Ions extracted from mass separators normally have energies in the range of tens of kilovolts and poor emittances, and are thereby not suited for soft landing, especially in ion deposition applications. In this article a system is described that has been developed for in-flight capture of continuous 60 keV ion beams and delivering them as low energy beam pulses of less than 1 μs duration and energies of less than 5 keV. They are also cooled so that their emittances and energy spreads are considerably reduced from those of the original beam. The basis of the system is a very large Paul trap as a collection system, together with a pulse-down cavity for modifying the energy of the delivered beam. The performance of the system has been analyzed using time-of-flight of the extracted ions. Experimental results are presented, together with numerical simulations of the results that lead to an understanding of the spatial and momentum properties of the ion collection in the trap. The results show how such collection systems can be designed for specific purposes, such as high-current implantation or precise implantation of smaller collections. Such a system can also be used where the ultimate destination is storage in an electromagnetic trap at ground potential.
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