Structures containing multiple layers of self-assembled InAs quantum dot clusters within a GaAs matrix are investigated on GaAs (1 0 0) by atomic force microscopy. Droplet homoepitaxy (GaAs nanostructures on planar GaAs) is used to create tiny GaAs nano-mound templates elongated along [0 1 −1]. Due to a high density of monolayer steps on the edge of nano-mounds, deposited InAs prefer to form in clusters around the nano-mound templates. By varying the subsequent InAs monolayer coverages and growth temperatures, two distinctive sizes of quantum dots (QDs) are formed around the nano-mounds for the layer stacking. With a fixed GaAs barrier thickness (10 nm) in between the layers, the resulting QDs from the stacked layers show significant improvement in their size uniformity.