Optomechanical Crystal Cavity Research Articles

Dispersive optomechanics of supercavity modes in high-index disks.

In this work, we study the dispersive coupling between optical quasi-bound states in the continuum at telecom wavelengths and GHz-mechanical modes in high-index wavelength-sized disks. We show that such cavities can display values of the optomechanical coupling rate on par with optomechanical crystal cavities (g0/2π≃800kHz). Interestingly, optomechanical coupling of optical resonances with mechanical modes at frequencies well above 10 GHz seems attainable. We also show that mechanical leakage in the substrate can be extremely reduced by placing the disk over a thin silica pedestal. Our results suggest a new route for ultra-compact optomechanical cavities that can potentially be arranged in massive arrays forming optomechanical metasurfaces for application in signal processing or sensing.

Microwave oscillator and frequency comb in a silicon optomechanical cavity with a full phononic bandgap

Abstract Cavity optomechanics has recently emerged as a new paradigm enabling the manipulation of mechanical motion via optical fields tightly confined in deformable cavities. When driving an optomechanical (OM) crystal cavity with a laser blue-detuned with respect to the optical resonance, the mechanical motion is amplified, ultimately resulting in phonon lasing at MHz and even GHz frequencies. In this work, we show that a silicon OM crystal cavity performs as an OM microwave oscillator when pumped above the threshold for self-sustained OM oscillations. To this end, we use an OM cavity designed to have a breathing-like mechanical mode at 3.897 GHz in a full phononic bandgap. Our measurements show that the first harmonic of the detected signal displays a phase noise of ≈−100 dBc/Hz at 100 kHz. Stronger blue-detuned driving leads eventually to the formation of an OM frequency comb, whose lines are spaced by the mechanical frequency. We also measure the phase noise for higher-order harmonics and show that, unlike in Brillouin oscillators, the noise is increased as corresponding to classical harmonic mixing. Finally, we present real-time measurements of the comb waveform and show that it can be fitted to a theoretical model recently presented. Our results suggest that silicon OM cavities could be relevant processing elements in microwave photonics and optical RF processing, in particular in disciplines requiring low weight, compactness and fiber interconnection.

Two-dimensional optomechanical crystal cavity with high quantum cooperativity

Optomechanical systems offer new opportunities in quantum information processing and quantum sensing. Many solid-state quantum devices operate at millikelvin temperatures—however, it has proven challenging to operate nanoscale optomechanical devices at these ultralow temperatures due to their limited thermal conductance and parasitic optical absorption. Here, we present a two-dimensional optomechanical crystal resonator capable of achieving large cooperativity C and small effective bath occupancy nb, resulting in a quantum cooperativity Ceff ≡ C/nb > 1 under continuous-wave optical driving. This is realized using a two-dimensional phononic bandgap structure to host the optomechanical cavity, simultaneously isolating the acoustic mode of interest in the bandgap while allowing heat to be removed by phonon modes outside of the bandgap. This achievement paves the way for a variety of applications requiring quantum-coherent optomechanical interactions, such as transducers capable of bi-directional conversion of quantum states between microwave frequency superconducting quantum circuits and optical photons in a fiber optic network.

Optomechanical microwave oscillator and frequency comb generation in a full phononic bandgap 1D optomechanical crystal cavity

In this work we show that a silicon optomechanical crystal cavity can be used as an optomechanical oscillator when driven to the phonon lasing condition with a blue-detuned laser. The optomechanical cavity is designed to have a breathing like mode vibrating at Ωm/2π =3.897 GHz in a full phononic bandgap. Our measurements show that the first harmonic displays a phase noise of -100 dBc/Hz at 100 kHz. Stronger bluedetuned driving leads eventually to the formation of an optomechanical frequency comb, with lines spaced by the mechanical frequency. The measured phase noise grows up with the harmonic number, as in classical harmonic mixing. We present real-time measurements of the comb waveform and show that it can be adjusted to a theoretical model recently presented. Our results suggest that silicon optomechanical cavities can play a role in integrated microwave photonics.

Synchronization of Optomechanical Nanobeams by Mechanical Interaction.

The synchronization of coupled oscillators is a phenomenon found throughout nature. Mechanical oscillators are paradigmatic examples, but synchronizing their nanoscaled versions is challenging. We report synchronization of the mechanical dynamics of a pair of optomechanical crystal cavities that, in contrast to previous works performed in similar objects, are intercoupled with a mechanical link and support independent optical modes. In this regime they oscillate in antiphase, which is in agreement with the predictions of our numerical model that considers reactive coupling. We also show how to temporarily disable synchronization of the coupled system by actuating one of the cavities with a heating laser, so that both cavities oscillate independently. Our results can be upscaled to more than two cavities and pave the way towards realizing integrated networks of synchronized mechanical oscillators.

Invited Article: Tuning and stabilization of optomechanical crystal cavities through NEMS integration

Nanobeam optomechanical crystals, in which localized GHz frequency mechanical modes are coupled to wavelength-scale optical modes, are being employed in a variety of experiments across different material platforms. Here, we demonstrate the electrostatic tuning and stabilization of such devices, by integrating a Si3N4 slot-mode optomechanical crystal cavity with a nanoelectromechanical systems element, which controls the displacement of an additional “tuning” beam within the optical near-field of the optomechanical cavity. Under DC operation, tuning of the optical cavity wavelength across several optical linewidths with little degradation of the optical quality factor (Q ≈ 105) is observed. The AC response of the tuning mechanism is measured, revealing actuator resonance frequencies in the 10 MHz–20 MHz range, consistent with the predictions from simulations. Feedback control of the optical mode resonance frequency is demonstrated, and alternative actuator geometries are presented.

Microwave-controlled optical double optomechanically induced transparency in a hybrid piezo-optomechanical cavity system

We propose a scheme that is able to generate the microwave controlled optical double optome-chanical induced transparency (OMIT) in a hybrid piezo-optomechanical cavity system, which a piezoelectric optomechanical crystal AlN-nanobeam resonator is placed in a superconducting microwave cavity, and the AlN-nanobeam resonator can be simultaneously driven by both the optical field via the radiation pressure and the microwave field via the piezoelectric interaction. We show that in the presence of a strong pumped optical field applied to the optomechanical crystal cavity through the optical waveguide and an intensely stimulated microwave field applied to the superconducting microwave cavity, a double-OMIT window can be observed in the weak output probe field. The mechanism is that a N-type four-level system can be formed by the system, when two driving fields and a probe field are applied to the corresponding levels, under the effect of quantum interference between different energy level pathways, the third-order nonlinear absorption is enhanced by the constructive quantum interference while the linear absorption is inhibited by the destruc- tive quantum interference, as a result, the double-OMIT window is generated. Our scheme can be applied to realize high-speed optical switches, high-resolution spectroscopy, coherent population trapping or quantum information processing in the solid state quantum systems.

Nanocrystalline silicon optomechanical cavities.

Silicon on insulator photonics has offered a versatile platform for the recent development of integrated optomechanical circuits. However, there are some constraints such as the high cost of the wafers and limitation to a single physical device level. In the present work we investigate nanocrystalline silicon as an alternative material for optomechanical devices. In particular, we demonstrate that optomechanical crystal cavities fabricated of nanocrystalline silicon have optical and mechanical properties enabling non-linear dynamical behaviour and effects such as thermo-optic/free-carrier-dispersion self-pulsing, phonon lasing and chaos, all at low input laser power and with typical frequencies as high as 0.3 GHz.

Engineering Phonon Leakage in Nanomechanical Resonators

We propose and experimentally demonstrate a technique for coupling phonons out of an optomechanical crystal cavity. By designing a perturbation that breaks a symmetry in the elastic structure, we selectively induce phonon leakage without affecting the optical properties. It is shown experimentally via cryogenic measurements that the proposed cavity perturbation causes loss of phonons into mechanical waves on the surface of silicon, while leaving photon lifetimes unaffected. This demonstrates that phonon leakage can be engineered in on-chip optomechanical systems. We experimentally observe large fluctuations in leakage rates that we attribute to fabrication disorder and verify this using simulations. Our technique opens the way to engineering more complex on-chip phonon networks utilizing guided mechanical waves to connect quantum systems.

Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry

Photonic crystals use periodic structures to create frequency regions where the optical wave propagation is forbidden, which allows the creation and integration of complex optical functionalities in small footprint devices. Such strategy has also been successfully applied to confine mechanical waves and to explore their interaction with light in the so-called optomechanical cavities. Because of their challenging design, these cavities are traditionally fabricated using dedicated high-resolution electron-beam lithography tools that are inherently slow, limiting this solution to small-scale or research applications. Here we show how to overcome this problem by using a deep-UV photolithography process to fabricate optomechanical crystals in a commercial CMOS foundry. We show that a careful design of the photonic crystals can withstand the limitations of the photolithography process, producing cavities with measured intrinsic optical quality factors as high as Qi = (1.21 ± 0.02) × 106. Optomechanical crystals are also created using phononic crystals to tightly confine the GHz sound waves within the optical cavity, resulting in a measured vacuum optomechanical coupling rate of g0 = 2π × (91 ± 4) kHz. Efficient sideband cooling and amplification are also demonstrated since these cavities are in the resolved sideband regime. Further improvements in the design and fabrication process suggest that commercial foundry-based optomechanical cavities could be used for quantum ground-state cooling.

Ultraviolet optomechanical crystal cavities with ultrasmall modal mass and high optomechanical coupling rate.

Optomechanical crystal (OMC) cavities which exploit the simultaneous photonic and phononic bandgaps in periodic nanostructures have been utilized to colocalize, couple, and transduce optical and mechanical resonances for nonlinear interactions and precision measurements. The development of near-infrared OMC cavities has difficulty in maintaining a high optomechanical coupling rate when scaling to smaller mechanical modal mass because of the reduction of the spatial overlap between the optical and mechanical modes. Here, we explore OMC nanobeam cavities in gallium nitride operating at the ultraviolet wavelengths to overcome this problem. With a novel optimization strategy, we have successfully designed an OMC cavity, with a size of 3.83 × 0.17 × 0.13 μm3 and the mechanical modal mass of 22.83 fg, which possesses an optical mode resonating at the wavelength of 393.03 nm and the fundamental mechanical mode vibrating at 14.97 GHz. The radiation-limited optical Q factor, mechanical Q factor, and optomechanical coupling rate are 2.26 × 107, 1.30 × 104, and 1.26 MHz, respectively. Our design and optimization approach can also serve as the general guidelines for future development of OMC cavities with improved device performance.

High-mechanical-frequency characteristics of optomechanical crystal cavity with coupling waveguide.

Optomechanical crystals have attracted great attention recently for their ability to realize strong photon-phonon interaction in cavity optomechanical systems. By far, the operation of cavity optomechanical systems with high mechanical frequency has to employ tapered fibres or one-sided waveguides with circulators to couple the light into and out of the cavities, which hinders their on-chip applications. Here, we demonstrate larger-centre-hole nanobeam structures with on-chip transmission-coupling waveguide. The measured mechanical frequency is up to 4.47 GHz, with a high mechanical Q-factor of 1.4 × 103 in the ambient environment. The corresponding optomechanical coupling rate is calculated and measured to be 836 kHz and 1.2 MHz, respectively, while the effective mass is estimated to be 136 fg. With the transmission waveguide coupled structure and a small footprint of 3.4 μm2, this simple cavity can be directly used as functional components or integrated with other on-chip devices in future practical applications.

Pulsed Excitation Dynamics of an Optomechanical Crystal Resonator near Its Quantum Ground State of Motion

Using pulsed optical excitation and read-out along with single-phonon-counting techniques, we measure the transient backaction, heating, and damping dynamics of a nanoscale silicon optomechanical crystal cavity mounted in a dilution refrigerator at a base temperature of Tf≈11 mK. In addition to observing a slow (approximately 740-ns) turn-on time for the optical-absorption-induced hot-phonon bath, we measure for the 5.6-GHz “breathing” acoustic mode of the cavity an initial phonon occupancy as low as ⟨n⟩=0.021±0.007 (mode temperature Tmin≈70 mK) and an intrinsic mechanical decay rate of γ0=328±14 Hz (Qm≈1.7×107). These measurements demonstrate the feasibility of using short pulsed measurements for a variety of quantum optomechanical applications despite the presence of steady-state optical heating.Received 6 April 2015DOI:https://doi.org/10.1103/PhysRevX.5.041002This article is available under the terms of the Creative Commons Attribution 3.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article’s title, journal citation, and DOI.Published by the American Physical Society

Optomechanical crystal nanobeam cavity with high optomechanical coupling rate

An optomechanical crystal nanobeam cavity, only by increasing the radius of air holes in the defect region, is proposed and optimized for a high optomechanical coupling rate. In our proposed cavity, the photonic and phononic defect modes are simultaneously confined by each corresponding bandgap, and the overlap of the optical and mechanical modes can be improved simply by adjusting the radius of the air holes. Accordingly, an optomechanical coupling rate (g) as high as 1.16 MHz is obtained, which is the highest coupling rate among the reported optomechanical crystal cavities. What’s more, the proposed cavity also exhibits a high mechanical frequency of 4.01 GHz and a small effective mass of 85 fg for the fundamental mechanical mode.

Optical and mechanical mode tuning in an optomechanical crystal with light-induced thermal effects

We report on the modification of the optical and mechanical properties of a silicon 1D optomechanical crystal cavity due to thermo-optic effects in a high phonon/photon population regime. The cavity heats up due to light absorption in a way that shifts the optical modes towards longer wavelengths and the mechanical modes to lower frequencies. By combining the experimental optical results with finite-difference time-domain simulations, we establish a direct relation between the observed wavelength drift and the actual effective temperature increase of the cavity. By assuming that the Young's modulus decreases accordingly to the temperature increase, we find a good agreement between the mechanical mode drift predicted using a finite element method and the experimental one.

Silicon optomechanical crystal resonator at millikelvin temperatures

Optical measurements of a nanoscale silicon optomechanical crystal cavity with a mechanical resonance frequency of 3.6 GHz are performed at subkelvin temperatures. We infer optical-absorption-induced heating and damping of the mechanical resonator from measurements of phonon occupancy and motional sideband asymmetry. At the lowest probe power and lowest fridge temperature (T_f=10 mK), the localized mechanical resonance is found to couple at a rate of γ_i/2π=400 Hz (Q_(m)=9×10^6) to a thermal bath of temperature T_b≈270 mK. These measurements indicate that silicon optomechanical crystals cooled to millikelvin temperatures should be suitable for a variety of experiments involving coherent coupling between photons and phonons at the single quanta level.

Optimized optomechanical crystal cavity with acoustic radiation shield

We present the design of an optomechanical crystal nanobeam cavity that combines finite-element simulation with numerical optimization, and considers the optomechanical coupling arising from both moving dielectric boundaries and the photo-elastic effect. Applying this methodology results in a nanobeam with an experimentally realized intrinsic optical Q-factor of 1.2x10^6, a mechanical frequency of 5.1GHz, a mechanical Q-factor of 6.8x10^5 (at T=10K), and a zero-point-motion optomechanical coupling rate of g=1.1MHz.