In order to explore local- and intermediate-range atomic structures of several semiconducting and metallic glasses, anomalous X-ray scattering (AXS) experiments were performed using an improved detecting system suitable for third-generation synchrotron radiation facilities, and the obtained data were analyzed using reverse Monte Carlo (RMC) modelling to obtain partial structure factors and to construct three-dimensional atomic configurations of these glasses. Examples of GeSe2 semiconducting and Pd40Ni40P20 metallic glasses are demonstrated to exhibit the feasibility of the combination of AXS and RMC techniques. Importance of an additional combination with neutron scattering is also described for alloys containing light elements.
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