Abstract
Nanobeam optomechanical crystals, in which localized GHz frequency mechanical modes are coupled to wavelength-scale optical modes, are being employed in a variety of experiments across different material platforms. Here, we demonstrate the electrostatic tuning and stabilization of such devices, by integrating a Si3N4 slot-mode optomechanical crystal cavity with a nanoelectromechanical systems element, which controls the displacement of an additional “tuning” beam within the optical near-field of the optomechanical cavity. Under DC operation, tuning of the optical cavity wavelength across several optical linewidths with little degradation of the optical quality factor (Q ≈ 105) is observed. The AC response of the tuning mechanism is measured, revealing actuator resonance frequencies in the 10 MHz–20 MHz range, consistent with the predictions from simulations. Feedback control of the optical mode resonance frequency is demonstrated, and alternative actuator geometries are presented.
Highlights
Nanobeam optomechanical crystal cavities have been used in a number of recent experiments in cavity optomechanics
We consider the integration of Si3N4 nanobeam optomechanical crystals with nanoelectromechanical systems (NEMS)[14] and, in particular, a NEMS actuator that enables electrostatic tuning and feedback stabilization of the optical cavity resonance
To enable NEMS integration without directly affecting the properties of the optomechanical cavity, we utilize the slot-mode optomechanical crystal geometry demonstrated in Ref. 21
Summary
Nanobeam optomechanical crystal cavities have been used in a number of recent experiments in cavity optomechanics. By co-localizing a high frequency (GHz) mechanical mode with a wavelengthscale optical mode and using phononic and photonic bandgaps to limit mechanical dissipation due to anchors and optical loss due to in-plane radiation, respectively, these systems offer a number of advantages Recent experiments utilizing this platform include ground state cooling of the mechanical resonator,[1] coupling of the optomechanical cavity to propagating phonons,[2,3] observation of non-classical correlations between single phonons and single photons,[4] and the demonstration of a path toward absolute thermometry based on comparing the thermally driven motion of the mechanical resonator to quantum back-action driven motion.[5] after their initial development and optimization in silicon,[1,6] nanobeam optomechanical crystals have been demonstrated in Si3N4,5,7,8 AlN,[9,10] GaAs,[2,11] diamond,[12] and LiNbO3.13. Our NEMS actuator provides a combination of DC tuning of the optical cavity mode wavelength over a range of a few cavity linewidths and AC modulation of the wavelength
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