Optofluidic Sensor Research Articles

Development of an Opto-fluidic Microsystem Dedicated to Chemical Analysis in a Nuclear Environment

Micromachining techniques enable the fabrication of innovative lab-on-a-chip. Following the trend in chemical and biological analysis, the use of microsystems also appears compelling in the nuclear industry. The volume reduction of radioactive solutions is especially attractive in order to reduce the workers radiation exposition in the context of off-line analysis in spent nuclear fuel reprocessing plants. We hence present the development of an opto-fluidic sensor combining microfluidic channels for fluid transportation and integrated optics for detection. With the aim of achieving automated microanalysis with reduced response time the sensor is made compatible with a commercial microfluidic holder. Therefore the chip is connected to computer controlled pumps and electrovalves thanks to capillary tubing. In this paper we emphasis on the fluid handling capacities of the opto-fluidic sensor.

Sensitive optofluidic flow rate sensor based on laser heating and microring resonator

We demonstrate an optofluidic flow rate sensor based on the heat transfer effect in a microfluidic channel for the lab-on-a-chip applications. By employing an optofluidic ring resonator (OFRR), the wavelength shift of the resonant dip of the whispering gallery mode is detected as a function of the flow rate when the flow is heated by a 1480-nm laser. A measurement range of 2–100 μL/min, a minimum detectable change of 30 nL/min, and an accuracy of 5.2 % for the flow rate detection are achieved. Experimental results indicate that the OFRR flow rate sensor has good repeatability, and the inverse sensitivity is beneficial for detecting the low flow rate with high sensitivity.

Optofluidic Oxygen Sensor with Simple Structure and Low-Cost Materials

Optofluidic Oxygen Sensor with Simple Structure and Low-Cost Materials

Silicon-Nitride-Based Integrated Optofluidic Biochemical Sensors Using a Coupled-Resonator Optical Waveguide

Silicon nitride (SiN) is a promising material platform for integrating photonic components and microfluidic channels on a chip for label-free, optical biochemical sensing applications in the visible to near-infrared wavelengths. The chip-scale SiN-based optofluidic sensors can be compact due to a relatively high refractive index contrast between SiN and the fluidic medium, and low-cost due to the complementary metal-oxide-semiconductor (CMOS)-compatible fabrication process. Here, we demonstrate SiN-based integrated optofluidic biochemical sensors using a coupled-resonator optical waveguide (CROW) in the visible wavelengths. The working principle is based on imaging in the far field the out-of-plane elastic-light-scattering patterns of the CROW sensor at a fixed probe wavelength. We correlate the imaged pattern with reference patterns at the CROW eigenstates. Our sensing algorithm maps the correlation coefficients of the imaged pattern with a library of calibrated correlation coefficients to extract a minute change in the cladding refractive index. Given a calibrated CROW, our sensing mechanism in the spatial domain only requires a fixed-wavelength laser in the visible wavelengths as a light source, with the probe wavelength located within the CROW transmission band, and a silicon digital charge-coupled device (CCD) / CMOS camera for recording the light scattering patterns. This is in sharp contrast with the conventional optical microcavity-based sensing methods that impose a strict requirement of spectral alignment with a high-quality cavity resonance using a wavelength-tunable laser. Our experimental results using a SiN CROW sensor with eight coupled microrings in the 680nm wavelength reveal a cladding refractive index change of ~1.3 × 10^-4 refractive index unit (RIU), with an average sensitivity of ~281 ± 271 RIU-1 and a noise-equivalent detection limit (NEDL) of 1.8 ×10^-8 RIU ~ 1.0 ×10^-4 RIU across the CROW bandwidth of ~1 nm.

Optofluidic integrated in-fiber fluorescence online optical fiber sensor

An in-fiber integrated fluorescence online optofluidic sensor is realized in a hollow optical fiber with a suspended core. A micro-region for fluorescence quenching reaction is built in the hollow optical fiber. By etching microholes on the surface of the fiber, the fluorescence reagents can be injected into the optical fiber and form microflows in the region. Simultaneously, indicator molecules can be excitated through the evanescent field of the suspended core and the fluorescence is efficiently coupled into the core and can be detected. In this report, the concentration of nitrite can be determined by quenching the fluorescence of rhodamine 6G during optofluidic reaction in the optical fiber. Furthermore, the results demonstrate the feasibility of the integrated in-fiber optofluidic method for trace fluorescence detection.

Performance and flow dynamics studies of polymeric optofluidic SERS sensors

We present a polymer-based optofluidic surface enhanced Raman scattering chip for biomolecule detection, serving as a disposable sensor choice with cost-effective production. The SERS substrate is fabricated by using industrial roll-to-roll UV-nanoimprinting equipment and integrated with adhesive-based polymeric microfluidics. The functioning of the SERS detection on-chip is confirmed and the effect of the polymer lid on the obtainable Raman spectra is analysed. Rhodamine 6G is used as a model analyte to demonstrate continuous flow measurements on a planar SERS substrate in a microchannel. The relation between the temporal response of the sensors and sample flow dynamics is studied with varied flow velocities, using SERS and fluorescence detection. The response time of the surface-dependent SERS signal is longer than the response time of the fluorescence signal of the bulk flow. This observation revealed the effect of convection on the temporal SERS responses at 25 µl/min to 1000 µl/min flow velocities. The diffusion of analyte molecules from the bulk concentration into the sensing surface induces about a 40-second lag time in the SERS detection. This lag time, and its rising trend with slower flow velocities, has to be taken into account in future trials of the optofluidic SERS sensor, with active analyte binding on the sensing surface.

Ultrasensitive Ag-coated TiO2nanotube arrays for flexible SERS-based optofluidic devices

A novel SERS optofluidic sensor based on Ag-decorated TiO2nanotubes has been developed for repeatable detection of organic molecules and biological assays.

Lensfree optofluidic plasmonic sensor for real-time and label-free monitoring of molecular binding events over a wide field-of-view.

We demonstrate a high-throughput biosensing device that utilizes microfluidics based plasmonic microarrays incorporated with dual-color on-chip imaging toward real-time and label-free monitoring of biomolecular interactions over a wide field-of-view of >20 mm2. Weighing 40 grams with 8.8 cm in height, this biosensor utilizes an opto-electronic imager chip to record the diffraction patterns of plasmonic nanoapertures embedded within microfluidic channels, enabling real-time analyte exchange. This plasmonic chip is simultaneously illuminated by two different light-emitting-diodes that are spectrally located at the right and left sides of the plasmonic resonance mode, yielding two different diffraction patterns for each nanoaperture array. Refractive index changes of the medium surrounding the near-field of the nanostructures, e.g., due to molecular binding events, induce a frequency shift in the plasmonic modes of the nanoaperture array, causing a signal enhancement in one of the diffraction patterns while suppressing the other. Based on ratiometric analysis of these diffraction images acquired at the detector-array, we demonstrate the proof-of-concept of this biosensor by monitoring in real-time biomolecular interactions of protein A/G with immunoglobulin G (IgG) antibody. For high-throughput on-chip fabrication of these biosensors, we also introduce a deep ultra-violet lithography technique to simultaneously pattern thousands of plasmonic arrays in a cost-effective manner.

Optofluidic jet waveguide enhanced Raman spectroscopy

An optofluidic device based on a liquid jet waveguide has been successfully applied in Raman spectroscopy. The sample under analysis is used to produce a liquid stream by means of a capillary nozzle. The waveguiding nature of the stream is used to effectively collect the Raman signal arising from chemical compounds when opportunely excited. An aligned configuration allows a direct coupling between the liquid jet and a multimode optical fiber used to deliver Raman signal toward the detection system. This approach avoids any necessity to contain the solution by solid walls and removes any background signal coming from the substrate that commonly affects Raman measurements. Two different set-up configurations are proposed and compared in terms of excitation/collection efficiency. Experimental measurements performed on ethanol–water solutions show high sensitivity enhancement of our sensor with respect bulk measurements. Measurements performed on potassium nitrate solution show high potentiality of our optofluidic sensor in water quality analysis and monitoring.

Liquid refractive index sensing independent of opacity using an optofluidic diffraction sensor.

We have implemented a multifunctional optofluidic sensor that can monitor changes in the refractive index and pressure of biofluid simultaneously and can detect free-solution molecular interaction in situ. In this Letter, we demonstrate two major improvements of this sensor proven by both simulation and experiments. One improvement is the broader measurement range of refractive index by making the diffraction grating with high-index polymer. The other improvement is the separation of refractive index sensing from opacity sensing by using the relative power ratio of diffraction orders. This simple, compact and low-cost multifunctional optofluidic sensor has the potential to be used for in situ biofluid monitoring.

Measurement and control of pressure driven flows in microfluidic devices using an optofluidic flow sensor.

Measurement and control of pressure-driven flow (PDF) has a great potential to enhance the performance of chemical and biological experiments in Lab on a Chip technology. In this paper, we present an optofluidic flow sensor for real-time measurement and control of PDF. The optofluidic flow sensor consists of an on-chip micro Venturi and two optical Fabry-Pérot (FP) interferometers. Flow rate was measured from the fringe shift of FP interferometers resulted from movement fluid in the on-chip micro Venturi. The experimental results show that the optofluidic flow sensor has a minimum detectable flow change of 5 nl/min that is suitable for real time monitoring and control of fluids in many chemical and biological experiments. A Finite Element Method is used to solve the three dimensional (3D) Navier-Stokes and continuity equations to validate the experimental results.

Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining.

We report on fabrication of a microtoroid resonator of a high-quality factor (i.e., Q-factor of ~3.24 × 10(6) measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3D) micromachining. Coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. The assembly of the fiber to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using CO2 laser irradiation. The integrated microresonator maintains a high Q-factor of 3.21 × 10(5) as measured in air, which should still be sufficient for many sensing applications. We test the functionality of the integrated optofluidic sensor by performing bulk refractive index sensing of purified water doped with tiny amount of salt. It is shown that a detection limit of ~1.2 × 10(-4) refractive index unit can be achieved. Our result showcases the capability of integration of high-Q microresonators with complex microfluidic systems using femtosecond laser 3D micromachining.

All-in-fiber optofluidic sensor fabricated by femtosecond laser assisted chemical etching.

An all-in-fiber prototype optofluidic device was fabricated by femtosecond laser irradiation and subsequent selective chemical wet etching. Horizontal and vertical microchannels can be flexibly created into an optical fiber to form a fluidic cavity with inlets/outlets. The fluidic cavity also functions as an optical Fabry-Perot cavity in which the filled liquid can be probed. The assembly-free microdevice exhibited a fringe visibility of 20dB and was demonstrated for measurement of the refractive index of the filling liquids. The proposed all-in-fiber optofluidic micro device is attractive for chemical and biomedical sensing because it is flexible in design, simple to fabricate, mechanically robust, and miniaturized in size.

Real-time measurement of flow rate in microfluidic devices using a cantilever-based optofluidic sensor

Real-time and accurate measurement of flow rate is an important reqirement in lab on a chip (LOC) and micro total analysis system (μTAS) applications. In this paper, we present an experimental and numerical investigation of a cantilever-based optofluidic flow sensor for this purpose. Two sensors with thin and thick cantilevers were fabricated by engraving a 2D pattern of cantilever/base on two polymethylmethacrylate (PMMA) slabs using a CO2 laser system and then casting a 2D pattern with polydimethylsiloxane (PDMS). The basic working principle of the sensor is the fringe shift of the Fabry-Pérot (FP) spectrum due to a changing flow rate. A Finite Element Method (FEM) is used to solve the three dimensional (3D) Navier-Stokes and structural deformation equations to simulate the pressure distribution, velocity and cantilever deflection results of the flow in the channel. The experimental results show that the thin and thick cantilevers have a minimum detectable flow change of 1.3 and 4 (μL min(-1)) respectively. In addition, a comparison of the numerical and experimental deflection of the cantilever has been done to obtain the effective Young's modulus of the thin and thick PDMS cantilevers.

Optofluidic Waveguiding for Biomedical Sensing

ABSTRACTWe review an optofluidic waveguiding lab-on-a-chip used to sense bioparticles. The sensor uses a liquid filled Anti-Resonant Reflecting Optical Waveguide (ARROW) that is interfaced with standard ridge waveguides. The ridge waveguides are coupled to off-chip lasers and detectors via optical fiber. A perpendicular intersection between the ARROW and a ridge waveguide is especially useful for detecting fluorescently tagged particles. Light coupled into the ridge waveguide can fluorescently excite these particles within a very small volume. Fluorescent signal can then be guided within the ARROW and subsequently off chip to a detector.We also discuss how such devices are fabricated. Both the ARROW and ridge waveguides are made using alternating thin films of tantalum oxide and silicon dioxide on silicon substrates. These thin films are deposited by either sputtering or plasma enhanced chemical vapor deposition (PECVD). The waveguides are patterned using a combination of standard photolithographic processes, reactive ion etching, and sacrificial etching. Low-loss optical guiding is very dependent on both the waveguide structure and the materials used. The latest processes for maximizing detection sensitivity are reviewed.We also present results using the optofluidic waveguiding sensor for detecting a variety of different types of particles such as fluorescently labeled nanobeads, viruses, ribosomes, and RNA.

In-line microfluidic integration of photonic crystal fibres as a highly sensitive refractometer.

Photonic crystal fibres appear to be an ideal platform for the realisation of novel optofluidic devices and sensors due to their waveguide nature and microstructured architecture. In this paper, we present the fabrication and characterisation of an in-line photonic crystal fibre microfluidic refractometer enabled by a C-shaped fibre. The C-shaped fibre spliced in-between the photonic crystal fibre and the single-mode fibre allows simultaneous in-line optical signal delivery and analyte fluid feeding. Through an arc discharge pre-treatment technique, we successfully achieve selective exploitation of only the central two channels of the photonic crystal fibre for microfluidic sensing. After constructing a Sagnac interferometer, a highly sensitive refractometer with a sensitivity of 8699 nm per RIU was achieved experimentally; this agrees very well with the theoretical value of 8675 nm per RIU. As a demonstration for label-free optical sensing application, the refractometer was used to measure the concentration of NaCl solution with a sensitivity of 15.08 nm/(1 wt%) and a detection limit of 2.3 × 10(-3) wt% (23 ppm).

In-line characterization and identification of micro-droplets on-chip

AbstractWe present an integrated optofluidic sensor system for in-line characterization of micro-droplets. The device provides information about the droplet generation frequency, the droplet volume, and the content of the droplet. Due to its simplicity this principle can easily be implemented with other microfluidic components on one and the same device. The sensor is based on total internal reflection phenomena. Droplets are pushed through a microfluidic channel which is hit by slightly diverging monochromatic light. At the solid-liquid interface parts of the rays experience total internal reflection while another part is transmitted. The ratio of reflected to transmitted light depends on the refractive index of the solution. Both signals are recorded simultaneously and provide a very stable output signal for the droplet characterization. With the proposed system passing droplets were counted up to 320 droplets per second and droplets with different volumes could be discriminated. In a final experiment droplets with different amounts of dissolved CaCl

Electro-Optical Detection of Single Nanoparticles on a Nanopore-Optofluidic Chip

ABSTRACTA solid-state nanopore was integrated into an optofluidic sensor chip, liquid-core anti-resonant reflecting optical waveguide (ARROW). The solid-state nanopore worked as a smart gate, which simultaneously provided characteristic electrical signals and controlled the entry of single nanoparticles into the liquid-core channel. The subsequent fluorescence detection further identified the nanoparticles by providing optical signals within a specific wavelength range. In this work, correlated electrical and optical detection of single nanoparticles, H1N1 viruses, and λ-DNA molecules was demonstrated. Different types of particles in a mixture were successfully discriminated. Moreover, the flow velocity in the liquid-core channel was extracted with the help of combined analysis of electrical and optical signals. Enhanced electrical sensitivity using a solid-state nanopore with a thin limiting aperture sculpted by SiO2 deposition was also shown.

Elastomeric 2D grating and hemispherical optofluidic chamber for multifunctional fluidic sensing

We present an optofluidic sensor based on an elastomeric two-dimensional (2D) grating integrated inside a hemispherical fluid chamber. A laser beam is diffracted before (reflection) and after (transmission) going through the grating and liquid in the dome chamber. The sensing mechanism is investigated and simulated with a finite-difference time-domain-based electromagnetic method. For the experiment, by analyzing the size, power, and shape of the 2D diffraction patterns, we can retrieve multiple parameters of the liquid, including the refractive index, pressure, and opacity with high sensitivity. We demonstrate that the glucose concentration can be monitored when mixed in a different concentrated phosphate-buffered saline solution. The free-solution binding of bovine serum albumin (BSA) and anti-BSA IgG is detected with this optical sensor. This low-cost, multifunctional, and reliable optofluidic sensor has the potential to be used as a monitor of biofluid, such as blood in hemodialysis.

Fluorescent polymer coated capillaries as optofluidic refractometric sensors

A capillary microresonator platform for refractometric sensing is demonstrated by coating the interior of thick-walled silica capillaries with a sub-wavelength layer of high refractive index, dye-doped polymer. No intermediate processing, such as etching or tapering, of the capillary is required. Side illumination and detection of the polymer layer reveals a fluorescence spectrum that is periodically modulated by whispering gallery mode resonances within the layer. Using a Fourier technique to calculate the spectral resonance shifts, the fabricated capillary resonators exhibited refractometric sensitivities up to approximately 30 nm/RIU upon flowing aqueous glucose through them. These sensors could be readily integrated with existing biological and chemical separation platforms such as capillary electrophoresis and gas chromatography where such thick walled capillaries are routinely used with polymer coatings. A review of the modelling required to calculate whispering gallery eigenmodes of such inverted cylindrical resonators is also presented.