A novel nano-sensor based on optomechanical crystal cavity

Abstract

Optical devices based on new sensing principle are widely used in biochemical and medical area. Nowadays, mass sensing based on monitoring the frequency shifts induced by added mass in oscillators is a well-known and widely used technique. It is interesting to note that for nanoscience and nanotechnology applications there is a strong demand for very sensitive mass sensors, being the target a sensor for single molecule detection. The desired mass resolution for very few or even single molecule detection, has to be below the femtogram range. Considering the strong interaction between high co-localized optical mode and mechanical mode in optomechanical crystal (OMC) cavities, we investigate OMC splitnanobeam cavities in silicon operating near at the 1550nm to achieve high optomechanical coupling rate and ultra-small motion mass. Theoretical investigations of the optical and mechanical characteristic for the proposed cavity are carried out. By adjusting the structural parameters, the cavity’s effective motion mass below 10fg and mechanical frequency exceed 10GHz. The transmission spectrum of the cavity is sensitive to the sample which located on the center of the cavity. We conducted the fabrication and the characterization of this cavity sensor on the silicon-on-insulator (SOI) chip. By using vertical coupling between the tapered fiber and the SOI chip, we measured the transmission spectrum of the cavity, and verify this cavity is promising for ultimate precision mass sensing and detection.