Abstract Ammonia (NH3) is a reductive toxic gas, and prolonged exposure can lead to severe health issues. Additionally, elevated Levels of NH3 in exhaled breath can serve as a biomarker for various diseases. Consequently, monitoring NH3 in the air and for medical diagnostics is critical for public health and safety. However, developing NH3 gas sensors that function effectively under high humidity conditions, such as those found in human breath, has proven challenging. In this study, we present a simple and cost-effective NH3 gas sensor based on an interconnected silicon Nanowire (SiNW) structure, fabricated using the metal-assisted chemical etching (MACE) method. The sensing mechanism is attributed to the formation of a hole accumulation layer in the air, whose width decreases upon exposure to NH3. Moreover, the bundling of individual nanowires enhances the sensor’s response time, achieving a rapid response of approximately 70 seconds. Our NH3 sensor demonstrates a response magnitude significantly higher—by an order of magnitude—than that of similar SiNW structures reported in the literature.
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