We have investigated the growth and photodecomposition of the pentacene ultrathin film grown on the TiO2-terminated SrTiO3(001) single crystal substrate by in situ Auger electron spectroscopy (AES) and ex situ atomic force microscopy (AFM). The careful analyses of AES and AFM data have revealed that the AES intensities of C(KLL) in the growth of the pentacene were to some extent larger than those in its photodecomposition, for the coverage of pentacene islands estimated by AFM. This result supports the existence of adsorbed-like pentacene precursors before the photodecomposition as was proposed in our previous report.
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