Fe-Ni-N films were fabricated on MgO{100} single-crystal substrates by dc facing-targets sputtering. Structural analysis and magnetic measurement were carried out. The results can be summarized as follows: (1) for the as-deposited (Fe100-xNix)-N films, α' phase with a stoichiometric N content of 11 at% can be formed up to x = 10; (2) the phase decomposition temperature Tp.d. of α'-(Fe100-xNix)16N2(x=0-10) depends strongly on the Ni content of the film. The Tp.d. of α'-(Fe100-xNix)16N2 decreases from about 200 °C(x=0) to about 50 °C(x=10) with increasing Ni content; (3) the formation at R.T. of stable α''-(Fe100-xNix)16N2(x=5-30) in the Fe-Ni alloy system is concluded to be difficult; and (4) judging from the dependence of the saturation magnetization for α'-(Fe100-xNix)16N2 on the Ni content, the saturation magnetization of α'-Fe16N2 is 220 emu/g.
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