The photovoltaic effect in silicon solar cells were investigated by using a near-field scanning microwave microscope (NSMM) technique by measuring the microwave reflection coefficient at an operating frequency near 4 GHz. As the photoconductivity in the solar cells was varied due to the incident light intensities and the wavelength, we could observe the photoconductivity changes at heterojunction interfaces inside the solar cells by measuring the change of reflection coefficient S 11 of the NSMM. By measuring the change of reflection coefficient, we also directly imaged the photoconductivity changes at heterojunction interfaces inside the solar cells.