopic results obtained with the particle-induced x-ray emission technique and at a scanning electron microscope are presented.
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