Nanorobotic Manipulation Research Articles

Long-range linear elasticity and mechanical instability of self-scrolling binormal nanohelices under a uniaxial load

Mechanical properties of self-scrolling binormal nanohelices with a rectangular cross-section are investigated under uniaxial tensile and compressive loads using nanorobotic manipulation and Cosserat curve theory. Stretching experiments demonstrate that small-pitch nanohelices have an exceptionally large linear elasticity region and excellent mechanical stability, which are attributed to their structural flexibility based on an analytical model. In comparison between helices with a circular, square and rectangular cross-section, modeling results indicate that, while the binormal helical structure is stretched with a large strain, the stress on the material remains low. This is of particular significance for such applications as elastic components in micro-/nanoelectromechanical systems (MEMS/NEMS). The mechanical instability of a self-scrolling nanohelix under compressive load is also investigated, and the low critical load for buckling suggests that the self-scrolling nanohelices are more suitable for extension springs in MEMS/NEMS.

Tungsten/Platinum Hybrid Nanowire Growth via Field Emission Using Nanorobotic Manipulation

This paper reports tungsten-platinum hybrid nanowire growth via field emission, based on nanorobotic manipulation within a field emission scanning electron microscope (FESEM). A multiwalled carbon nanotube (MWCNT) was used as the emitter, and a tungsten probe was used as the anode at the counterposition, by way of nanomanipulation. By independently employing trimethylcyclopentadienyl platinum (CpPtMe3) and tungsten hexacarbonyl (W(CO)6) as precursors, the platinum nanowire grew on the tip of the MWCNT emitter. Tungsten nanowires then grew on the tip of the platinum nanowire. The hybrid nanowire length wascontrolled by nanomanipulation. Their purity was evaluated using energy-dispersive X-ray spectroscopy (EDS). Thus, it is possible to fabricate various metallic hybrid nanowires by changing the precursor materials. Hybrid nanowires have various applications in nanoelectronics, nanosensor devices, and nanomechanical systems.

Micro- and Nanomechatronics

The current and future technologies and issues of micro- and nanomechatronics, and nanobiotechnology based on the nanorobotic manipulation system are presented. The following are also discussed in detail: micromechatronics for industrial and research applications; nanomechatronics for industrial and research applications; single-cell surgery system based on the nanorobotic manipulation system; nanorobotic manipulation system; and single-cell analysis based on an environmental scanning electron microscope (E-SEM). Devices based on micro- and nanomechatronics technologies have great potential in advanced industrial applications that will realize high efficiency, high integration, high functionality, low-energy consumption, and low cost.

Drift Compensation and Faulty Display Correction in Robotic Nano Manipulation

Random drift and faulty visual display are the main problems in Atomic Force Microscopy (AFM) based robotic nanomanipulation. As far as we know, there are no effective methods available to solve these problems. In this paper, an On-line Sensing and Display (OSD) method is proposed to solve these problems. The OSD method mainly includes two subprocesses: Local-Scan-Before-Manipulation (LSBM) and Local-Scan-After-Manipulation (LSAM). During manipulation, LSBM and LSAM are on-line performed for random drift compensation and faulty visual display correction respectively. Through this way, the bad influence aroused from random drift and faulty visual display can be eliminated in real time. The visual feedback keeps consistent with the true environment changes during the process of manipulation, which makes several operations being finished without an image scan in between. Experiments show the increased effectiveness and efficiency of AFM based nanomanipulation.

Rolled-up helical nanobelts: from fabrication to swimming microrobots

AbstractWe present recent developments in rolled-up helical nanobelts in which helical structures are fabricated by the self-scrolling technique. Nanorobotic manipulation results show that these structures are highly flexible and mechanically stable. Inspired by the helical-shaped flagella of motile bacteria, such as E. coli, artificial bacterial flagella (ABFs) are a new type of swimming microrobot. Experimental investigation shows that the motion, force, and torque generated by an ABF can be precisely controlled using a low-strength, rotating magnetic field. These miniaturized helical swimming microrobots can be used as magnetically driven wireless manipulators for manipulation of microobjects in fluid and for target drug delivery.

MNM-4B-1 ハイブリッド顕微鏡内ナノマニピュレーションシステムによるモデル生物解析(セッション 4B マイクロ・ナノ技術によるロボティクス・メカトロニクスの新展開)

This paper presents a novel biological specimen analysis system by hybrid microscope, which is combined optical microscope and environmental-scanning electron microscope (E-SEM) based on nanorobotic manipulation system. The E-SEM provides us the high resolution image of specimen with water containing condition by specially built detector and temperature controlling stage. However the E-SEM image, especially SEM image, is surface image, hence it is impossible to obtain the inner structural imaging which is important for biological analysis. In this work, we combine the optical microscope (OM) and E-SEM to realize biological specimen analysis by optical microscope image including fluorescent imaging, and nano-scale manipulation by E-SEM imaging. In this paper, we observe C. elegans as biological specimen analysis. The viability analysis has been done from the eGFP fluorescent intensity of C. elegans under E-SEM observation and electron beam irradiation. This system will be applied as future nano-surgery system based on nanomanipulation system for biological specimen.

Nanofabrication, Nanoinstrumentation and Nanoassembly by Nanorobotic Manipulation

A nanolaboratory is proposed to realize the capabilities of nanofabrication, nanoinstrumentation and nanoassembly to make three-dimensional structures, devices and systems in the nanoworld. A nanorobotic manipulation system is introduced to realize these capabilities inside a scanning electron microscope or a transmission electron microscope. Some precursors are introduced into the small working space in the nanoworld, so that cutting, bending, peeling and fixing operations in the nanoworld could be realized using nanomanipulators, electron-bean-induced deposition and other methodologies as in the macroworld. After making the three-dimensional structures, the nanodevices such as nanosensors and nanoactuators are fabricated using carbon nanotubes and a focused ion beam chemical vapor deposition process. Some nanodevices for bioapplications are also presented.

Piezoresistive InGaAs/GaAs Nanosprings with Metal Connectors

This paper presents the fabrication, assembly, and characterization of piezoresistive nanosprings for creating nanoelectromechanical systems. The fabrication process is based on conventional microfabrication techniques to create a planar pattern in a 27nm thick, n-type InGaAs/GaAs bilayer that self-forms into three-dimensional structures during a wet etch release. As the nanosprings have lower doped thin and flexible layers, small metal pads have been attached to both sides for achieving stable ohmic contact with electrodes. Nanorobotic manipulation is applied to assemble the nanosprings between electrodes using electron-beam-induced deposition inside a scanning electron microscope, and the bridged nanosprings were then characterized for electromechanical properties. With their strong piezoresistive response, low stiffness, large-displacement capability, and excellent fatigue resistance, they are well-suited to function as sensing elements in high-resolution, large-range electromechanical sensors.

Review of AFM Based Robotic Nanomanipulation

The development of nanomanipulation based on scanning tunnel microscopr and atomic force microscope (AFM) is introduced, and the necessity of robotic nanomanipulation is presented for solving the problems in the nanomanipulation. Then the research development, state and main existing problems of robotic nanomanipulation are analyzed, according to which the structure prototype of AFM based nanomanipulation system is presented, and key technical problems for realizing robotized nanomanpulation is put forward, which provide valuable ideas for further research work on robotic nanomanipulation.

Hybrid Nanowire Growth via Field Emission based on Nanorobotic Manipulation

Abstract This paper presents the hybrid nanowire growth via field emission based on nanorobotic manipulations inside field emission scanning microscope (FESEM). The hybrid nanowires are made of different kinds of materials. A multi-walled carbon nanotube (MWNT) was used as an emitter. A tungsten probe was positioned as anode at counter position by nanomanipulation. By changing the trimethyl cyclopentadienyl platinum (CpPtMe 3 ) and tungsten hexacarbonyl (W(CO) 6 ) as precursors, the metallic nanowires were grown via field emission for several minutes. The growth processes was repeated to control the length of nanowires. Finally, the hybrid nanowire was fabricated by growing the tungsten nanowires at the tip of platinum nanowire. The components of hybrid nanowires were evaluated by the energy-dispersive X-ray spectroscopy (EDS) of transmission electron microscope (TEM). The hybrid nanowire has various applications in nanoelectronics, nanosensor device, nanomechanical system and so on.

2A2-M01 Platinum Nanowire Growth via Field Emission Controlled by Nanorobotic Manipulator

2A2-M01 Platinum Nanowire Growth via Field Emission Controlled by Nanorobotic Manipulator

Engineering Multiwalled Carbon Nanotubes Inside a Transmission Electron Microscope Using Nanorobotic Manipulation

This paper provides a review of recent experimental techniques developed for shell engineering individual multiwalled carbon nanotubes (MWNTs). Basic processes for the nanorobotic manipulation of MWNTs inside a transmission electron microscope are investigated. MWNTs, bamboo-structured carbon nanotubes (CNTs), Cu-filled CNTs, and CNTs with quantum dots attached are used as test structures for manipulation. Picking is realized using van der Waals forces, ldquostickyrdquo probes, electron-beam-induced deposition, and electric breakdown. Cap opening and shell shortening are presented using field emission current. Controlled peeling and thinning of the shells of MWNTs are achieved by electric breakdown, and changes in MWNT structures are correlated with electrical measurements. These processes are fundamental for the characterization of nanoscale materials, the structuring of nanosized building blocks, and the prototyping of nanoelectromechanical systems.

Depth-detection methods for microgripper based CNT manipulation in a scanning electron microscope

Current research work on the development of different depth-detection methods for supporting pick-and-place manipulations of carbon nanotubes (CNTs) in a scanning electron microscope (SEM) is presented. A nanorobot station capable of performing this manipulation task in the SEM’s vacuum chamber has been developed, consisting of two cooperating nanorobots. One robot carries an electrothermal microgripper and also performs the coarse approach between microgripper and CNT. The second robot serves as sample holder and realizes the fine positioning of the CNT sample. For a reliable fine approach between microgripper and CNT as well as an intended future automation of handling tasks, depth-detection methods are required in order to precisely measure and align the z-position of microgripper and CNT. Two different methods for z-position estimation are proposed. The depth from focus method uses the focusing information of SEM images whereas the touchdown sensor concept relies on a bimorph piezo bending actuator. The feasibility of both approaches is shown and first experimental results are discussed. Future work has to show how the proposed methods will increase the efficiency of nanorobotic manipulation and how these methods can advance the automation of nanohandling tasks.

Bending and buckling of rolled-up SiGe∕Si microtubes using nanorobotic manipulation

Mechanical properties of individual rolled-up SiGe∕Si microtubes are investigated experimentally using nanorobotic manipulation. By applying bending loads, individual SiGe∕Si microtubes demonstrate various deformation modes with increasing bending angle. Remarkably, the tested microtubes resist fracture even when bent back onto themselves (180° bending angle). Axial compression tests of microtubes with different turns are also performed. Among those tubes, 1.6-turn rolled-up SiGe∕Si microtubes show typical Euler buckling behavior when the load is larger than a critical load, which can be estimated by the Euler formula for columns.

3-D InGaAs/GaAs Helical Nanobelts for Optoelectronic Devices

This article systematically characterizes conductometric InGaAs/GaAs helical nanobelts for use with optoelectronic sensing. The responsiveness, energy conversion efficiency, and external quantum efficiency are improved compared to conventional sensors by reducing the length of 3-D helical nanobelts without losing exposure area. Nanorobotic assembly and characterization of 3-D helical in/out-of-plane nanobelt photodetectors allowed for stable intrinsic property characterizations. When compared to nanotube bundles, impovement in properties such as energy conversion efficiency, responsiveness, and external quantum efficiency are experimentally demonstrated in both an optical microscope and scanning electron microscope. A probe-type photodetector was assembled using nanorobotic manipulation and in-situ gold nanoparticle ink soldering. The highly efficient and sensitive 3-D InGaAs/GaAs helical nanobelt photodetectors enable many optoelectronic device applications such as being the probes for the near field optical microscopy, confocal microscopy, fluorescence microscopy, or spatial detection with further characterizations.

Bringing the nanolaboratory inside electron microscopes

A nanolaboratory is one of the systems to realize various nanoscale fabrications and assemblies to develop novel nanodevices to integrate borderless technologies based on a nanorobotic manipulation system. We have presented the nanolaboratory inside electron microscopes including a transmission electron microscope (TEM), scanning electron microscope (SEM), and environmental-SEM (E-SEM) for three-dimensional (3D) and real-time nanomanipulation, nanoinstrumentation, and nanoassembly. The following is a presentation of our current work of nanomanipulation and nanoassembly based on the hybrid nanorobotic manipulation inside a TEM and an SEM toward carbon nanotube (CNT) applications. Single cell stiffness measurement has been also presented based on the nanorobotic manipulation system inside an E-SEM.

Evaluation of van der Waals forces between the carbon nanotube tip and gold surface under an electron microscope

Carbon nanotubes (CNTs) have been widely used as nanobuilding blocks to assemble nanostructures and nanodevices. Therefore, the interaction between a CNT and an environment is important. In the present study, the interaction forces, which consisted mainly of van der Waals forces, between a single multi-walled carbon nanotube tip and a gold surface were evaluated under a scanning electron microscope by means of nanorobotic manipulation. The influence of electron beam irradiation was also investigated. It was found that electron beam irradiation can increase the interaction forces by producing contamination at the contact area. The van der Waals forces were calculated theoretically and the theoretical values were close to the experimental values.

Nano-robotic manipulation using a RRP nanomanipulator: Part A – Mathematical modeling and development of a robust adaptive driving mechanism

A three degree of freedom (3 DOF) nanomanipulator with revolute revolute prismatic (RRP) actuator structure, named here MM3A, can be utilized for a variety of nanomanipulation tasks. This first paper in the series presents the mathematical modeling and development of a memory-based robust adaptive controller for the nanomanipulator driving principle. Unlike widely used Cartesian-structure nanomanipulators, the MM3A is equipped with revolute-piezoelectric actuators which result in outstanding performance in controlling the nanomanipulator’s tip alignment during the nanomanipulation. However, the RRP structure of the nanomanipulator introduces complexity in kinematic and dynamic equations of the system which needs to be addressed in order to control the nanomanipulation process. Dissimilar to the ordinary piezoelectric actuators which provide only a couple of micrometers working range, the piezoelectric actuators utilized in MM3A, namely Nanomotors ®, provide wide range of action (120° in revolute actuators and 12 mm in prismatic actuator) with nanoscale precision (0.1 μrad in revolute actuators and 0.25 nm in prismatic actuator). This wide range of action combined with nanoscale precision is achieved using a special stick/slip moving principle of the Nanomotors ®. However, such stick/slip motion results in stepping movement of the MM3A. Hence, due to the RRP structure and stepping movement principle of the MM3A nanomanipulator, development and implementation of an appropriate controller for such nanomanipulation process is not a trivial task. In this paper, a novel memory-based robust adaptive controller is proposed to overcome such shortfalls. Following the development the controller, numerical simulations are preformed to demonstrate the positioning performance capability of the controller in a variety of nanomanipulation tasks.

Ring closure of rolled-up Si∕Cr nanoribbons

Nanobelts formed by the ring closure of rolled-up Si∕Cr nanoribbons are fabricated on a Si (001) substrate. Interlayer bonding strengths are investigated by tangential unrolling and radial stretching using nanorobotic manipulation. Experimental results confirm that the multiwalled Si∕Cr nanobelts can be considered physically closed structures and have strong interlayer bonding. The load versus deformation curve of nanobelts of varying ribbon widths reveals that the radial stiffness fulfills Hooke’s law for small deformations. The measured radial stiffness of the nanobelts is also comparable to that of ideal seamless rings.

Nanomanipulation and Nanoassembly of Carbon Nanotubes Inside Electron Microscopes

We report nanomanipulation and nanoassembly of carbon nanotubes (CNTs) through nanorobotic manipulation inside electron microscopes. A hybrid nanorobotic manipulation system, which is integrated with a nanorobotic manipulator inside a transmission electron microscope (TEM) and nanorobotic manipulators inside a scanning electron microscope (SEM), is used. The elasticity of a multi-walled CNT (MWNT) is measured inside a TEM. The telescoping MWNT is fabricated by peeling off outer layers through destructive fabrication process. The electrostatic actuation of telescoping MWNT is directly observed by a TEM. A cutting technique for CNTs assisted by the presence of oxygen gas is also presented. The cutting procedure was conducted in less than 1 minute using a low-energy electron beam inside a scanning electron microscope. A bending technique of a CNT assisted by the presence of oxygen gas is also applied for the 3-D fabrication of nanostructure. We expect that these techniques will be applied for the rapid prototyping nanoassembly of various CNT nanodevices.