Neural Electrode Arrays Research Articles

Intravascular delivery of an ultraflexible neural electrode array for recordings of cortical spiking activity

Although intracranial neural electrodes have significantly contributed to both fundamental research and clinical treatment of neurological diseases, their implantation requires invasive surgery to open craniotomies, which can introduce brain damage and disrupt normal brain functions. Recent emergence of endovascular neural devices offers minimally invasive approaches for neural recording and stimulation. However, existing endovascular neural devices are unable to resolve single-unit activity in large animal models or human patients, impeding a broader application as neural interfaces in clinical practice. Here, we present the ultraflexible implantable neural electrode as an intravascular device (uFINE-I) for recording brain activity at single-unit resolution. We successfully implanted uFINE-Is into the sheep occipital lobe by penetrating through the confluence of sinuses and recorded both local field potentials (LFPs) and multi-channel single-unit spiking activity under spontaneous and visually evoked conditions. Imaging and histological analysis revealed minimal tissue damage and immune response. The uFINE-I provides a practical solution for achieving high-resolution neural recording with minimal invasiveness and can be readily transferred to clinical settings for future neural interface applications such as brain-machine interfaces (BMIs) and the treatment of neurological diseases.

Double Electrode Experiments Reveal the Processes Occurring at PEDOT-Coated Neural Electrode Arrays.

Neural electrodes have recently been developed with surface modifications of conductive polymers, in particular poly(3,4-ethylenedioxythiophene) (PEDOT), and extensively studied for their roles in recording and stimulation, aiming to improve their biocompatibility. In this work, the implications for the design of practical neural sensors are clarified, and systematic procedures for their preparation are reported. In particular, this study introduces the use of in vitro double electrode experiments to mimic the responses of neural electrodes with a focus on signal-recording electrodes modified with PEDOT. Specifically, potential steps on one unmodified electrode in an array are used to identify the responses for PEDOT doped with different anions and compared with that of a bare platinum (Pt) electrode. The response is shown to be related to the rearrangement of ions in solution near the detector electrode resulting from the potential step, with a current transient seen at the detector electrode. A rapid response for PEDOT doped with chloride (ca. 0.04 s) ions was observed and attributed to the fast movement of chloride ions in and out of the polymer film. In contrast, PEDOT doped with poly(styrenesulfonate) (PSS) responds much slower (ca. 2.2 s), and the essential immobility of polyanion constrains the direction of current flow.

Parasitic Capacitance in High-Density Neural Electrode Arrays: Sources and Evaluation Methods.

This study aims to identify sources of parasitic capacitance in high-density neural electrode arrays and to provide an approach for evaluating their associated capacitance values. We also represent the effect of parasitic capacitance on the electrochemical properties of electrodes. Electrochemical impedance spectroscopy (EIS) and voltage transient (VT) measurements were employed to assess the parasitic capacitance of a 16-channel ultramicro-sized electrode array (UMEA) (8×25 μm2 electrode sites). The effect of parasitic capacitance on cyclic voltammetry (CV), EIS, and VT measurements of 20-μm diameter electrodes was assessed by comparing two different array designs: narrow and wide trace arrays. The capacitive leakage currents and charge during CV measurements were not significant, however, during current pulsing 34% underestimation of the maximum charge injection capacity corresponded to capacitive leakage. Capacitive leakage during EIS resulted in an underestimation of the electrode impedance at frequencies >1.5 kHz. The electrode design and insulation thickness can play a significant role in determining the amount of capacitive leakage during current pulsing and EIS at higher frequencies. Determining the sources and levels of capacitive leakage current in high-density neural electrode arrays, enables us to correct the measured value for the leakage current and thus estimate the electrode impedance and stimulation thresholds more accurately. This study highlights the importance of electrode design in developing high-density arrays with minimum capacitive leakage.

Flexible a‐IGZO TFT‐Based Circuit for Active Addressing in Neural Stimulation Electrode Arrays

AbstractNeural interfaces have undergone significant advancements in recent decades, aiming for flexible, compact, and high‐density electrode arrays with a large number of channels. However, the scalability of these devices is often hindered by the number of wires needed to separately connect each electrode to external electronics. To address this limitation, thin‐film transistor (TFT)‐based electronic circuits offer a promising solution by enabling active addressing of stimulation electrodes and potentially increasing the channel count with fewer interconnections. This paper presents the integration of a circuit comprising two amorphous indium–gallium–zinc‐oxide (a‐IGZO) TFTs and a titanium nitride (TiN) electrode on a flexible polymer platform. This circuit precisely controls the electrode's On/Off states and the delivery of current for nerve stimulation. Characterization studies involving frequency and electrochemical analysis demonstrate the TFT‐based circuit's capability to operate at high frequencies, deliver biphasic stimulation pulses to the electrode, and store sufficient charge for effective neural stimulation. Moreover, the a‐IGZO TFTs exhibit remarkable stability during repeated gate voltage sweeps with minimal changes in electrical performance. This circuit has the potential to be extended to active‐matrix devices that enable electrode arrays with a high number of channels and enhanced spatial resolution, which is crucial for selective neural stimulation.

Nanotopography-enhanced biomimetic coating maintains bioactivity after weeks of dry storage and improves chronic neural recording

We developed a nanoparticle base layer technology capable of maintaining the bioactivity of protein-based neural probe coating intended to improve neural recording quality. When covalently bound on thiolated nanoparticle (TNP) modified surfaces, neural adhesion molecule L1 maintained bioactivity throughout 8 weeks of dry storage at room temperature, while those bound to unmodified surfaces lost 66% bioactivity within 3 days. We tested the TNP + L1 coating in mouse brains on two different neural electrode arrays after two different dry storage durations (3 and 28 days). The results show that dry-stored coating is as good as the freshly prepared, and even after 28 days of storage, the number of single units per channel and signal-to-noise ratio of the TNP + L1 coated arrays were significantly higher by 32% and 40% respectively than uncoated controls over 16 weeks. This nanoparticle base layer approach enables the dissemination of biomolecule-functionalized neural probes to users worldwide and may also benefit a broad range of applications that rely on surface-bound biomolecules.

Implantable polypyrrole bioelectrodes inducing anti-inflammatory macrophage polarization for long-term in vivo signal recording.

Bioelectrodes are critical components of implantable electronic devices that enable precise electrical signal transmission in close contact with living tissues. However, their in vivo performance is often compromised by inflammatory tissue reactions mainly induced by macrophages. Hence, we aimed to develop implantable bioelectrodes with high performance and high biocompatibility by actively modulating the inflammatory response of macrophages. Consequently, we fabricated heparin-doped polypyrrole electrodes (PPy/Hep) and immobilized anti-inflammatory cytokines (interleukin-4 [IL-4]) via non-covalent interactions. IL-4 immobilization did not alter the electrochemical performance of the original PPy/Hep electrodes. In vitro primary macrophage culture revealed that IL-4-immobilized PPy/Hep electrodes induced anti-inflammatory polarization of macrophages, similar to the soluble IL-4 control. In vivo subcutaneous implantation indicated that IL-4 immobilization on PPy/Hep promoted the anti-inflammatory polarization of host macrophages and significantly mitigated scarring around the implanted electrodes. In addition, high-sensitivity electrocardiogram signals were recorded from the implanted IL-4-immobilized PPy/Hep electrodes and compared to bare gold and PPy/Hep electrodes, which were maintained for up to 15 days post-implantation. This simple and effective surface modification strategy for developing immune-compatible bioelectrodes will facilitate the development of various electronic medical devices that require high sensitivities and long-term stabilities. STATEMENT OF SIGNIFICANCE: To fabricate highly immunocompatible conductive polymer-based implantable electrodes with high performance and stability in vivo, we introduced the anti-inflammatory activity to PPy/Hep electrodes by immobilizing IL-4 via non-covalent surface modification. IL-4-immobilized PPy/Hep could significantly mitigate inflammatory responses and scarring around implants by skewing macrophages to an anti-inflammatory phenotype. The IL-4-immobilized PPy/Hep electrodes could successfully record in vivo electrocardiogram signals for up to 15 days with no substantial sensitivity loss, retaining their superior sensitivity compared to bare gold and pristine PPy/Hep electrodes. Our simple and effective surface modification strategy for developing immune-compatible bioelectrodes will facilitate the development of various electronic medical devices that require high sensitivities and long-term stabilities, such as neural electrode arrays, biosensors, and cochlear electrodes.

Liquid Metal-Based Electrode Array for Neural Signal Recording.

Neural electrodes are core devices for research in neuroscience, neurological diseases, and neural-machine interfacing. They build a bridge between the cerebral nervous system and electronic devices. Most of the neural electrodes in use are based on rigid materials that differ significantly from biological neural tissue in flexibility and tensile properties. In this study, a liquid-metal (LM) -based 20-channel neural electrode array with a platinum metal (Pt) encapsulation material was developed by microfabrication technology. The in vitro experiments demonstrated that the electrode has stable electrical properties and excellent mechanical properties such as flexibility and bending, which allows the electrode to form conformal contact with the skull. The in vivo experiments also recorded electroencephalographic signals using the LM-based electrode from a rat under low-flow or deep anesthesia, including the auditory-evoked potentials triggered by sound stimulation. The auditory-activated cortical area was analyzed using source localization technique. These results indicate that this 20-channel LM-based neural electrode array satisfies the demands of brain signal acquisition and provides high-quality-electroencephalogram (EEG) signals that support source localization analysis.

Proof of Concept for Sustainable Manufacturing of Neural Electrode Array for In Vivo Recording.

Increasing requirements for neural implantation are helping to expand our understanding of nervous systems and generate new developmental approaches. It is thanks to advanced semiconductor technologies that we can achieve the high-density complementary metal-oxide-semiconductor electrode array for the improvement of the quantity and quality of neural recordings. Although the microfabricated neural implantable device holds much promise in the biosensing field, there are some significant technological challenges. The most advanced neural implantable device relies on complex semiconductor manufacturing processes, which are required for the use of expensive masks and specific clean room facilities. In addition, these processes based on a conventional photolithography technique are suitable for mass production, which is not applicable for custom-made manufacturing in response to individual experimental requirements. The microfabricated complexity of the implantable neural device is increasing, as is the associated energy consumption, and corresponding emissions of carbon dioxide and other greenhouse gases, resulting in environmental deterioration. Herein, we developed a fabless fabricated process for a neural electrode array that was simple, fast, sustainable, and customizable. An effective strategy to produce conductive patterns as the redistribution layers (RDLs) includes implementing microelectrodes, traces, and bonding pads onto the polyimide (PI) substrate by laser micromachining techniques combined with the drop coating of the silver glue to stack the laser grooving lines. The process of electroplating platinum on the RDLs was performed to increase corresponding conductivity. Sequentially, Parylene C was deposited onto the PI substrate to form the insulation layer for the protection of inner RDLs. Following the deposition of Parylene C, the via holes over microelectrodes and the corresponding probe shape of the neural electrode array was also etched by laser micromachining. To increase the neural recording capability, three-dimensional microelectrodes with a high surface area were formed by electroplating gold. Our eco-electrode array showed reliable electrical characteristics of impedance under harsh cyclic bending conditions of over 90 degrees. For in vivo application, our flexible neural electrode array demonstrated more stable and higher neural recording quality and better biocompatibility as well during the 2-week implantation compared with those of the silicon-based neural electrode array. In this study, our proposed eco-manufacturing process for fabricating the neural electrode array reduced 63 times of carbon emissions compared to the traditional semiconductor manufacturing process and provided freedom in the customized design of the implantable electronic devices as well.

Foldable three dimensional neural electrode arrays for simultaneous brain interfacing of cortical surface and intracortical multilayers

Challenges in the understanding of three-dimensional (3D) brain networks by simultaneously recording both surface and intracortical areas of brain signals remain due to the difficulties of constructing mechanical design and spatial limitations of the implanted sites. Here, we present a foldable and flexible 3D neural prosthetic that facilitates the 3D mapping of complex neural circuits with high spatiotemporal dynamics from the intracortical to cortical region. This device is the tool to map the 3D neural transmission through sophisticatedly designed four flexible penetrating shanks and surface electrode arrays in one integrated system. We demonstrate the potential possibilities of identifying correlations of neural activities from the intracortical area to cortical regions through continuous monitoring of electrophysiological signals. We also exploited the structural properties of the device to record synchronized signals of single spikes evoked by unidirectional total whisker stimulation. This platform offers opportunities to clarify unpredictable 3D neural pathways and provides a next-generation neural interface.

Ultra‐Low Cost, Facile Fabrication of Transparent Neural Electrode Array for Electrocorticography with Photoelectric Artifact‐Free Optogenetics

AbstractTransparent implantable devices have received significant attention in neuroscience and biomedical engineering by combining neural recording and optical modalities. Opaque, metal‐based electrode arrays for electrophysiology block optical imaging and cause photoelectric artifacts, making them difficult to integrate with optogenetics. Here, a photoelectric artifact‐free, highly conductive, and transparent poly(3,4‐ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) electrode array is introduced as promising neural implants. The technology which is developed in this work provides transparent neural interfaces through low‐cost, ultra‐facile method compared with other transparent materials being applied to implantable tools. The device exhibits superior optical, mechanical, and electrical characteristics to other studies, thanks to a simple ethylene glycol immersing process. The device performance is highlighted by comparing its light stimulation efficiency and photoelectric artifact extent with conventional thin gold electrodes both in vitro and in vivo. This platform can assemble transparent neural interfaces much more efficiently than any other material candidates and thus has many potential applications.

Open-source Toolkit: Benchtop Carbon Fiber Microelectrode Array for Nerve Recording.

Conventional peripheral nerve probes are primarily fabricated in a cleanroom, requiring the use of multiple expensive and highly specialized tools. This paper presents a cleanroom "light" fabrication process of carbon fiber neural electrode arrays that can be learned quickly by an inexperienced cleanroom user. This carbon fiber electrode array fabrication process requires just one cleanroom tool, a Parylene C deposition machine, that can be learned quickly or outsourced to a commercial processing facility at marginal cost. This fabrication process also includes hand-populating printed circuit boards, insulation, and tip optimization. The three different tip optimizations explored here (Nd:YAG laser, blowtorch, and UV laser) result in a range of tip geometries and 1 kHz impedances, with blowtorched fibers resulting in the lowest impedance. While previous experiments have proven laser and blowtorch electrode efficacy, this paper also shows that UV laser-cut fibers can record neural signals in vivo. Existing carbon fiber arrays either do not have individuated electrodes in favor of bundles or require cleanroom fabricated guides for population and insulation. The proposed arrays use only tools that can be used at a benchtop for fiber population. This carbon fiber electrode array fabrication process allows for quick customization of bulk array fabrication at a reduced price compared to commercially available probes.

Nanoparticle and Biomolecule Surface Modification Synergistically Increases Neural Electrode Recording Yield and Minimizes Inflammatory Host Response.

Due to their ability to interface with neural tissues, neural electrodes are the key tool used for neurophysiological studies, electrochemical detection, brain computer interfacing, and countless neuromodulation therapies and diagnostic procedures. However, the long-term applications of neural electrodes are limited by the inflammatory host tissue response, decreasing detectable electrical signals, and insulating the device from the native environment. Surface modification methods are proposed to limit these detrimental responses but each has their own limitations. Here, a combinatorial approach is presented toward creating a stable interface between the electrode and host tissues. First, a thiolated nanoparticle (TNP) coating is utilized to increase the surface area and roughness. Next, the neural adhesion molecule L1 is immobilized to the nanoparticle modified substrate. Invitro, the combined nanotopographical and bioactive modifications (TNP+L1) elevate the bioactivity of L1, which is maintained for 28d. Invivo, TNP+L1 modification improves the recording performance of the neural electrode arrays compared to TNP or L1 modification alone. Postmortem histology reveals greater neural cell density around the TNP+L1 coating while eliminating any inflammatory microglial encapsulation after 4 weeks. These results demonstrate that nanotopographical and bioactive modifications synergistically produce a seamless neural tissue interface for chronic neural implants.

Crosstalk in Polymer Microelectrode Arrays.

Thin-film polymer microelectrode arrays (MEAs) facilitate the high-resolution neural recording with its superior mechanical compliance. However, the densely packed electrodes and interconnects along with the ultra-thin polymeric encapsulation/substrate layers give rise to non-negligible crosstalk, which could result in severe interference in the neural signal recording. Due to the lack of standardized characterization or modeling of crosstalk in neural electrode arrays, to date, crosstalk in polymer MEAs remains poorly understood. In this work, the crosstalk between two adjacent polymer microelectrodes is measured experimentally and modeled using equivalent circuits. Importantly, this study demonstrated a two-well measuring platform and systematically characterized the crosstalk in polymer microelectrodes with true isolation of the victim channel and precise control of its grounding condition. A simple, unified equation from detailed circuit modeling was proposed to calculate the crosstalk in different environments. Finite element analysis (FEA) analysis was conducted further to explore the crosstalk in more aggressively scaled polymer electrode threads. In addition to standardizing neural electrode array crosstalk characterization, this study not only reveals the dependence of the crosstalk in polymer MEAs on a variety of key device parameters but also provides general guidelines for the design of thin polymer MEAs for high-quality neural signal recording.

Printed Stretchable Liquid Metal Electrode Arrays for In Vivo Neural Recording.

The adoption of neural interfacing into neurological diagnosis is severely hampered by the complex, costly, and error-prone manufacturing methods, requiring new fabrication processes and materials for flexible neural interfacing. Here a strategy for fabricating highly stretchable neural electrode arrays based on screen printing of liquid metal conductors onto polydimethylsiloxane substrates is presented. The screen-printed electrode arrays show a resolution of 50µm, which is ideally applicable to neural interfaces. The integration of liquid metal-polymer conductor enables the neural electrode arrays to retain stable electrical properties and compliant mechanical performance under a significant (≈108%) strain. Taking advantage of its high biocompatibility, liquid metal electrode arrays exhibit excellent performance for neurite growth and long-term implantation. The stretchable electrode arrays can spontaneously conformally come in touch with the brain surface, and high-throughput electrocorticogram signals are recorded. Based on stretchable electrode arrays, real-time monitoring of epileptiform activities can be provided at different states of seizure. The method reported here offers a new fabrication strategy to manufacture stretchable neural electrodes, with additional potential utility in diagnostic brain-machine interfaces.

Penetrating glassy carbon neural electrode arrays for brain-machine interfaces.

This paper presents a fabrication method for glassy carbon neural electrode arrays that combines 3D printing and chemical pyrolysis technology. The carbon electrodes have excellent biological compatibility and can be used in neural signal recording. A pretreated Si wafer is used as the substrate for 3D printing, and then, stereolithography 3D printing technology is employed to print photosensitive resin into a cone shape. Next, chemical pyrolysis is applied to convert the 3D prints into glassy carbon electrodes and modify the electrochemical performance of the carbon electrodes. Finally, the glassy carbon electrodes are packed with conductive wires and PDMS. The proposed fabrication method simplifies the manufacturing process of carbon materials, and electrodes can be fabricated without the need of deep reactive ion etching (DRIE). The height of the carbon electrodes is 1.5mm, and the exposure area of the tips is 0.78mm2, which is convenient for the implantation procedure. The specific capacitance of the glassy carbon arrays is higher than that of a platinum electrode (9.18 mF/cm2 vs 3.32 mF/cm2, respectively), and the impedance at 1kHz is lower (7.1 kΩ vs 8.8 kΩ). The carbon electrodes were tested in vivo, and they showed excellent performance in neural signal recording. The signal-to-noise ratio of the carbon electrodes is 50.73 ± 6.11, which is higher than that of the Pt electrode (20.15 ± 5.32) under the same testing conditions. The proposed fabrication method of glassy carbon electrodes provides a novel approach to manufacture penetrating electrodes for nerve interfaces in biomedical engineering and microelectromechanical systems.

Principles of functional neural mapping using an intracortical ultra-density microelectrode array (ultra-density MEA)

Objective. Intracortical electrical neural recording using solid-state electrodes is a prevalent approach in addressing neurophysiological queries and implementing brain-computer interfacing systems. As a variety of ultra-density microelectrode arrays (ultra-density MEAs) are being created more recently, this paper answers to the rising demand for a more rigorous theory concerning this new type of neural electrode technology, both to guide the proper design and to inform the proper usage. Approach. This design and use problem of ultra-density MEAs for functional intracortical neuronal circuit mapping is approached from a signal analysis perspective. Starting with quantitative derivations of key basic concepts, the concept of ultra-density MEA is defined in the context for fully resolving the voltage sources within its view volume. Then, the principle of using such an ultra-density MEA for functional neural mapping is elaborated, and a recursive approach to completely resolve all voltage sources from the ultra-density MEA’s recordings is proposed. This approach is further validated using a simulated experiment. Last, the limitations and implications of this work are discussed. Main results. MEAs can only be used to map the extracellular somatic action potential (esAP) sources in a neural microcircuit, and AP propagation along individual axons cannot be detected. The key for the ultra-density MEA design is to make sure that each spatial unit of analysis (SUA) contains no more than one active esAP source. The unique neural resolving capability of ultra-density MEAs comparing to conventional MEAs is to be able to spatiotemporally resolve each esAP source within its view volume. Significance. The ultimate capability and limitation of neural electrode array technology at such an unprecedented fabrication resolution is unraveled. This work strives to further the discussions on this topic into a more quantitative and rational direction, while providing a theoretical guideline for the rational development and neuroscientific application of an ultra-density MEA for intracortical functional mapping.

Spikes to Pixels: Camera Chips for Large-scale Electrophysiology

Implanted neural probes are among the most important techniques in both fundamental and clinical neuroscience. Despite great successes and promise, neural electrodes are technically limited by their scalability. A recent study by Obaid et al. demonstrated an innovative way to greatly scale up the channel count and density of neural electrode arrays.

Spinal cord neural network interactions: implications for sympathetic control of the porcine heart.

Inherent and acquired factors determine the integrated autonomic response to cardiovascular stressors. Excessive sympathoexcitation to ischemic stress is a major contributor to the potential for sudden cardiac death. To define fundamental aspects of cardiac-related autonomic neural network interactions within the thoracic cord, specifically as related to modulating sympathetic preganglionic (SPN) neural activity. Adult, anesthetized Yorkshire pigs (n = 10) were implanted with penetrating high-density microarrays (64 electrodes) at the T2 level of the thoracic spinal cord to record extracellular potentials concurrently from left-sided dorsal horn (DH) and SPN neurons. Electrical stimulation of the T2 paravertebral chain allowed for antidromic identification of SPNs located in the intermediolateral cell column (57 of total 1,760 recorded neurons). Cardiac stressors included epicardial touch, occlusion of great vessels to transiently alter preload/afterload, and transient occlusion of the left anterior descending coronary artery (LAD). Spatial/temporal assessment of network interactions was characterized by cross-correlation analysis. While some DH neurons responded solely to changes in preload/afterload (8.5 ± 1.9%) or ischemic stress (10.5 ± 3.9%), the majority of cardiovascular-related DH neurons were multimodal (30.2 ± 4.7%) with ischemia sensitivity being one of the modalities (26.1 ± 4.7%). The sympathoexcitation associated with transient LAD occlusion was associated with increased correlations from baseline within DH neurons (2.43 ± 0.61 to 7.30 ± 1.84%, P = 0.04) and between SPN to DH neurons (1.32 ± 0.78 to 7.24 ± 1.84%, P = 0.02). DH to SPN network correlations were reduced during great vessel occlusion. In conclusion, increased intrasegmental network coherence within the thoracic spinal cord contributes to myocardial ischemia-induced sympathoexcitation.NEW & NOTEWORTHY In an in vivo pig model, we demonstrate using novel high-resolution neural electrode arrays that increased intrasegmental network coherence within the thoracic spinal cord contributes to myocardial ischemia-induced sympathoexcitation.

Neuroadhesive protein coating improves the chronic performance of neuroelectronics in mouse brain

Intracortical microelectrodes are being developed to both record and stimulate neurons to understand brain circuitry or restore lost functions. However, the success of these probes is hampered partly due to the inflammatory host tissue responses to implants. To minimize the foreign body reactions, L1, a brain derived neuronal specific cell adhesion molecule, has been covalently bound to the neural electrode array surface. Here we evaluated the chronic recording performance of L1-coated silicon based laminar neural electrode arrays implanted into V1m cortex of mice. The L1 coating enhanced the overall visually evoked single-unit (SU) yield and SU amplitude, as well as signal-to-noise-ratio (SNR) in the mouse brain compared to the uncoated arrays across the 0–1500 μm depth. The improvement in recording is most dramatic in the hippocampus region, where the control group showed severe recording yield decrease after one week, while the L1 implants maintained a high SU yield throughout the 16 weeks. Immunohistological analysis revealed significant increases of axonal and neuronal density along with significantly lowered microglia activation around the L1 probe after 16 weeks. These results collectively confirm the effectiveness of L1 based biomimetic coating on minimizing inflammatory tissue response and improving neural recording quality and longevity. Improving chronic recording will benefit the brain-computer interface technologies and neuroscience studies involving chronic tracking of neural activities.

Microfabrication process for long-term reliable neural electrode arrays using liquid crystal polymer (LCP)

Liquid crystal polymer (LCP) has gained attention as a new substrate material for implantable neural interfaces for its low moisture absorption and permeability. Unlike the conventional polymers such as polyimide, parylene and silicone elastomers, LCP has unique characteristics that it comes in film-type products, multiple films are bonded by thermal pressing, and the optical transmittance is relatively low. Therefore, special considerations during the microfabrication process are required to realize its good barrier property fully as well as high precision and uniformity. A series of microfabrication processes is presented in this study to create implantable neural electrode arrays using LCP particularly focusing on improving its long-term reliability under an aqueous condition, and the effectiveness of each process step is evaluated. A LCP-based generic 25-channel neural electrode array was fabricated as a proof-of-concept with thermoformed curvature for conformably fitting to a target tissue or organ and a surface finish of either electroplated gold or iridium oxide. Electroplated and wavy metal patterning could allow the thermal lamination of a cover layer at higher pressure levels without damaging the metallization, which in turn contributed to strengthening the interlayer adhesion and enhancing the longevity of the device. Accelerated lifetime tests showed that this device survived for 158 days in 87 °C saline, roughly suggesting an equivalent lifetime of 14 years at body temperature. The use of silicone elastomer as a temporary adhesive of LCP film on a carrier wafer provided good flatness comparable to that of a glass wafer. Laser-thinning could effectively thin down a 50 μm-thick array by half and doubled its flexibility. Laser-ablation combined with a special alignment scheme created channel openings without affecting the surface morphology of the exposed metal with uniform impedance values. The proposed microfabrication process can serve as a core technology for various applications of LCP-based biomedical devices.