Monolithic Silicon Detector Research Articles

Novel high-speed monolithic silicon detector for particle physics

This contribution presents simulation results, implementation, and first tests of a monolithic detector developed at KIT. It consists of a sensor diode tightly integrated with an analogue front-end based on SiGe (Silicon-Germanium) SG13G2 130 nm BiCMOS technology produced at the Leibniz Institute for High Performance Microelectronics (IHP). The pixel size is 100 μm × 100 μm, and the nwell charge collection node dimensions were reduced to 10 μm × 10 μm. We investigate the influence of this approach on sensor performance, spatial resolution via charge sharing and timing behaviour.

Testbeam results of the Picosecond Avalanche Detector proof-of-concept prototype

The proof-of-concept prototype of the Picosecond Avalanche Detector, a multi-PN junction monolithic silicon detector with continuous gain layer deep in the sensor depleted region, was tested with a beam of 180 GeV pions at the CERN SPS. The prototype features low noise and fast SiGe BiCMOS frontend electronics and hexagonal pixels with 100 μm pitch. At a sensor bias voltage of 125 V, the detector provides full efficiency and average time resolution of 30, 25 and 17 ps in the overall pixel area for a power consumption of 0.4, 0.9 and 2.7 W/cm2, respectively. In this first prototype the time resolution depends significantly on the distance from the center of the pixel, varying at the highest power consumption measured between 13 ps at the center of the pixel and 25 ps in the inter-pixel region.

Developing the future of gamma-ray astrophysics with monolithic silicon pixels

This paper explores the potential of AstroPix, a project to develop Complementary Metal Oxide Semiconductor (CMOS) pixels for the next generation of space-based high-energy astrophysics experiments. Multimessenger astrophysics is a rapidly developing field whose upcoming missions need support from new detector technology such as AstroPix. ATLASPix, a monolithic silicon detector optimized for the ATLAS particle detector at CERN, is the beginning of the larger AstroPix project. Energy resolution is a driving parameter in the reconstruction of gamma-ray events, and therefore the characterization of ATLASPix energy resolution is the focus of this paper. The intrinsic energy resolution of the detector exceeded our baseline requirements of <10% at 60 keV. The digital output of ATLASPix results in energy resolutions insufficient to advance gamma-ray astronomy. However, the results from the intrinsic energy resolution indicate the digital capability of the detector can be redesigned, and the next generation of pixels for the larger AstroPix project have already been constructed. Iterations of AstroPix-type pixels are an exciting new technology candidate to support new space-based missions.

Imaging and radiation isocentre determination for inline MR-guided radiotherapy systems – proof of principle using MR-phantom with embedded monolithic silicon detector

Multiple vendors are now offering real-time MRI-guided radiotherapy systems. Quality assurance of the imaging and radiation isocentre alignment is an essential component of the QA programme for any linear accelerator used for delivering image-guided radiotherapy. In this work, the authors describe the design and feasibility testing of a device that combines a high resolution monolithic silicon strip detector with an MRI visible phantom for characterisation of optical, MR imaging and radiation isocentre for inline MR-guided radiotherapy systems.

Combining TCAD and Monte Carlo methods to simulate CMOS pixel sensors with a small collection electrode using the Allpix[formula omitted] framework

Combining electrostatic field simulations with Monte Carlo methods enables realistic modeling of the detector response for novel monolithic silicon detectors with strongly non-linear electric fields. Both the precise field description and the inclusion of Landau fluctuations and production of secondary particles in the sensor are crucial ingredients for the understanding and reproduction of detector characteristics.In this paper, a CMOS pixel sensor with small collection electrode design, implemented in a high-resistivity epitaxial layer, is simulated by integrating a detailed electric field model from finite element TCAD into a Monte Carlo based simulation with the Allpix2 framework. The simulation results are compared to data recorded in test-beam measurements and very good agreement is found for various quantities such as cluster size, spatial resolution and efficiency. Furthermore, the observables are studied as a function of the intra-pixel incidence position to enable a detailed comparison with the detector behavior observed in data.The validation of such simulations is fundamental for modeling the detector response and for predicting the performance of future prototype designs. Moreover, visualization plots extracted from the charge carrier drift model of the framework can aid in understanding the charge propagation behavior in different regions of the sensor.

A 50 ps resolution monolithic active pixel sensor without internal gain in SiGe BiCMOS technology

A monolithic pixelated silicon detector designed for high time resolution has been produced in the SG13G2 130 nm SiGe BiCMOS technology of IHP. This proof-of-concept chip contains hexagonal pixels of 65 μm and 130 μm side. The SiGe front-end electronics implemented provides an equivalent noise charge of 90 and 160 e− for a pixel capacitance of 70 and 220 fF, respectively, and a total time walk of less than 1 ns. Lab measurements with a 90Sr source show a time resolution of the order of 50 ps. This result is competitive with silicon technologies that integrate an avalanche gain mechanism.

The effect of an air gap on a 2D monolithic silicon detector for relative dosimetry

Purpose: to evaluate the impact of an air gap on the Magic Plate (MP512) response and optimize this gap for relative dosimetry in photon and electron beams. Materials and methods: MP512 is a 2D monolithic silicon detector manufactured on a p-type substrate. The array consists of 512 pixels with 0.5 × 0.5 mm2 size and 2 mm pitch with an overall dimension of 52 × 52 mm2. The signal ratio (SR) as a function of beam size and the percentage were measured with MP512 in 6 MV and 10 MV photon beams. The enhanced dynamic wedge (EDW) beam profile measurements were performed for 6 MV photon beams. In this work the signal ratio is defined as the ratio of central axis MP512 reading for field sizes ranging from 0.5 × 0.5 cm2 to 10 × 10 cm2 and for the reference square field of side 10 cm at a depth of 10 cm in solid water phantom. The measurements were performed with an air gap immediately above the detector array of 0.5, 1.0, 1.2, 2.0 and 2.6 mm, respectively. The PDD was measured for field sizes 2× 2 cm2, 5× 5 cm2 and 10× 10 cm2 by scanning the MP512 from the depth of 0.5 cm to 10 cm. The beam profiles were measured for Varian linac enhanced dynamic wedge (EDW) angles of 15̂, 45̂ and 60̂ for field size 5× 5 cm2. The PDD for 6, 12 and 20 MeV electron beams were performed for a standard applicator providing 10× 10 cm2 field size. Results: the signal ratio measured with MP512 reduces with increasing air gap above the detector. The strongest effect of the air gap size was observed for small fields of 0.5× 0.5 cm2 and 1× 1 cm2 while the effect was negligible within ± 2% (1 standard deviation) for field sizes larger than 4× 4 cm2. The signal ratio measured with MP512 with air gaps of 0.5 mm and 1.2 mm showed a good agreement with signal ratio measured with the EBT3 film (within ± 2%) and MOSkinTM for 6 MV and 10 MV, respectively. Similar results were observed for the PDD measurement for field size 5× 5 cm2 and 10× 10 cm2. The PDD measured with M512 was in good agreement with Markus Ionization chamber (IC) within ± 1.6% (1 standard deviation) for 6 MV and ± 1.5% (1 standard deviation) for 10 MV. The PDD discrepancy for 2× 2 cm2 was within ± 3% of the EBT3 for both photon energies. The EDW dose profile matched well with the EBT3 for the air gap of 0.5 mm within ± 2% (1 standard deviation) for all wedge angles. The PDD measured by electron beams demonstrated no significant effect of the air gap size above MP512 for all energies. The results showed similar variations (within ± 3%) compared to Markus IC for both 0.5 mm and 2.6 mm gap. Conclusion: the MP512 diode array was demonstrated to be suitable as an in-phantom dosimeter for QA in small radiation treatment fields. The study shows that air gap size has a significant effect on small field photon beam dosimetry due to a loss of electronic equilibrium. The small air gaps of 0.5 mm and 1.2 mm were the best air gaps for 6 MV and 10 MV, respectively. The effect of the air gap in electron beam fields is not significant due to the fact that an electronic equilibrium is fully established.

On the Instantaneous Dose Rate and Angular Dependence of Monolithic Silicon Array Detectors

The use of small radiation fields characterized by very steep dose gradients is common in modulated arc X-ray radiotherapy. Dosimeters for quality assurance (QA) applications would ideally have sensitive volumes (SVs) relatively small with respect to the field, along with negligible instantaneous dose rate and angular dependence. Silicon-based dosimeters can be fabricated with SVs $ across, provide a stable and near energy-independent response in megavoltage photon beams, along with a good linearity with accumulated dose and real-time readout. However, their sensitivity is instantaneous dose rate and angular dependent. Monolithic silicon array detectors with sufficiently small SVs and pitch are suitable for high-resolution 2-D dose mapping in radiation fields with steep dose gradients. The Octa is a 2-D monolithic silicon array detector. It has 512 diode- SVs arranged with a sub-millimeter pitch. The physical characteristics of the substrate on which it is based, in terms of resistivity and defects concentration, strongly affect its performance. We report on the experimental characterization of two versions of the Octa, manufactured on a bulk and on an epitaxial substrate, respectively. Their performance is compared and discussed in terms of their instantaneous dose rate and angular dependence in the context of QA applications in small radiation fields delivered with modulated arc radiotherapy.

"Characterization of ELEKTA SRS cone collimator using high spatial resolution monolithic silicon detector array".

PurposeTo investigate the accuracy of the dosimetry of radiation fields produced by small ELEKTA cone collimators used for stereotactic radiosurgery treatments (SRS) using commercially available detectors EBT3 GafchromicTM film, IBA Stereotactic diode (SFD), and the recently developed detector DUO, which is a monolithic silicon orthogonal linear diode array detector.MethodsThese three detectors were used for the measurement of beam profiles, output factors, and percentage depth dose for SRS cone collimators with cone sizes ranging from 5 to 50 mm diameter. The measurements were performed at 10 cm depth and 90 cm SSD.ResultsThe SRS cone beam profiles measured with DUO, EBT3 film, and IBA SFD agreed well, results being in agreement within ±0.5 mm in the FWHM, and ±0.7 mm in the penumbra region. The output factor measured by DUO with 0.5 mm air gap above agrees within ±1% with EBT3. The OF measured by IBA SFD (corrected for the over‐response) agreed with both EBT3 and DUO within ±2%. All three detectors agree within ±2% for PDD measurements for all SRS cones.ConclusionsThe characteristics of the ELEKTA SRS cone collimator have been evaluated by using a monolithic silicon high spatial resolution detector DUO, EBT3, and IBA SFD diode. The DUO detector is suitable for fast real‐time quality assurance dosimetry in small radiation fields typical for SRS/SRT. This has been demonstrated by its good agreement of measured doses with EBT 3 films.

A silicon strip detector array for energy verification and quality assurance in heavy ion therapy.

The measurement of depth dose profiles for range and energy verification of heavy ion beams is an important aspect of quality assurance procedures for heavy ion therapy facilities. The steep dose gradients in the Bragg peak region of these profiles require the use of detectors with high spatial resolution. The aim of this work is to characterize a one dimensional monolithic silicon detector array called the "serial Dose Magnifying Glass" (sDMG) as an independent ion beam energy and range verification system used for quality assurance conducted for ion beams used in heavy ion therapy. The sDMG detector consists of two linear arrays of 128 silicon sensitive volumes each with an effective size of 2mm × 50μm × 100μm fabricated on a p-type substrate at a pitch of 200 μm along a single axis of detection. The detector was characterized for beam energy and range verification by measuring the response of the detector when irradiated with a 290 MeV/u 12 C ion broad beam incident along the single axis of the detector embedded in a PMMA phantom. The energy of the 12 C ion beam incident on the detector and the residual energy of an ion beam incident on the phantom was determined from the measured Bragg peak position in the sDMG. Ad hoc Monte Carlo simulations of the experimental setup were also performed to give further insight into the detector response. The relative response profiles along the single axis measured with the sDMG detector were found to have good agreement between experiment and simulation with the position of the Bragg peak determined to fall within 0.2 mm or 1.1% of the range in the detector for the two cases. The energy of the beam incident on the detector was found to vary less than 1% between experiment and simulation. The beam energy incident on the phantom was determined to be (280.9 ± 0.8) MeV/u from the experimental and (280.9 ± 0.2) MeV/u from the simulated profiles. These values coincide with the expected energy of 281 MeV/u. The sDMG detector response was studied experimentally and characterized using a Monte Carlo simulation. The sDMG detector was found to accurately determine the 12 C beam energy and is suited for fast energy and range verification quality assurance. It is proposed that the sDMG is also applicable for verification of treatment planning systems that rely on particle range.

A novel high-resolution 2D silicon array detector for small field dosimetry with FFF photon beams

PurposeFlattening filter free (FFF) beams are increasingly being considered for stereotactic radiotherapy (SRT). For the first time, the performance of a monolithic silicon array detector under 6 and 10 MV FFF beams was evaluated. The dosimeter, named “Octa” and designed by the Centre for Medical Radiation Physics (CMRP), was tested also under flattened beams for comparison. MethodsOutput factors (OFs), percentage depth-dose (PDD), dose profiles (DPs) and dose per pulse (DPP) dependence were investigated. Results were benchmarked against commercially available detectors for small field dosimetry. ResultsThe dosimeter was shown to be a ‘correction-free’ silicon array detector for OFs and PDD measurements for all the beam qualities investigated. Measured OFs were accurate within 3% and PDD values within 2% compared against the benchmarks. Cross-plane, in-plane and diagonal DPs were measured simultaneously with high spatial resolution (0.3 mm) and real time read-out. A DPP dependence (24% at 0.021 mGy/pulse relative to 0.278 mGy/pulse) was found and could be easily corrected for in the case of machine specific quality assurance applications. ConclusionsResults were consistent with those for monolithic silicon array detectors designed by the CMRP and previously characterized under flattened beams only, supporting the robustness of this technology for relative dosimetry for a wide range of beam qualities and dose per pulses. In contrast to its predecessors, the design of the Octa offers an exhaustive high-resolution 2D dose map characterization, making it a unique real-time radiation detector for small field dosimetry for field sizes up to 3 cm side.

Impact of a monolithic silicon detector operating in transmission mode on clinical photon beams

PurposeTo investigate the effect on surface dose, as a function of different field sizes and distances from the solid water phantom to transmission detector (Dsd), of using the monolithic silicon detector MP512T in transmission mode. MethodsThe influence of operating the MP512T in transmission mode on the surface dose of a phantom for SSD 100cm was evaluated by using a Markus IC. The MP512T was fixed to an adjustable stand holder and was positioned at different Dsd, ranging from 0.3 to 24 cm. For each Dsd, measurements were carried out for irradiation field sizes of 5 × 5cm2, 8 × 8 cm2 and 10 × 10 cm2. Measurements were obtained under two different operational setups, (i) with the MP512T face-up and (ii) with the MP512T face-down. In addition, the transmission factors for the MP512T and the printed circuit board were only evaluated using a Farmer IC. ResultsFor all Dsd and all field sizes, the MP512T led to the surface dose increasing by less than 25% when in the beam. For Dsd >18 cm the surface dose increase is less than 5%, and negligible for field size 5 × 5 cm2. The difference in the surface dose perturbation for the MP512T operating face up or operating face down is negligible (<2%) for all field sizes. The transmission factor of the MP512T ranged from 1.020 to 0.9950 for all measured Dsd and field sizes. ConclusionThe study demonstrated that positioning the MP512T in air between the Linac head and the phantom produced negligible perturbation of the surface dose for Dsd >18 cm, and was completely transparent for 6 MV photon beams.

A 2D silicon detector array for quality assurance in small field dosimetry: DUO.

Nowadays, there are many different applications that use small fields in radiotherapy treatments. The dosimetry of small radiation fields is not trivial due to the problems associated with lateral disequilibrium and source occlusion and requires reliable quality assurance (QA). Ideally such a QA tool should provide high spatial resolution, minimal beam perturbation and real time fast measurements. Many different types of silicon diode arrays are used for QA in radiotherapy; however, their application in small filed dosimetry is limited, in part, due to a lack of spatial resolution. The Center of Medical Radiation Physics (CMRP) has developed a new generation of a monolithic silicon diode array detector that will be useful for small field dosimetry in SRS/SRT. The objective of this study is to characterize a monolithic silicon diode array designed for dosimetry QA in SRS/SRT named DUO that is arranged as two orthogonal 1D arrays with 0.2 mm pitch. DUO is two orthogonal 1D silicon detector arrays in a monolithic crystal. Each orthogonal array contains 253 small pixels with size 0.04 × 0.8 mm2 and three central pixels are with a size of 0.18 × 0.18 mm2 each. The detector pitch is 0.2 mm and total active area is 52 × 52 mm2 . The response of the DUO silicon detector was characterized in terms of dose per pulse, percentage depth dose, and spatial resolution in a radiation field incorporating high gradients. Beam profile of small fields and output factors measured on a Varian 2100EX LINAC in a 6 MV radiation fields of square dimensions and sized from 0.5 × 0.5 cm2 to 5 × 5 cm2 . The DUO response was compared under the same conditions with EBT3 films and an ionization chamber. The DUO detector shows a dose per pulse dependence of 5% for a range of dose rates from 2.7 × 10-4 to 1.2 × 10-4 Gy/pulse and 23% when the rate is further reduced to 2.8 × 10-5 Gy/pulse. The percentage depth dose measured to 25 cm depth in solid water phantom beyond the surface and for a field size of 10 × 10 cm2 agrees with that measured using a Markus IC within 1.5%. The beam profiles in both X and Y orthogonal directions showed a good match with EBT3 film, where the FWHM agreed within 1% and penumbra widths within 0.5 mm. The effect of an air gap above the DUO detector has also been studied. The output factor for field sizes ranging from 0.5 × 0.5 cm2 to 5 × 5 cm2 measured by the DUO detector with a 0.5 mm air gap above silicon surface agrees with EBT3 film and MOSkin detectors within 1.8%. The CMRP's monolithic silicon detector array, DUO, is suitable for SRS/SRT dosimetry and QA because of its very high spatial resolution (0.2 mm) and real time operation.

Innovative detectors for quality assurance dosimetry in SBRT of stationary and movable targets

The high spatial and temporal resolution 2D monolithic silicon detector arrays M512 and DUO for quality assurance (QA) in real time motion adaptive radiotherapy (ART) have been developed. The DUO array possesses a spatial resolution of 0.2 mm and has demonstrated agreement within 5% with EBT3 film measurements of 6MV linac beam profiles for field sizes 1 × 1 cm2 and SRS cone diameter 0.5 cm. Dynamic characterisation of the M512 for QA in real time ART evaluated the performance of M512 for small fields while the detector experiences periodic motion. It was demonstrated with M512 that MLC tracking with Calypso electromagnetic array compensates for the periodic motion and improves the agreement between static and dynamic beam profiles for field size 1 × 1 cm2 from within 75% in the penumbra to within 11% agreement. The dynamic profile is returned to a similar distribution as the static case.

Analytical model for Transient Current Technique (TCT) signal prediction and analysis for thin interface characterization

A silicon wafer bonding technique has been recently proposed for the fabrication of monolithic silicon radiation detectors. This new process would enable direct bonding of a read-out electronic chip wafer on a highly resistive silicon substrate wafer. Therefore, monolithic silicon detectors could be fabricated in this way which would allow the free choice of electronic chips and high resistive silicon bulk, even from different providers. Moreover, a monolithic detector with a high resistive bulk would also be available. Electrical properties of the bonded interface are then critical for this application. Indeed, mobile charges generated by radiation inside the bonded bulk are expected to transit through the interface to be collected by the read-out electronics. In order to characterize this interface, the concept of Transient Current Technique (TCT) has been explored by means of numerical simulations combined with a physics based analytical model. In this work, the analytical model giving insight into the physics behind the TCT dependence upon interface traps is validated using both TCAD simulations and experimental measurements.

WE-AB-BRB-04: A Novel Monolithic Silicon 2D Detector Array for Use in Stereotactic Applications

Purpose: To assess the capability of a novel 2D monolithic silicon detector array in measuring stereotactic photon fields. Methods: The silicon array detector used in this work, named Magic Plate-512 (MP512), is a thin monolithic silicon wafer (52 × 52 × 0.47 mm3) with 512 ion-implanted diodes (0.5 × 0.5 mm2). Adjacent pixels are spaced evenly with 2 mm pitch, covering a maximum detection area 46 mm wide. Its fast, FPGA based read-out system is synchronised with the linac to allow readout of all pixels pulse-by-pulse. A clinical SABR lung plan (consisting of 9 single segment beams, 6MV) was measured with the array at 1.5 cm depth in a solid water phantom (100 cm SSD). The typical field size was in the range of 3 × 3 cm2 to 4 × 4 cm2. Each beam was delivered at perpendicular incidence to the detector plane so as to avoid the need for angular dependence corrections. The fields were measured under the same conditions using Gafchromic EBT3 film for comparison. The film was scanned at 72 dpi resolution, with the red channel data used for analysis. Results: Average gamma passing rates of (92.3 ± 1.8) % for 2%/2mm criteria, and (86.6 ± 2.3) % for 1%/2mm criteria were achieved for MP512, using EBT3 film as the reference distribution. The detector array was able to accurately measure the full-width-at-half-maximum (FWHM), to within (0.77 ± 0.01) mm accuracy when compared to film. The penumbral widths (80%-20%) were measured to within (0.30 ± 0.01) mm accuracy to film. Conclusion: The MP512 is a feasible option for measurement of stereotactic photon fields, with its high density of detection points making it useful for small field applications. The prototype array has demonstrated merit; in the future the development of a larger array detection area would be beneficial for clinical applications.

Beam characterization of a monolithic ΔE/E silicon device

A full characterization of a ΔE/E monolithic silicon detector especially developed for microdosimetry was performed using monochromatic beams of α-particles and protons at the Italian National Laboratories of Legnaro at the CN van de Graaff accelerator. The investigation was performed in order to evaluate the limitations and the systematic effects affecting its use as a microdosimeter. The results can be extended to the standard use of these kind of devices as particle identifiers.

A new monolithic silicon detector telescope with bidimensional sensitivity for imaging applications

New monolithic silicon telescopes act as high performance and versatile devices to detect and identify charged particles. Their features allow their use also as position sensitive detectors.

Imaging monolithic silicon detector telescopes

We show the results of some test beams performed on a new monolithic strip silicon detector telescope developed in collaboration with the INFN and ST-microelectronics. Using an appropriate design, the induction on the ΔE stages, generated by the charge released in the E stage, was used to obtain the position of the detected particle. The position measurement, together with the low threshold for particle charge identification, allows the new detector to be used for a large variety of applications due to its sensitivity of only a few microns measured in both directions.

ΔOSI: a prototype microstrip dosimeter for characterization of medical radiotherapy and radiosurgery systems

A linear array (1D) detector made by monolithic silicon detector for real time high spatial resolution dosimetry in modern radiotherapy applications is described. The prototype detector consists of 128 square pixels of 250 mum connected to a dedicated read-out integrated circuit (ROIC). Results on the linearity of the system, as well as relative dosimetry measurements in the presence of high dose gradients for 6 MV X-rays by a clinical linac will be presented and compared with film