Laser-induced damage on the exit surface of fused silica with a filament was observed. The filament has a central hollow core surrounded by molten materials and no obvious cracks could be observed. The critical intensity for the transition from pure surface damage (SD) to filamentary damage (FD) was measured. Time-resolved shadowgraphic microscopy with nanosecond time resolution was employed to compare the propagation of shock wave and material response in the SD and FD process. The main different features during the material response process include: (i) thermoelastic shock waves launched in FD were multiple and a column envelope was observed in the lateral direction; (ii) more energy is deposited in the bulk for FD resulting to a lower speed of shock wave in air; (iii) the overall time for establishing the main character of the damage site for FD was shorter because of the absence of crack expansion. Self-focusing and temperature-activated optical absorption enhancement of the bulk material are discussed to explain the morphology difference between SD and FD and the evolution of filament length under different incident intensities.