Nano Scratch Research Articles

Tribomechanical characterization of ceramic reinforced composite coatings for modification of cylinder liner of heavy-duty diesel engines

Heavy-duty diesel engines are essential mechanic power generation tools for industry and transporting freight and passengers. Therefore, increasing engine efficiency and minimizing maintenance and repair costs is crucial. This study examines and characterizes three thermal spray coatings (Cr3C2/NiCr, NiCr, and Al2O3/TiO2) utilized on cylindrical gray cast iron substrate specimens. The coatings were tested for their microstructural (optical microstructure, SEM, EDS, XRD, and AFM topography), mechanical (nanoindentation and nano scratch), and tribological (short and long-distance wear test) properties. Microstructural tests showed that an average coating thickness of 120 to 170 µm was successfully achieved on the cast iron base substrate using different thermal coating methods. The Cr3C2/NiCr coating, observed through the AFM mapping method, achieved the most uniform roughness distribution on the surface. The elasticity of the coatings was measured with a nanoindentation test, and Al2O3/TiO2 coating exhibited high rigidness (177 GPa). The nano scratch test showed that the highest load-carrying capacity was achieved with the Cr3C2/NiCr coated sample. NiCr-coated sample exhibited approximately similar rigidness (61 GPa) to cast iron (67 GPa). Short- and long-distance wear tests showed that the coatings provided significantly better wear resistance than the cast iron base. The coatings’ efficacy was evident. At the long-distance tests, while the cast iron base sample had a wear rate of 19.874 (10−7mm3/Nm), the wear rates of Al2O3/TiO2, Cr3C2/NiCr, and NiCr coatings were 3.835, 4.020, and 6.466 (10−7mm3/Nm), respectively. The Al2O3/TiO2 and Cr3C2/NiCr coatings had superior tribological performance than the NiCr coating, yet the NiCr coating showed much higher wear performance than the uncoated base. The Cr3C2/NiCr coating exhibited superior tribomechanical performance in all the coatings.

Development of a 4-DOF inchworm piezoelectric platform and its experiments on nano scale variable depth scratching

Abstract Recent developments in nanotechnologies have highlighted the demand for multi-dimensional, cross-scale and variable-depth nanoscale structures for applications such as nanofluidic chips, nanosensors, nanoelectronics and many more. Therefore, the implementation and system of cross-scale and variable-depth nanomanufacturing is the core of advanced nanotechnologies. Among all of the current methods, nano scratching is the easiest and most flexible approach with the advantages of low cost and simple machining procedures. In this work, a three-dimensional piezoelectric manufacturing system (PMS) based on a self-developed four-degree-of-freedom (4-DOF) inchworm piezoelectric platform is proposed for implementation of cross-scale and variable-depth nano scratching. Based on the PMS, effects of the scratching parameters such as exciting voltage and frequency on scratching depth and quality are discussed. In addition, the scratching experiments were successfully performed and achieved the nanoscale depth variation of the grooves, nesting rectangles, and concentric circles using the multi-DOF and cross-scale output characteristics of the proposed 4-DOF piezoelectric platform. To sum up, the PMS based on the 4-DOF inchworm piezoelectric platform has potential applications in the fields of machining three-dimensional nanostructures within millimeter scale.

Microstructure, mechanical and tribological characterization of magnetron sputtering ZrN and ZrAlN coatings

In this research paper, mechanical and tribological characterization of novel high wear-resistant ZrN-ZrAlN coatings are presented. The varying concentrations of AlN is chosen to evaluate the influence of AlN the surface morphological, nanomechanical, and tribological properties of the composite coating. The coatings were developed on D9 steel substrates using nitrogen reactive gas radio frequency (RF) magnetron sputtering of zirconium and aluminium targets in an argon plasma. Variable power density for the aluminium target and constant power density for zirconium, was used to obtain in a systematic way, the variable concentration of AlN in the coating. Surface morphological studies were carried out to evaluate composition and crystal structure using X-ray diffraction (GIXRD), Raman spectroscopy, and energy-dispersive X-ray spectroscopy (EDS). Coatings display a polycrystalline structure, but the level of crystallinity decreases with higher AlN concentration. Nanomechanical and nano scratch testing, along with tribological experimental studies were performed to comprehensively analyse performance of the developed coatings. Higher hardness of composite coating is achieved with optimal concentration of AlN in ZrN-ZrAlN coating. Adhesion strength of the coatings increased with the increase in the concentration of AlN. ZrN-ZrAlN coatings depicted low wear, however coatings containing AlN exhibits superior wear resistance.

Enhanced bioactivity and mechanical properties of silicon-infused titanium oxide coatings formed by micro-arc oxidation on selective laser melted Ti13Nb13Zr alloy

The titanium scaffolds and surface-porous implants are manufactured by fast and cheap additive methods such as selective laser melting (SLM). The obtained irregularity and relative biological inertness of the titanium need proper surface modification. This research is aimed at forming bioactive multicomponent oxide coatings by micro-arc oxidation (MAO) at different process parameters on the selective laser-melted Ti13Zr13Nb alloy. The MAO process was carried out in a base solution containing 0.15 mol/L Ca and 0.1 mol/L GP, with different amounts of metasilicate added under two different applied voltages. Scanning electron microscopy, atomic force microscopy, X-ray electron diffraction spectroscopy, nanomechanical and nano scratch tests, water contact angle measurements, phosphate deposition observed in long-term immersion tests, and biological LDH and MTT assays were performed. The results showed that the coating microstructure, morphology, and properties were significantly dependent on process parameters. In particular, the metasilicate addition and its rising content in the electrolyte resulted in the higher development of the surface followed by better viability of osteoblasts at no necrosis, with no negative change in the other parameters, usually close to those obtained on silicon-free coatings. The obtained results prove that the addition of silicon to the electrolyte at the partial expense of calcium can be favorable for long-term titanium implants made by selective laser melting.

Cuckoo search-artificial neural network aided the composition design in Al–Cr–Co–Fe–Ni high entropy alloys

In this work, we proposed a data-driven approach combining machine learning (ML), experiments and molecular dynamic (MD) simulation to accelerate the composition design and exploration of wear behavior in Al–Cr–Co–Fe–Ni based high entropy alloys. A Cuckoo Search-Artificial Neural Network (CS-ANN) model was proposed to deal with small sample data and showed fairly strong learning ability and generalization capabilities. Elemental analysis revealed that the microhardness can be enhanced by adding Al or reducing the proportion of Fe and Ni. Then the Al1.1CrCoFe0.9Ni0.9 HEAs were designed and prepared for experimental verification. The microstructure, phase composition, hardness, and wear resistance properties of the alloy were further investigated. Al1.1CrCoFe0.9Ni0.9 HEAs were composed of BCC+B2 phases, exhibited a microhardness of 580.6 HV. The wear rate was measured as 6.04×10−6 mm3/(Nm) by the reciprocating dry wear tests, the average COF was estimated as ∼0.5. The main wear mechanisms involved abrasive wear and oxidation wear. MD simulations are used to analyze the atomic evolution and deformation mechanism during the nano scratch process. The obtained information would help either facilitate developing novel HEAs or utilize the HEAs effectively to resist wear.

Green synergy: Eco-friendly, high-performance anti-corrosion and wear-resistant coatings utilizing organosolv lignin and polydimethylsiloxane

Corrosion and wear remain significant challenges for materials, causing substantial economic losses and safety risks. Anti-corrosion and anti-wear coatings provide an effective solution. However, traditional coatings are often fossil-based and contain heavy metals, posing environmental concerns. The drive for eco-friendly coatings has led to the exploration of green materials. This study combined lignin, an abundant organic material, and polydimethylsiloxane (PDMS), a known hydrophobic material, to address the challenges. Organosolv lignin was functionalised with (3-Aminopropyl)triethoxysilane (APTES), then chemically grafted on PDMS for the final coating synthesis. The optimised coating achieved through an eco-friendly process, exhibiting enhanced hydrophobicity and barrier properties, showing excellent long-term corrosion resistance in NaCl solution. The optimal coating formulation contained 15 wt% lignin and 40 wt% PDMS, demonstrating a high corrosion resistance (measured impedance of 1010 Ω·cm2), which remains effective even after 3 weeks of immersion in 1 M NaCl solution. This coating also showed good wear resistance, with a low friction coefficient evident from nano scratch tests.

A strong enhancement of corrosion and wear resistance of polyurethane-based coating by chemically grafting of organosolv lignin

Corrosion and wear pose significant challenges to equipment operating in harsh environments. Thus, protective coatings are needed. Anti-corrosion and anti-wear coatings are traditionally fossil-based and often contain environmentally harmful additives. Achieving anti-corrosion and anti-wear coatings based on environmentally benign and sustainable materials is important and a significant challenge. This work focused on the development of organosolv lignin-based polyurethane (OS_lignin-PU) coatings. The coatings were synthesised and evaluated for corrosion protection using electrochemical impedance spectroscopy (EIS) and for wear properties using nanoindentation and nano scratch measurements. EIS revealed that the optimal lignin content for corrosion protection purposes in the OS_lignin-PU coatings was 15 wt%. Moreover, addition of 15 wt% lignin to the OS_lignin-PU coatings also enhanced their wear resistance, as evidenced by reduced thickness loss during tribometer tests. The nano scratch measurements revealed that OS_lignin-PU coatings containing 15 wt% lignin exhibited the lowest scratch depth and friction coefficient. It is found that the developed lignin-containing coating exhibits remarkable corrosion and wear resistance, making it a promising sustainable material in various applications for pursuing sustainable development.

Enhanced machinability of aluminium-based silicon carbide by non-resonant vibration-assisted magnetorheological finishing

Aluminium-based silicon carbides (SiCp/Al) have been widely used due to their inherent unique physical and mechanical properties. However, improving the surface quality is challenging as finishing cannot meet the requirements of removing the height differences caused by the SiC and aluminium phases. This study aims to investigate the effectiveness of non-resonant vibration-assisted magnetorheological finishing (NVMRF) in reducing the referred height differences and then to enhance the surface quality. Finite element modeling (FEM) and molecular dynamics (MD) simulations were utilized to analyze the influence of the vibration on the fragmented particles as well as the reduction of two-phase height difference. Nano scratch experiments reveal the removal mechanism of the SiC phase in NVMRF. A material removal rate (MRR) model considering the influence of the exerted forces of abrasive particles and the concept of micro-removal mechanism was established. When analyzing the machining results, it was found that the plastic removal in the SiC phase contributed to the NVMRF. Besides, it was verified that the vibration-induced tangential force effectively reduced the height difference. Although there is a slight discrepancy between the theoretical and experimental values of the finishing force within the experimental parameters, the consistent trend confirms the effectiveness of the proposed method. Finally, this research provides a valuable method for finishing the particle-reinforced metal matrix composites (PRMMCs).

Mechanical and Tribological Properties of the CrAl/CrAlN and CrAl/CrAlN-(a-CNx) Multilayers Deposited by HIPIMS

In this study, two CrAl/CrAlN multilayer coatings of 1.5 µm and 1.2 µm thicknesses were deposited from a (50:50) CrAl sectioned target by high-power impulse magnetron sputtering (HIPIMS) onto A11 tool steel to evaluate the effect over mechanical and tribological properties by the addition of an (a-CNx) top layer. XRD analysis showed a CrAlN FCC structure (111) and a Cr phase (110). A glass-like morphology was observed in the CrAl layer and in the (a-CNx) top layer, while the CrAlN layers exhibited a columnar morphology according to the FE-SEM analysis. Raman analysis results confirmed characteristic peaks G and D for the carbon amorphous structure of the (a-CNx) top layer. Nanoindentation results showed comparable hardnesses (23.08 GPa ± 2.8 and 20.58 GPa ± 1.8) in both multilayer coatings. The CrAl/CrAlN multilayer with an (a-CNx) top layer increased the absorption energy capacity and the mechanical potential energy stored. The nano scratch test showed the strongest crack resistance and highest adhesive energy values for the CrAl/CrAlN multilayer. The addition of an (a-CNx) top layer improved the tribological behavior when higher normal loads were applied during the fretting test. Raman analysis showed an increase in the I(D)/I(G) ratio and a formation of a carbon sp2 structure (i.e., graphite-like structure) over the worn surfaces, as well as dissipated energy (J/m) during the fretting test.

Anisotropy origins of coefficient of friction and scratch hardness in nano scratching monocrystalline copper

The monocrystalline Cu material mechanical properties at the micro and nano scale show complex anisotropy and size effects. However, the anisotropy of scratch hardness and coefficient of friction (COF) in micro-nano scratching monocrystalline Cu has not been well explained. In this paper, we conducted the nano-scratching experiments and corresponding molecular dynamics (MD) simulation under ramp normal force mode along two representative crystal orientations thereby investigating the anisotropy origins of scratch hardness and COF. The research results indicate that, for monocrystalline Cu materials, the scratch hardness and COF are closely related to the atomic slip resistance Fslip caused by the activated <1 1 0> {1 1 1} slip systems.

Molecular Dynamics Simulation of Single-Crystal 4H-SiC Nano Scratching with Different Scratching Directions of the Tool

4H-SiC (silicon carbide) is widely used in semiconductor devices due to its superior characteristics. However, processing techniques such as cutting, grinding, and polishing generally have problems such as low processing efficiency, high cost, difficulties guaranteeing processing quality, and serious material waste. The in-depth research on the mechanical behavior, material removal, and damage mechanism of SiC single crystals at the micro/nano scale is the foundation for solving these problems. This paper establishes a molecular dynamics simulation model for 4H-SiC single-crystal nano scratches, using three different directions of a Berkovich indenter to scratch the surface of the workpiece, studying the surface morphology, scratching force, and material removal during the scratching process. The results indicate that scratching directions of the tool varies, and the surface morphology also varies. After the scratching depth exceeds 1.6 nm, complete dislocations with a Burges vector of 1/3&lt;12¯10&gt; appear on the crystal subsurface, leading to the plastic removal of the material. During the process of material removal, a smaller tool rake angle removes a larger amount of material chips. By analyzing the damage layer of the workpiece, the difference in the damage layer is smaller when the scratching direction is different, but the damage layer generated by the smaller rake angle of the scratching tool is thinner. It shows that the scratching force and workpiece temperature are relatively small when the rake angle of the scratching tool is small. Therefore, when scratching 4H-SiC single crystals, choosing a tool with a smaller rake angle is more beneficial for the process.

Optimized titanium dioxide nanotubes for dental implants: Estimation of mechanical properties and effects on the biological behaviors of human gingival fibroblasts and oral bacteria

The long-term successes of implant restorations rely on both appropriate osseointegration and robust soft tissue integration (STI). Numerous studies have reported that titanium dioxide nanotube (TNT) arrays formed by electrochemical anodization (EA) can promote early osteogenesis, but the mechanical stability of such modifications is often ignored and remains underexplored. In addition, relatively little research has been done on their effects on soft tissues integration. In this study, we developed mechanically robust TNT arrays using an optimized EA system. Subsequently, we immobilized a peptide, specifically D-amino K122-4, onto the anodized TNTs via polydopamine (PDA) films to enhance their mechanical properties. Surface morphology and composition were characterized by scanning electron microscopy (SEM), atomic force microscopy, and X-ray photoelectron spectroscopy. Mechanical properties, including the elastic modulus and hardness of TNTs modified Ti surfaces, were assessed using the nano-indention test. The adhesive strength of TNTs films to the substrate was measured using the nano scratch test. Furthermore, we evaluated the adhesion, spreading, and proliferation of human gingival fibroblasts (HGFs) and periodontal pathogenic bacteria such as Streptococcus mutans (S.m) and F. nucleatum (F.n) on the surface. Results showed that the elastic modulus, hardness, and adhesive strength of anodized TNTs were significantly enhanced by the incorporation of the D-amino K122-4 peptide. Live-dead staining and SEM observation suggested a decreased surface colonization by both bacterial species. The antibacterial rate of S.m and F. n was 81.5% and 71.7%, respectively, evaluated by colony counting method. Additionally, results of CCK8 assay showed that modified TNTs slightly stimulated HGFs attachment and proliferation while producing enhanced fluorescence of integrin β1 and F-actin, confirmed by laser confocal microscopy observation. Thus, D-amino K122-4 biofunctionalized TNTs present significantly improved mechanical properties, and the mechanically robust structures modulate HGFs proliferation and alignment, resulting in decreased bacteria growth. This novel strategy has the potential to create a surface coating for implants that exhibits superior mechanical robustness and enhanced surface-to-implant interactions.

Nanomechanical assessment of tribological behavior of TiN/TiCN multi-layer hard coatings deposited by physical vapor deposition

This research shows different hard Ti-based coatings deposited over steel substrates using the physical vapor deposition (PVD) method. The graded coating of the three produced Ti, TiN and TiCN were assessed using phase composition analysis and spectroscopy study. The microstructure characterization was studied by X-ray Photoelectron spectroscopy (XPS), Scanning Electron Microscopy (SEM), and transmission electron microscopy (TEM). The results show that integrating Ti interlayer with subsequent TiN/TICN layers can be considered a suitable way to yield hard Ti-based coating with enhanced mechanical and tribological behavior due to nitride and carbonitride phases formed from the breakdown of carbon and nitrogen atoms. The elastic modulus and hardness of all layers were identified by nanoindentation and utilized to achieve yield strength. Later, the curvature of the unloading step and elastic properties are used for finding flow behavior parameters in terms of work hardening factors (n and K). The attained findings extracted from the load–displacement curve of both nanoindentation and nano scratch were analyzed to examine the microscopic performance of all three Ti, TiN, and TiCN coatings. Scratch mechanisms analysis in all coatings shows that the main failures in samples are caused by tensile stress stemming from Hertzian cracks. However, as the force increases, the coating surface undergoes an incremental deformation, and failure mode varies to interfacial spallation.

Investigation of mechanical properties of granular γ-alumina using experimental nano indentation and nano scratch tests

The mechanical properties of ceramic granular γ-alumina, including resistance and stability, are examined using Nano indentation and Nano scratch tests. In so doing, surface morphology, kind of material used, topography, and roughness of the surface of the granular ceramic are evaluated using a scanning electron microscope, energy-dispersive X-ray spectroscopy and atomic force microscopy. To achieve these objectives, the initial step involves the synthesis of granular γ-alumina ceramic nanoparticles with average diameters of 1.7 mm. Moreover, the elasticity modulus and hardness of granular γ-alumina are estimated using a Nanoindentation method under different loads. It is shown that the nanoparticles in this coarse material are about 17 nm on average. Besides, the results demonstrate that the modulus of elasticity and hardness do not follow a particular pattern when the load increases. In other words, the modulus of elasticity increases and then decreases but the hardness decreases and then increases within the load ranges of 200–400 μN. Overall, it is concluded that the modulus of elasticity and hardness of granular γ-alumina are obtained to be equal to 12.6 GPa and 0.433 GPa, respectively. The plasticity index of granular alumina is also examined, and the results show that it is highly plastic with a plasticity index of 0.83. Also, nano scratch tests are performed under two different forces to obtain the scratch resistance of granular γ-alumina. The results reveal that the scratch resistance which is a representative of the friction coefficient, surges from 0.72 to 0.9 by increasing the indenter force. In general, the results indicate that the method of creating the material leads to a doubling of its Young's modulus, which is a measure of its stiffness, and as a result, there is a notable improvement in its overall mechanical strength.

Friction and wear characteristics of bismuth selenide topological insulator

Single crystal Bi2Se3 was grown using the novel Bridgeman-Stockbarger method. Surface characteristics in terms of wear rate (W), wear coefficient (K), coefficient of friction (COF), and strain hardening exponent (n) were investigated using nanoindentation and nano scratch techniques. Our results revealed that the remarkable wear properties of single-crystal Bi2Se3 are promising for nanoscale design of topological insulators.

Comparative Study on Wear Behaviors of Monolayer and Heterogeneous Multilayer Ta Coatings in Atmospheric and SBF Environments

Monolayer Ta and multilayer Ti/Zr/Ta and Zr/Ti/Ta coatings were prepared by magnetron sputtering on TC4 substrates to improve the surface friction and wear properties in a simulated body fluid (SBF) environment and an atmospheric environment. Optical microscopy, scanning electron microscopy, laser scanning confocal microscopy and nano scratch testing were employed to establish the structure-property-environment relationships. By controlling the preparation parameters, the outermost layer of all three samples was Ta coating, and the total coating thickness of each sample was about 3 μm. Friction and wear testing revealed that, compared to bare TC4 substrate, and multilayer Ti/Zr/Ta and Zr/Ti/Ta coatings, the monolayer Ta possessed the lowest friction coefficient as well as the minimum wear rate (i.e., calculation result of the wear track width and wear depth). This was mainly attributed to excellent adhesion strength, a particular structure and solid lubrication of the monolayer coating. The same coating sample exhibited a stronger wear resistance in the SBF environment than in the atmospheric environment. Furthermore, the wear behaviors and mechanisms of various coatings under different experimental environments are also discussed.

Green synthesis of graphene-hydroxyapatite nanocomposites with improved mechanical properties for bone implant materials

Herein, an in-situ synthesis of reduced graphene oxide-hydroxyapatite (RGO-HA) nanocomposites via a green reduction protocol is presented. 0.5, 1.0, and 1.5 wt% of RGO in HA are obtained by reducing the precursor solution with custard apple leaf extract. The 10x5 mm-sized discs of the RGO-HA nanocomposites are prepared and investigated for their mechanical properties. The presence of graphene in the composites is confirmed by UV–Visible, Raman spectroscopic techniques while XRD spectral analysis confirmed the α-tricalcium phosphate (TCP, JCPDS PDF No 00-009-0432) structure of HA. Nanoindentation and Vicker indentation studies revealed the enhancement in the mechanical properties of RGO-HA nanocomposites: elastic modulus, microhardness, and fracture toughness values are enhanced by 100%, 33.3%, and 64.5 %respectively for 1.5 wt% of graphene in HA matrix. The FE SEM analysis of the indentation cracks revealed that the wrapped and tucked graphene sheets in the HA matrix have hindered the propagation of the crack through pull-out, ridge growth, bridging, and deflection mechanisms. Nano scratch analysis revealed the enhanced surface roughness (120%) and coefficient of friction (102%) for 1.5 wt% composites than pure HA. The same composite showed 100% viability of HEK 293 cells at 12.5 μg/mL concentration and in vitro apatite mineralization when immersed for 7 days under SBF solution.

Use of ball-cratering wear test and nanoscratching test to compare the wear resistance of homogeneous and functionally graded titanium nitride thin films

Homogeneous (HM) and functionally graded (FG) TiN thin films were produced by the grid-assisted magnetron sputtering (GAMS) technique. The joint use of ball-cratering micro-abrasive wear test (BCMA) and nanoscratching (NN) test was proposed and carried out to evaluate the wear resistance of TiN films. The results showed an increase of 33.3% wear resistance in the FG TiN thin film, when compared with the HM TiN thin film. This result was justified by the higher resistance to nucleation and propagation of cracks and higher level of adhesion to the substrate by the FG TiN thin film, validated through the NN tests.

Nano- and Micro-Tribological Investigations of Boundary Layers on Axial Bearing Washers Tested under WEC Critical Conditions

The formation of boundary layers on bearing surfaces due to the operational conditions has a significant influence on bearing lifetimes and frictional properties. Zinc dialkyldithiophosphate is an anti-wear additive widely used in oil and grease formulations that forms beneficial surface boundary layers. Under certain circumstances, this additive can cause early bearing failure due to white etching cracks (WEC) formation. By influencing chemical reactions and diffusion processes, the boundary films are suspected to be a reason for the emergence of WECs. The properties of these layers under WEC critical and uncritical conditions are of interest. To gain knowledge of these layers, nano- and micro-tribological tests were performed. One possibility is to measure the hardness by nanoindentation and scratching on and into the layers by nano scratch tests. Another way is to perform local resolved micro-pin-on-disk tests. Additionally, ToF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) was performed on the bearing surfaces to conclude the chemical compositions of the boundary layers. In the focus was, if the measured properties of the layers can be correlated to the bearing’s early failures due to WEC, frictional properties of the whole system, and the wear on the surfaces.

Characterization of Nanomechanical Properties and Scratch Hardness of (111) Nanotwinned Copper Thin Film in Ambient and Slurry Conditions

Nanotwinned copper possesses a distinctive structure with higher mechanical strength and stability without compromising on resistivity. This paper aims to characterize the nanomechanical properties along with the scratch hardness of the (111) nanotwinned copper thin film wafer in ambient and slurry conditions by triboindenter. Experiments are performed on Hysitron TI 980 Triboindenter using Berkovich and conical indenter for nanoindentation and nano scratch respectively. This paper studies the impact of nanotwinned structures on quasistatic and scratch hardness of copper thin film wafers given the potential applicability of nanotwinned copper thin films as interconnects. CMP is extensively applied to obtain the nanoscale surface finish required in the semiconductor micro-nano fabrication industry. The nanomechanical properties of (111) nanotwinned copper thin film wafer with passivation in polishing slurry conditions are imperative parameters to study the polishing behavior of material. Hardness, Young’s modulus, and scratch hardness of the nanotwinned copper thin film specimens are evaluated by nanoindenter in ambient and slurry conditions. Results of this study with characteristic parameters of (111) nanotwinned copper thin film wafer can be further used to estimate the material removal of chemical mechanical polishing for high volume production of IC devices in future work.