An opto-mechanical stacked metamaterials is proposed. Different from traditional metamaterials, it adopts a separable design to realize the stacked structure of the lower and upper chips. It can break the metamaterial thickness limit and integrate absorbing/execution units on functional layer with a thickness less than one thousandth of a wavelength, enabling high-performance detection. We design and prepare a millimeter wave opto-mechanical stacked metamaterial array detector, whose upper chip is only 1/2133 of the wavelength, but the absorptivity is about 99 %. Unlike the traditional detectors that convert millimeter wave radiation into electrical signals, it converts the radiation into micromechanical deflections opto-mechanical structures, and then reads them out optically. It’s equivalent to converting the millimeter wave detection into visible light detection. An optical readout system was constructed to verify the detection performance. Experimental results show that the response time can reach 20 ms and the NEP (Noise Equivalent Power) is 1.1 × 10−10 W/Hz1/2.