This study examined the epitaxial growth of YBa2Cu3O7-x (YBCO) films on (00l) LaAlO3 substrates prepared by metal organic deposition (MOD) using a trifluoroacetate (TFA) solution. The effects of humidity (0-20% of PH2O) and film thickness (0.4-2.1 mum) on the phase formation, texture, and microstructures of the YBCO films were examined by X-ray diffraction, pole-figure, and scanning electron microscopy (SEM). The microstructure and resultant critical properties varied remarkably with humidity. With increasing humidity, the amount of the second phase (BaF2) decreased, the degree of texture was enhanced, and consequently the critical current (IC) and temperature (TC ) were improved. In the case of multi-coated films, the IC value increased from 35 to 152 A/cm-width with an increasing number of coatings from one to three, while the corresponding critical current density (JC) was in the range of 0.9-1.5 MA/cm2 . Both the IC and JC decreased when an additional coating was applied due to microstructural degradation.