Abstract
In order to study in situ elaboration of YBaCuO thin films sputtered on polycrystalline YSZ substrates, a model of reactive sputtering has been developed. c-axis oriented YBaCuO films were obtained with J c ≈3×10 4 A/cm 2 at 77 K measured on 55×55 μm 2 microbridges.
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