At first a short review of IBA contribution to the determination of composition and structure, including phonon properties of high Tc superconducting oxides is presented. In the second part, IBA contribution to the elucidation of the mechanisms of thin film growth is presented. The emphasis is on the complementarity of IBA, Raman spectroscopy and XRD techniques to characterize thin films of high Tc superconducting oxides. In the third part, some recent results related mainly to YBaCuO films grown on (100) oriented single crystalline bulk materials (MgO, LaAlO3, SrTiO3) is discussed. In these experiments, IBA, XRD and Raman spectroscopies were used to study the oxygen content in a series of YBaCuO films prepared in different conditions of pressure and temperature. In the case of c-axis oriented films a good agreement between these three methods was found for the films cooled down at high oxygen pressure and a significant disagreement for the films cooled down at low oxygen pressure, showing structures with anomalous c-axis parameter. In the case of a-axis oriented films grown on SrTiO3 substrates it was found that the low Tc values (∼ 70–80 K) are not correlated with the oxygen content but rather with a disorder in the oxygen sublattice. The disorder in the oxygen sublattice was studied using the 16O(α, α)16Oresonance in random and channeling geometry. These results are correlated with the data provided by Raman spectroscopy. The 18O tracer technique was used to estimate the diffusion coefficient in the a-axis oriented YBaCuO films showing a huge anisotropy of the 18O labelling. Combining Raman and IBA techniques, the selective 18O labelling of the CuO chain-planes was evidenced. The defects in the 18O enriched CuO chain-planes were studied using the 18O(p, α)15N nuclear resonant reaction in random and channeling geometries. Some preliminary results related to roughness of YBaCuO films are also discussed. The physical implications of these findings are analyzed.
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