Microfluidics technology has been extensively applied in biochemical analysis and medical diagnostics, where precise and efficient control of microfluids is crucial. However, existing passive microfluidic control methods (e.g., microchannels) and active strategies (e.g., optical, thermal, magnetic field, and electrokinetic manipulation) are often hindered by complex device structures and operational uncertainties. Surface acoustic wave (SAW) microfluidic manipulation offers a promising alternative, providing flexible and efficient digital microfluidic control through the modulation of input signals. Nevertheless, the intrinsic hydrophilicity of substrates such as LiNbO3 results in inefficient microfluidic driving and jetting, primarily due to high surface tension. In this study, we employed chemical vapor deposition (CVD) to coat LiNbO3 substrates with 1H,1H,2H,2H-Perfluorododecyltrichlorosilane (FDTS) self-assembled monolayers (SAMs), creating hydrophobic surfaces with a contact angle of approximately 120°. In comparison to commercially available Glaco hydrophobic coatings, which reduce SAW amplitude by approximately threefold and increase substrate temperature by up to 1.5 times, FDTS SAMs exhibit negligible impact on SAW properties. Furthermore, when compared to untreated SAW devices, FDTS SAMs-coated devices demonstrated a sixfold increase in droplet driving speed under low power input (e.g., 0.5 W), enabling faster and more precise liquid jetting at velocities reaching 5 m/s. This work highlights the potential of FDTS SAMs in enhancing the performance of SAW-driven microfluidic devices, particularly in applications requiring high-efficiency droplet manipulation.