Nanofabrication Methods Research Articles

3D Polymeric Lattice Microstructure-Based Microneedle Array for Transdermal Electrochemical Biosensing.

Microneedles (MNs) or microneedle arrays (MNAs) are critical components of minimally invasive devices comprised of a single or a series of micro-scale projections. MNs can bypass the outermost layer of the skin and painlessly access microcirculation of the epidermis and dermis layers, attracting great interest in the development of personalized healthcare monitoring and diagnostic devices. However, MN technology has not yet reached its full potential since current micro- and nanofabrication methods do not address the need of fabricating MNs with complex surfaces to facilitate the development of clinically adequate devices. This work presents a new approach that combines 3D printing technology based on two-photon polymerization with soft lithography for cost-effective and time-saving fabrication of complex MNAs. Specifically, this method relies on printing complex 3D objects efficiently replicated into polymeric substrates via soft lithography, resulting in a free-standing polymeric lattice (PL) membrane that can be transferred onto gold-coated MNs and used for electrochemical biosensing. This platform shows excellent electrochemical performance in detecting metabolite (glucose) and protein (insulin) biomarkers with a dynamic linear range sufficient for detecting biomarkers in healthy individuals and patients. The approach holds great potential for fabricating next-generationMNs, including their transfer into clinically adequate devices.

Surface integrity analysis and inspection for nanochannel sidewalls using the self-affine fractal model-based statistical quality control for the atomic force microscopy (AFM)-based nanomachining process

The atomic force microscopy (AFM) technology is a promising method for nanofabrication due to the high tunability of this affordable platform. The quality inspection and control significantly impact the manufacturing effectiveness for realizing the functionality of the achieved nanochannel. Particularly, the surface characteristics of nanochannel sidewalls, which play a significant role in determining the quality of the nanomachined products, can not be accurately captured using conventional surface integrity metrics (e.g., surface roughness). Therefore, it is necessary to propose a method to quantitatively characterize the surface morphology and detect the abnormal parts/regions of the nanochannel sidewall. This paper presents a statistical process control approach derived from the self-affine fractal model to detect the sidewall surface anomalies. It evaluates changes in the self-affine fractal model parameters (standard deviation, correlation length, and roughness exponent), which can be used to signify the changes on the sidewall surface; the statistical distributions of these parameters are derived and used to develop control charts to allow inspection of the sidewall morphology. The approach was tested on the AFM-based nanomachined samples. The results suggest that the presented approach can effectively reflect the abnormal regions on the machined parts, which opens up a new avenue toward guiding the quality control and rework for process improvement for AFM-based nanomachining.

Single Layer Control of Nanoscale Metal-Insulator Transition at the LaAlO3/SrTiO3 Interface.

Modern quantum device fabrication often requires precisely adding and removing materials in situ at nanoscales, which is challenging for high-quality correlated oxide devices. In this work, we present a novel nanofabrication method that remotely controls the interfacial metal-insulator transition at the LaAlO3/SrTiO3 interface by selectively removing an LaAlO3 overlayer using a diamond tip. Remarkably, we observe a large force window within which single atomic layer precision of control is achievable. Our results confirm the critical thickness and charge transfer mechanism through a layer-by-layer removal process at the interface. Additionally, high-quality nanodevices, including nanochannels and single electron transistors, are successfully fabricated using this method. This nonvolatile and high-precision nanofabrication method provides a promising oxide platform for quantum engineering by harnessing the rich electron correlations at the nanoscale.

Analyte-dependent Rabi splitting in solid-state plexcitonic sensors based on plasmonic nanoislands strongly coupled to J-aggregates

A key challenge in the field of plexcitonic quantum devices is the fabrication of solid-state, device-friendly plexcitonic nanostructures using inexpensive and scalable techniques. Lithography-free, bottom-up nanofabrication methods have remained relatively unexplored within the context of plexcitonic coupling. In this work, a plexcitonic system consisting of thermally dewetted plasmonic gold nanoislands (AuNI) coated with a thin film of J-aggregates was investigated. Control over nanoisland size and morphology allowed for a range of plasmon resonances with variable detuning from the exciton. The extinction spectra of the hybrid AuNI/J-aggregate films display clear splitting into upper and lower hybrid resonances, while the dispersion curve shows anti-crossing behavior with an estimated Rabi splitting of 180 eV at zero detuning. As a proof of concept for quantum sensing, the AuNI/J-aggregate hybrid was demonstrated to behave as a plexcitonic sensor for hydrochloric acid vapor analyte. This work highlights the possibility of using thermally dewetted nanoparticles as a platform for high-quality, tunable, cost-effective, and scalable plexcitonic nanostructures for sensing devices and beyond.

Atomic Structure Amorphization and Electronic Structure Reconstruction of FeCoNiCrMox High-Entropy Alloy Nanoparticles for Highly Efficient Water Oxidation.

The complexity of the multielement interaction in high-entropy alloys (HEAs) may provide more active sites to adapt different catalytic reaction steps in oxygen evolution reaction (OER). Investigating the correlation between structure and performance of HEAs electrocatalysts is both essential and challenging. In this work, FeCoNiCrMox HEAnanoparticles are successfully fabricated utilizing a unique nanofabrication method called inert gas condensation. With the increase of high-valence metal component Mo, the atomic structure amorphization and electronic structure reconstruction are unveiled. According to the X-ray photoelectron spectroscopy valence spectra, the d-band center of FeCoNiCrMox is ascending, and thus enhancing the adsorption energy. Synchrotron pair distribution function analysis reflects the degree of structural disorder and reveals a robust correlation with the intrinsic OER activities of the electrocatalysts. FeCoNiCrMo1.0 high-entropy metallic glass nanoparticles exhibit an outstanding OER performance with an ultralow overpotential of 294.5mV at a high current density of 100mAcm-2. This work brings fundamental and practical insights into the modulation mechanism of metal components of HEAs catalysts for developing OER.

New Electrochemical Channel Flow Cell Design for Electrochemical Studies at Elevated Temperatures and Pressures

Temperature exerts a considerable influence on the efficiency of chemical and electrochemical processes, and it is expected that studies under wide temperature and pressure (T and p) conditions can significantly impact fields of technological interest such as energy storage and conversion, water treatment, waste conversion, metal recovery, and electrosynthesis, among others.1 The electrochemical studies conducted by Bard’s group in near-critical and supercritical aqueous solutions,2 as well as the contributions made by MacDonald’s and Lvov’s3,4 groups on corrosion and pH determination in hydrothermal systems, offer valuable insights into the effects of temperature and pressure on electrochemical reactions under extreme conditions and construction materials and electrode designs. Other studies in the field, though they did not reach such harsh conditions, made valuable contributions by proposing innovative hydrodynamic electrode systems, from channel cells for studies up to 110 oC,5 a rotating disc electrode for temperatures up to 150 oC,6 and even an imping jet electrode able to reach 210 oC.7 Unfortunately, these studies were rarely expanded to more than one or two systems.In this work, various hydrodynamic electrode configurations have been examined to conclude that the channel flow cell design presents several advantages over other systems for high T and P applications. These cells can provide consistent and reproducible mass transport conditions across a broad range of flow rates and allow channel dimension adjustments to tackle diverse technological challenges. Furthermore, this configuration aligns well with spectroscopic techniques like Raman/SERS (surface-enhanced Raman spectroscopy). COMSOL Multiphysics was used when designing the cell prototype, and validation of the model was carried out using data from previous studies.8 The high T,p cell uses disposable thin-film electrodes (TFEs) patterned onto sapphire wafers through nanofabrication methods; a significant amount of time has been invested in testing the performance of the TFEs up to at least 150°C. These results will also be presented along with experiments conducted with the new channel cell under ambient conditions. References (1) Giovanelli, D.; Lawrence, N. S.; Compton, R. G., Electroanalysis (New York, N.Y.) 2004, 16 (10), 789-810.(2) Liu, C.-y.; Snyder, S. R.; Bard, A. J. J. Phys. Chem.B 1997, 101 (7), 1180-1185.(3) Macdonald, D. D. Corrosion 2013, 34 (3), 75-84.(4) Balashov, V. N.; Fedkin, M. V.; Lvov, S. N., J. Electrochem. Soc. 2009, 156 (7), C209.(5) Wang, H.; Jusys, Z.; Behm, R. J.; Abruña, H. D., J. Electroanal. Chem. 2021, 896, 115251.(6) Fleige, M. J.; Wiberg, G. K.; Arenz, M., Rev Sci Instrum 2015, 86 (6), 064101.(7) Trevani, L. N.; Calvo, E.; Corti, H. R., Electrochem. Commun 2000, 2 (5), 312-316.(8) Moorcroft, M. J.; Lawrence, N. S.; Coles, B. A.; Compton, R. G.; Trevani, L. J. Electroanal. Chem. 2001, 506 (1), 28-33.

Lithography-Free Metaplasmonic Sensors Developed by TWD/GLAD Technique

Nowadays, plasmonic sensors are the most widely used and commercialized label-free optical biosensors and have become a widespread tool for studying chemical/biochemical interactions. Label-free, real-time, and direct measurements are the major benefits of the plasmonic sensors, including high-throughput surface bio-functionalization strategies without amplification or pretreatment of the sample [1]. The working principle of plasmonic sensing has been extensively described and reviewed over the decades [2], however, the possibility to develop cheap, effective, and clinically-accepted biosensors has recently become available due to the development of nanotechnology. Briefly, these nanostructures can be localized or can be arranged on 2D arrays of plasmonic metasurfaces, and can be fabricated by single-layer metallic films and a combination of metallic and dielectric films. The most popular plasmonic metals are gold and silver due to their high conductivity and low dielectric losses. Generally, top-down nanofabrication methods based on laser/e-beam lithography have been used, including nanostencil lithography based on shadow-masked nano-pattering and nanoimprint lithography [3]. Although such technologies have a high potential to achieve scalable and cost-effective nanofabrication at the wafer scale, these processes maintain the following main challenge: a master nano-mold/pattern is required to transfer metasurfaces with an associated high cost. Therefore, other technologies are the subject of research that overcomes this limitation and still offer an outstanding quality of metallic films, such as TDW (thermal dewetting) and GLAD (glancing angle deposition) (Fig.1). These techniques do not require master nano-mold/patterns; consequently, they can achieve lithography-free large-scale plasmonic metasurfaces [4]. TDW and GLAD usually generate quasi-ordered plasmonic metasurfaces compared to conventional lithographic methods.In this paper, the experimental results of the optical sensing properties of the sensors developed by the utilization of the combination of these two technologies in a single system are presented. The TWD/GLAD magnetron sputtering system has been designed and manufactured based on the Kurt J. Lesker MAG-Torus magnetrons, supplied with DC/RF power sources and an ECR manipulator that enables deposition at various angles with maximal 20 rpm rotation speed and heating option up to 850oC. The system is controlled by the software that enables deposition of the samples with the same parameters which pave the way for fabrication of the sensors on the industrial scale. The optical-sensing system was built based on an ST-VIS-50 spectrometer (Ocean Optics) and Tungsten Halogen Source (360-2000 nm, 2800 K, Ocean Optics) and optical table from Thorlabs. The obtained reflectance measurement has shown that the utilization of the GLAD technique decreases the reflectance peak in comparison with samples deposited without GLAD (flat samples). At the same time, angles in the range of 82-86oC seem to be preferable for nanostructure fabrication.Additionally, the utilization of the TWD technique, i.e. deposition at lower temperatures in the range of 60-100oC (depending on the substrate) and then annealed at higher temperatures such as 250oC and 300oC in a vacuum and under argon flow in the deposition chamber led to increased normalized response. However, the experiments have shown that the optimal annealing time is between 30-45 min depending on the SPR multi-structure, for example for Ag (6nm), Ti (2nm), and Au (2nm) the 30min at 250oC seems to be the best set. For such compositions, the surface sensitivity (nm/nm) and bulk sensitivity (nm/RIU) are more or less the same - 0.9 and 300, respectively. The obtained results are very promising for developing cheap, rapid, and very effective biosensors for various applications. Therefore, the obtained results seem to be very interesting for the ECS conference audience, for example, the developed Ag/Ti/Au multi-structures can be applied in novel organ-on-a-chip platforms for LADMET (liberations, absorption, distribution, metabolism, excretion, and toxicology) analysis [5].Fig. 1. Schematic diagram representation of lithography free methods for developing quasi-ordered metamaterials from left to right: Thermal dewetting and glancing angle deposition. The insert shows the chiral plasmonic nanospirals fabrication by glanced angle deposition [4].

(Invited) Unraveling Hot Carrier Transfer Processes in Plasmonic Catalysis

In the last decade, plasmonic nanoantennas have revolutionized light manipulation and control at the nanoscale. Interestingly, generation of hot carriers in metals upon light absorption have opened new pathways for controlling photo(electro)chemical processes and engineering photocatalysts. Yet, fundamental questions remain about the microscopic details of these complex light-matter interactions.We have recently developed a well-controlled platform for micro-scale plasmonic photoelectrochemistry studies that leverages the unique properties of monocrystalline microflakes [1] as well as precise nanofabrication methods. Interestingly, the microflakes exhibit well-defined crystal facets and can bridge the properties of bulk metals with those of nanoscale plasmonic antennas, accessing ultra-thin film dimensions (sub 15-nm) that are challenging for polycrystalline films. By performing careful absorption measurements, we explore the photoelectrochemical performance of these hot carrier micro-scale photoelectrodes for inner- and outer-sphere reactions [2], concurrently comparing them to cm-scale devices [3]. This allows us to unravel the interplay of hot carrier generation and transport at metal-liquid and metal-semiconductor interfaces and identify bottlenecks for charge transfer.[1] Kiani F., Tagliabue G. - High‐Aspect Ratio Au Microflakes via Gap‐Assisted Synthesis – Chemistry of Materials 34 (3), 1278-1288, 2022[2] Kiani F. et al - Transport and Interfacial Injection of d-band Hot Holes Control Plasmonic Chemistry - ACS Energy Letters, 8 (10), 4242-4250, 2023[3] Ma J., Oh K., Tagliabue G. - Understanding Wavelength-Dependent Synergies between Morphology and Photonic Design in TiO2-Based Solar Powered Redox Cells – Journal of Physical Chemistry C, 127 (1), 11-21, 2022

Fabrication Techniques for a Tuneable Room Temperature Hybrid Single-electron Transistor and Field-effect Transistor

Hybrid room-temperature (RT) silicon single-electron – field effect transistors (SET-FETs) provide a means to switch between ‘classical’, high current FET, and low-power SET operation, using a gate voltage. While operating as a SET, charge on a silicon quantum dot (QD) within the current channel, can be controlled at the one-electron level using the Coulomb blockade effect. This paper investigates nanofabrication methods for sub-10 nm ‘fin’ channel hybrid RT SET-FETs, and their influence on the energy band diagram, and formation of tunnel barriers and QDs, along the channel. Devices are fabricated in heavily n-doped SOI material using electron beam lithography, with thermal oxidation to reduce the as-defined fin width. Effective channel dimensions, following oxidation and excluding Si/SiO2 interface dopant deactivation, are ∼2.4 nm × 32 nm × 20 nm. Dopant disorder, fin width variation at the nanometre scale, and quantum confinement effects are considered as mechanisms for the formation of tunnel barriers and QDs, with dopant disorder the most likely reason. Arrhenius plots of Ids vs. 1/T allow extraction of a potential barrier energy ∼0.2 eV along the fin channel. For 180devices fabricated on four chips, 37% show RT SET-FET operation, ∼3 times higher than the corresponding yield observed in previous work on point-contact silicon SETs.

Molecular Dynamics Simulations of Soft and Reactive Landing of Proteins Desorbed by Argon Cluster Bombardment.

Reactive molecular dynamics (MD) simulations were conducted to investigate the soft and reactive landing of hyperthermal velocity proteins transferred to a vacuum using large argon clusters. Experimentally, the interaction of argon cluster ion beams (Ar1000-5000+) with a target biofilm was previously used in such a manner to transfer lysozymes onto a collector with the retention of their bioactivity, paving the way to a new solvent-free method for complex biosurface nanofabrication. However, the experiments did not give access to a microscopic view of the interactions needed for their full understanding, which can be provided by the MD model. Our reactive force field simulations clarify the landing mechanisms of the lysozymes and their fragments on collectors with different natures (gold- and hydrogen-terminated graphite). The results highlight the conditions of soft and reactive landing on rigid surfaces, the effects of the protein structure, energy, and incidence angle before landing, and the adhesion forces with the collector substrate. Many of the obtained results can be generalized to other soft and reactive landing approaches used for biomolecules such as electrospray ionization and matrix-assisted laser desorption ionization.

Enhanced Deposition Selectivity of High-k Dielectrics by Vapor Dosing and Selective Removal of Phosphonic Acid Inhibitors.

Area-selective atomic layer deposition (AS-ALD), which provides a bottom-up nanofabrication method with atomic-scale precision, has attracted a great deal of attention as a means to alleviate the problems associated with conventional top-down patterning. In this study, we report a methodology for achieving selective deposition of high-k dielectrics by surface modification through vapor-phase functionalization of octadecylphosphonic acid (ODPA) inhibitor molecules accompanied by post-surface treatment. A comparative evaluation of deposition selectivity of ZrO2 thin films deposited with the O2 and O3 reactants was performed on SiO2, TiN, and W substrates, and we confirmed that high enough deposition selectivity over 10 nm can be achieved even after 200 cycles of ALD with the O2 reactant. Subsequently, the electrical properties of ZrO2 films deposited with O2 and O3 reactants were investigated with and without post-deposition treatment. We successfully demonstrated that high-quality ZrO2 thin films with high dielectric constants and stable antiferroelectric properties can be produced by subjecting the films to ozone, which can eliminate carbon impurities within the films. We believe that this work provides a new strategy to achieve highly selective deposition for AS-ALD of dielectric on dielectric (DoD) applications toward upcoming bottom-up nanofabrication.

Development in Cell-Nanotopography Interaction Applications and Its Potential for Mass Production

Since the initial presentation of cell contact response with native topographic structure in 1911, numerous studies have been published to investigate how cells respond when interacting with micro/nano structures.. Many of the founding has potential to become applications in bio-medical or in pharmaceutical industry. Regardless of the huge prospect, these applications are still bound to the manufacturability of the micro/nano topographic structures. The introduction of nanoimprint lithography in 1995 has demonstrated that it can replicating micro/nano structures with relatively simple and low-cost equipment but with high throughput and high reliability. This paper reviews the development in cell-micro/nanotopographic interactions, the development of high throughput nanofabrication method. The nanofabrication methods in focus is nanoimprint lithography and electrospinning. This review paper also discusses the potential applications from cell-nanotopographic for mass productions. Prospectus applications such as the development in development of antimicrobial surfaces interactions and biologically inspired nanoscaffold and nanopattern suitable for tissue repair and regeneration are also discussed.

Lithography-Free Nanofabrication on Various Semiconductors by the Codeposition Etching Technique.

Nano-/microstructures can be formed with the aid of small amounts of impurities during deposition with noble gas plasma irradiation, which is referred to as codeposition etching. This can be a new method for lithography-free semiconductor nanofabrication. Here, the codeposition etching method was employed with argon plasma and molybdenum (Mo) impurities on various semiconductors. Structures can be formed only on substrates that have a lower sputtering yield than the seed impurity. The density, area, and height of structures are related to both the impurity deposition rate and the substrate material. Moreover, two mechanisms of impurity nucleation are proposed according to time dependence results for the formation of the structures.

Advanced ice lithography system using a micro-machined Joule-Thomson cooler

This study introduces a novel ice lithography system integrated with a low-vibration micro-machined Joule-Thomson cooler. Ice lithography is an eco-friendly method for high-resolution nanofabrication on delicate substrates and requires to operate below 130 K in the vacuum of a microscope chamber. Previously, liquid nitrogen rather than cryocoolers was used to cool the system due to its low vibration, but it is both bulky and costly. To overcome these challenges, this study employs a low-vibration micro-machined cooler in a scanning electron microscope (SEM) for ice lithography. The design and methodology of the system are described in detail. The results show that the substrate can reach a temperature of 105 K within 30 minutes with a measured mechanical vibration of less than 10 nm, enabling high-resolution nanofabrication. As proof of concept, the system successfully fabricates nanoscale patterns on a silicon wafer. This low-vibration cooling system has great potential for use in cryogenic electron microscopes (cryo-EMs) in the future.

Democratising dry adhesion development with consumer-grade AM

AbstractThe production of reusable gecko-inspired dry adhesives has traditionally been done with complex nanofabrication methods such as lithography and PDMS casting. This article presents a way of producing and testing dry adhesive samples using consumer-grade AM machines and equipment typically available in a Makerspace. The samples produced exhibit adhesive properties depending on the preload and surface structure, and we conclude that consumer-grade AM is suitable for rapid prototyping and testing of dry adhesion. However, it is limited by the scale and accuracy compared to traditional methods.

Laser Parallel Nanofabrication of Dual‐Au‐Nanoholes on Microsphere‐Lens‐Array for Polarization‐Dependent SERS

AbstractHigh‐efficient fabrication of well‐ordered nanostructures on flexible substrates is a challenge to surface‐enhanced Raman spectroscopy (SERS) for analytical fingerprinting trace‐detection. In this work, a laser parallel nanofabrication method is reported via incident‐angle‐dependent photonic nanojet ablating Au film on the bottom surface of microsphere‐lens‐array (MLA), for combination with formed dual Au‐nanoholes (MLA/2‐AuNHs) as the flexible SERS substrates. The process parameters, i.e., pulsed laser energy, MLA diameter, Au film thickness, and laser incident angle, are optimized for high finish‐quality of dual‐AuNHs with a diameter of ≈875 nm and a tip gap of ≈90 nm. The SERS substrate demonstrates the limit of detection down to 10−11 M for 4‐nitrobenzenethiol molecules by the multiple optical regulations, including self‐aligned focusing to the hotspots and directional antenna, the strongly localized surface plasmon resonances, and optical whispering‐gallery modes for resonance energy transfer. The flexible PDMS film supporting the rigid MLA holds the SERS performance of MLA/2‐AuNHs with high flexibility. Moreover, the MLA/2‐AuNHs SERS substrate exhibits differential responses to orthogonally polarized excitation, by which the background noises can be eliminated to improve the Raman spectrum. The present work opens new opportunities to fabricate dielectric‐metal flexible SERS substrates by laser parallel nanofabrication via MLA for Raman trace detection.

Electrohydrodynamic Printing‐Based Heterointegration of Quantum Dots on Suspended Nanophotonic Cavities

AbstractNanophotonic structures are a foundation for the growing field of light‐based quantum networks and devices enabled by their ability to couple with and manipulate photons. Colloidal quantum dots (QDs) are uniquely suited to complement this range of devices due to their solution‐processability, broad tuneability, and near‐unity photoluminescence quantum yields in some cases. To bridge the gap between them, electrohydrodynamic inkjet (EHDIJ) printing serves as a highly precise and scalable nanomanufacturing method for deterministic positioning and deposition of attoliter‐scale QD droplets. This includes heterointegration in devices that are challenging to create by conventional subtractive semiconductor processing, such as QDs emitters coupled to substrate‐decoupled nanoscale resonant structures. In this work, the first successful application of EHDIJ printing for the integration of these colloidal QDs into suspended nanophotonic cavities is demonstrated, achieving selective single‐cavity deposition for cavity pairs as close as 100 nm apart. These results motivate the development of future suspended hetero‐integrated devices that utilize EHDIJ printing as a sustainable, additive, and scalable method for quantum photonics nanomanufacturing.

Computational Design of Photosensitive Polymer Templates To Drive Molecular Nanofabrication.

Molecular electronics promises the ultimate level of miniaturization of computers and other machines as organic molecules are the smallest known physical objects with nontrivial structure and function. But despite the plethora of molecular switches, memories, and motors developed during the almost 50-years long history of molecular electronics, mass production of molecular computers is still an elusive goal. This is mostly due to the lack of scalable nanofabrication methods capable of rapidly producing complex structures (similar to silicon chips or living cells) with atomic precision and a small number of defects. Living nature solves this problem by using linear polymer templates encoding large volumes of structural information into sequence of hydrogen bonded end groups which can be efficiently replicated and which can drive assembly of other molecular components into complex supramolecular structures. In this paper, we propose a nanofabrication method based on a class of photosensitive polymers inspired by these natural principles, which can operate in concert with UV photolithography used for fabrication of current microelectronic processors. We believe that such a method will enable a smooth transition from silicon toward molecular nanoelectronics and photonics. To demonstrate its feasibility, we performed a computational screening of candidate molecules that can selectively bind and therefore allow the deterministic assembly of molecular components. In the process, we unearthed trends and design principles applicable beyond the immediate scope of our proposed nanofabrication method, e.g., to biologically relevant DNA analogues and molecular recognition within hydrogen-bonded systems.

Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters

Abstract Color centers in diamond play a central role in the development of quantum photonic technologies, and their importance is only expected to grow in the near future. For many quantum applications, high collection efficiency from individual emitters is required, but the refractive index mismatch between diamond and air limits the optimal collection efficiency with conventional diamond device geometries. While different out-coupling methods with near-unity efficiency exist, many have yet to be realized due to current limitations in nanofabrication methods, especially for mechanically hard materials like diamond. Here, we leverage electron-beam-induced etching to modify Sn-implanted diamond quantum microchiplets containing integrated waveguides with a width and thickness of 280 nm and 200 nm, respectively. This approach allows for simultaneous high-resolution imaging and modification of the host matrix with an open geometry and direct writing. When coupled with the cathodoluminescence signal generated from the electron–emitter interactions, we can monitor the enhancement of the quantum emitters in real-time with nanoscale spatial resolution. The operando cathodoluminescence measurement and fabrication around single photon emitters demonstrated here provide a new foundation for the potential control of emitter–cavity interactions in integrated quantum photonics.

Anodization as a scalable nanofabrication method to engineer mechanobactericidal nanostructures on complex geometries.

Bacterial contamination of implant surfaces is one of the primary causes of their failure, and this threat has been further exacerbated due to the emergence of drug-resistant bacteria. Nanostructured mechanobactericidal surfaces that neutralize bacteria via biophysical forces instead of traditional biochemical routes have emerged as a potential remedy against this issue. Here, we report on the bactericidal activity of titania nanotubes (TNTs) prepared by anodization, a well-established and scalable method. We investigate the differences in bacterial behavior between three different topographies and demonstrate the applicability of this technique on complex three-dimensional (3D) geometries. It was found that the metabolic activity of bacteria on such surfaces was lower, indicative of disturbed intracellular processes. The differences in deformations of the cell wall of Gram-negative and positive bacteria were investigated from electron micrographs Finally, nanoindentation experiments show that the nanotubular topography was durable enough against forces typically experienced in daily life and had minimal deformation under forces exerted by bacteria. Our observations highlight the potential of the anodization technique for fabricating mechanobactericidal surfaces for implants, devices, surgical instruments, and other surfaces in a healthcare setting in a cheap, scalable way.