Optical Properties Of ZnS Films Research Articles

窒素導入ＲＦスパッタＺｎＳ膜の光学的性質

窒素導入ＲＦスパッタＺｎＳ膜の光学的性質

Dielectric and optical properties of ZnS films

A.c. properties of ZnS film capacitors were studied at different temperatures (78 to 380 K) and frequencies (10 2 to 10 5 Hz). Dielectric constant was found to be independent of frequency and film thickness (>900 Å). Capacitance, though dependent on temperature and frequency, became constant in a low temperature region for all frequencies. Loss factor, showing a pronounced minimum with frequency, increased with the rise of temperature and tan δ min shifted to a higher frequency. Breakdown voltages were also measured. A proposed model of an equivalent circuit predicts some characteristic features of the capacitors which have been experimentally verified. Refractive indices of these films were measured for the visible region and the dielectric constant was evaluated for optical frequencies. Effects of substrate temperatures on these films were also studied.