High-performance PANI sensor on silicon nanowire arrays for sub-ppb NH3 detection

Abstract

For industrial production and disease diagnosis, real-time detection of low concentrations of NH3 is crucial, necessitating a gas-sensitive sensor compatible with integrated processes and exhibiting excellent performance. Herein, we employed wet etching and rapid in-situ polymerization on silicon nanowire substrates to grow polyaniline fibers, thereby fabricating NH3 gas sensors with p-p heterojunction and three-dimensional network structures. Characterization and gas sensing performance testing were conducted. The results demonstrate the outstanding NH3 detection capabilities of the sensor, providing stable responses down to concentrations as low as 1 ppb, which indicates its LOD is one to two orders of magnitude lower than current similar products. It also exhibits verified selectivity and long-term reliability. The excellent sensing performance is attributed to the high surface area from the silicon nanowire structure and efficient synergy of p-p heterojunction. Additionally, the influence of doping types of the substrates and annealing process were explored. This work serves as a reference for the design of silicon-based gas sensors with high sensitivity, low detection limits, and extended operational lifetimes, suitable for deployment in commercial integrated monitoring systems.