Among chromogenic materials, tungsten trioxide (WO3) is of great interest. It is a colourlesssemiconductor characterised by a lack of toxicity and high chemical stability. WO3 exhibits gasochromicproperties, meaning that the material undergoes reversible changes in optical properties when it isexposed to gas. These properties make tungsten oxide a suitable material for sensing applications. Thispaper presents the results of an analysis of the surface, structural and optical properties of tungstenoxide thin films fabricated by electron beam evaporation and annealed at 400C to 800C. Opticalproperties, including gasochromic properties, were determined from light transmission spectra inan atmosphere containing hydrogen at the concentrations ranging from 50 ppm to 500 ppm. Theoptical properties of WO3 films without and with a palladium catalyst layer are applied. Annealing thesamples at temperatures above 400C resulted in crystallisation of the layers, and further post-processmodification at 800C led to sublimation, the formation of islands of crystalline grains of large size anda significant deterioration in optical properties. A change in the light transmission coefficient occurredfor all samples with the catalyst layer applied after the introduction of a hydrogen-argon mixture.Based on the results, it can be concluded that the layers annealed at 400C had the best gasochromic properties due to the greatest changes in light transmission under hydrogen. The study confirmsthat it is possible to improve the gasochromic response of tungsten trioxide thin films produced byelectron beam evaporation using thermal modification, which, to the best of current knowledge, hasnot previously been achieved.Keywords: electronics, WO3, electron beam evaporation, gasochromic properties, optical properties,annealing, optical hydrogen gas sensor