Robotics is an interdisciplinary scientific direction, therefore, when solving a number of problems, it becomes necessary to conduct research that is typical for other areas of science. So, when synthesizing new types of equipment in the „Robotics and Control in Technical Systems” laboratory, more accurate characteristics of individual components and assemblies were required, which ultimately led to a whole cycle of work on microfluidics. Of particular interest in the work performed is the development of new microdevices, since this involves the construction of a single complex of new mathematical and computer models that link hydrodynamics, elasticity theory, heat transfer process, parametric optimization and control theory. The first models were obtained that describe the movement of a piston fixed by an elastic spring in a pipe, taking into account the influence of dry viscous types of friction. By the method of factorial computational experiment, analytical dependencies were obtained for the main part of the fuel dosing unit — servo piston. Next, mathematical and computer models were built to analyze the fluid flow through a channel with variable geometry. Based on the simulation results, the design of a new micromechanical device — a piezoelectric micropump consisting of an elastic tube and annular piezoelements located on it, the sequential oscillation of which creates a non-zero average fluid flow, was refined. In the course of the adaptation of the model, an effective design of the device for smoothing fluid flow pulsations was obtained. These devices were developed and calculated for use in the liquid cooling system of capillary microgripper. A parametric analysis of the process of cooling the hot side of the Peltier element of the microgripper was carried out with a change in the following gripper parameters: the size and shape of the radiator, the coolant flow rate and the heat transfer coefficient. The results of the analysis of temperature fluctuations of the radiator under unsteady fluid flow confirmed the expected dependences of the cooling efficiency on the chosen geometry of the radiator and low-frequency fluid flow fluctuations.