Micro-optical Elements Research Articles

Superhydrophobic quasi-periodic concave microlens array on fused silica prepared by spatially modulated picosecond laser parallel processing

Fused-silica-based microlens array (MLA) has excellent stability in the harsh environment. However, it is still a challenge to efficiently prepare superhydrophobic quasi-periodic MLA and keep the optical performance of the microlens. In this paper, we proposed spatial modulated picosecond laser parallel processing method to prepare a superhydrophobic quasi-periodic MLA on fused silica. By using a spatial light modulator, the picosecond laser was shaped to multi-focal spots and line-shape beam, respectively, which improved the fabrication efficiency. The line-shape beam was the key to induce micro-nanostructures on the smooth MLA and keep the optical performance of the microlens. The results showed that the surface roughness of the microlens region was less than 100 nm. Combing with shaping picosecond laser processing and chemical treatment, the superhydrophobic MLAs showed the excellent anti-fogging and self-cleaning properties. The average contact angle of the superhydrophobic MLAs was 162.3°. The superhydrophobic MLA showed low adhesion to water droplet (<10 μN) and low contact angle hysteresis (2.1° ± 0.7°). We believe shaping picosecond laser parallel processing method is a flexible and low-cost approach to prepare superhydrophobic micro-optical elements on fused silica.

Scanning Electrochemical Probe Lithography for Ultra-Precision Machining of Micro-Optical Elements with Freeform Curved Surface.

Two challenges should be overcome for the ultra-precision machining of micro-optical element with freeform curved surface: one is the intricate geometry, the other is the hard-to-machining optical materials due to their hardness, brittleness or flexibility. Here scanning electrochemical probe lithography (SECPL) is developed, not only to meet the machining need of intricate geometry by 3D direct writing, but also to overcome the above mentioned mechanical properties by an electrochemical material removal mode. Through the electrochemical probe a localized anodic voltage is applied to drive the localized corrosion of GaAs. The material removal rate is obtained as a function of applied voltage, motion rate, scan segment, etc. Based on the material removal function, an arbitrary geometry can be converted to a spatially distributed voltage. Thus, a series of micro-optical element are fabricated with a machining accuracy in the scale of 100 s of nanometers. Notably, the spiral phase plate shows an excellent performance to transfer parallel light to vortex beam. SECPL demonstrates its excellent controllability and accuracy for the ultra-precision machining of micro-optical devices with freeform curved surface, providing an alternative chemical approach besides the physical and mechanical techniques.

Micro-optical elements from optical-quality ZIF-62 hybrid glasses by hot imprinting

Hybrid glasses derived from meltable metal-organic frameworks (MOFs) promise to combine the intriguing properties of MOFs with the universal processing ability of glasses. However, the shaping of hybrid glasses in their liquid state – in analogy to conventional glass processing – has been elusive thus far. Here, we present optical-quality glasses derived from the zeolitic imidazole framework ZIF-62 in the form of cm-scale objects. These allow for in-depth studies of optical transparency and refraction across the ultraviolet to near-infrared spectral range. Fundamental viscosity data are reported using a ball penetration technique, and subsequently employed to demonstrate the fabrication of micro-optical devices by thermal imprinting. Using 3D-printed fused silica templates, we show that concave as well as convex lens structures can be obtained at high precision by remelting the glass without trading-off on material quality. This enables multifunctional micro-optical devices combining the gas uptake and permeation ability of MOFs with the optical functionality of glass. As an example, we demonstrate the reversible change of optical refraction upon the incorporation of volatile guest molecules.

Off-axis bifocal metalens for displacement measurement

Metasurface is a new type of micro-optical element developed in recent years. It can intelligently modulate electromagnetic waves by adjusting the geometrical parameters and arrangement of dielectric structures. In this paper, a bifocal metalens based on modulation of propagation phase was designed for the potential application in displacement measurement. The phase of the bifocal lens is designed by the optical holography-like method, which is verified by the scalar diffraction theory. We designed a square aperture lens with a side length of 200 μm to realize two focal spots with focal lengths of 900 and 1100 μm. The two focal spots aren’t on one optical axis. The polarization insensitive TiO2 cylinders are chosen as structure units. Four structures with different radius were selected to achieve the four phase steps. We fabricated the designed bifocal metalens using electron beam lithography and atomic layer deposition techniques, and measured the light intensity in the areas near the two foci in the direction of the longitudinal axis. The differential signal was calculated, from which we obtained a linear interval. It demonstrates the ability of bifocal differential measurement to be applied to displacement measurement. Because the metasurfaces production process is semiconductor compatible, the bifocal lens is easy to integrate and can be used for miniaturized displacement measurements, micro-resonators, acceleration measurements, and so on.

Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays.

Microlens arrays, as typical micro-optical elements, effectively enhance the integration and performance of optical systems. The surface shape errors and surface roughness of microlens arrays are the main indicators of their optical characteristics and determine their optical performance. In this study, a mask-moving-projection-lithography-based high-precision surface fabrication method for microlens arrays is proposed, which effectively reduces the surface shape errors and surface roughness of microlens arrays. The pre-exposure technology is used to reduce the development threshold of the photoresist, thus eliminating the impact of the exposure threshold on the surface shape of the microlens. After development, the inverted air bath reflux method is used to bring the microlens array surface to a molten state, effectively eliminating surface protrusions. Experimental results show that the microlens arrays fabricated using this method had a root mean square error of less than 2.8%, and their surface roughness could reach the nanometer level, which effectively improves the fabrication precision for microlens arrays.

Single femtosecond pulse writing of a bifocal lens.

In this Letter, a method for the fabrication of bifocal lenses is presented by combining surface ablation and bulk modification in a single laser exposure followed by the wet etching processing step. The intensity of a single femtosecond laser pulse was modulated axially into two foci with a designed computer-generated hologram (CGH). Such pulse simultaneously induced an ablation region on the surface and a modified volume inside the fused silica. After etching in hydrofluoric acid (HF), the two exposed regions evolved into a bifocal lens. The area ratio (diameter) of the two lenses can be flexibly adjusted via control of the pulse energy distribution through the CGH. Besides, bifocal lenses with a center offset as well as convex lenses were obtained by a replication technique. This method simplifies the fabrication of micro-optical elements and opens a highly efficient and simple pathway for complex optical surfaces and integrated imaging systems.

Vortex phase-shifting digital holography for micro-optical element surface topography measurment

Vortex phase-shifting digital holography for micro-optical element surface topography measurment

An Improved 3D OPC Method for the Fabrication of High-Fidelity Micro Fresnel Lenses.

Based on three-dimensional optical proximity correction (3D OPC), recent advancements in 3D lithography have enabled the high-fidelity customization of 3D micro-optical elements. However, the micron-to-millimeter-scale structures represented by the Fresnel lens design bring more stringent requirements for 3D OPC, which poses significant challenges to the accuracy of models and the efficiency of algorithms. Thus, a lithographic model based on optical imaging and photochemical reaction curves is developed in this paper, and a subdomain division method with a statistics principle is proposed to improve the efficiency and accuracy of 3D OPC. Both the simulation and the experimental results show the superiority of the proposed 3D OPC method in the fabrication of Fresnel lenses. The computation memory requirements of the 3D OPC are reduced to below 1%, and the profile error of the fabricated Fresnel lens is reduced 79.98%. Applying the Fresnel lenses to an imaging system, the average peak signal to noise ratio (PSNR) of the image is increased by 18.92%, and the average contrast of the image is enhanced by 36%. We believe that the proposed 3D OPC method can be extended to the fabrication of vision-correcting ophthalmological lenses.

Parallel Phase-Shifting Digital Holographic Phase Imaging of Micro-Optical Elements with a Polarization Camera

In this paper, we propose a measurement method of micro-optical elements with parallel phase-shifting digital holographic phase imaging. This method can record four phase-shifting holograms with a phase difference of π/2 in a single shot and correct the pixel mismatch error of the polarization camera using a bilinear interpolation algorithm, thereby producing high-resolution four-step phase-shifting holograms. This method reconstructs the real phase information of the object to be measured through a four-step phase-shifting algorithm. The reproduced image eliminates the interference of zero-order images and conjugate images, overcoming the problem that traditional phase-shifting digital holography cannot be measured in real time. A simulation analysis showed that the relative error of this measurement method could reach 0.0051%. The accurate surface topography information of the object was reconstructed from an experimental measurement through a microlens array. Multiple measurements yielded a mean absolute error and a mean relative error for the vertical height of the microlens array down to 5.9500 nm and 0.0461%, respectively.

Stimulated-responsive refractive-diffractive biological hydrogel micro-optical element enabling achromatism via femtosecond laser lithography.

Herein, we report a novel biological hydrogel-based achromatic refractive-diffractive micro-optical element with single-material apochromatism. Benefiting from the stimulated responsive property of the hydrogel, pH modulation yielded swelling and affected the refractive index of the element, enabling multi-wavelength focusing performance tuning and chromatic aberration adjustment. Using femtosecond laser lithography, we fabricated a separate hydrogel microlens and Fresnel zone plate and measured the tunable focusing performance while varying pH; the results were consistent with our simulation results. Furthermore, we designed and fabricated a hydrogel-based achromatic refractive-diffractive micro-optical element and demonstrated achromatism with respect to three wavelengths using only one material consisting of a microlens and a Fresnel zone plate. We characterized the optical focusing properties and observed smaller chromatic aberration. The potential applications of such hybrid microoptical elements include biomedical imaging and optical biology sensing.

Application of ultrafast laser beam shaping in micro-optical elements

The manufacturing and application of micro-optical elements are constantly evolving toward miniaturization, integration, and intelligence and have important applications in holographic displays, optical imaging, laser processing, information processing, and other fields. Ultrafast lasers, with their ultrashort pulse width, extremely high peak power, high processing resolution, small thermal influence zone, and nondestructive material processing advantages, have become an important processing method for preparing micro-optical elements. However, the laser output from the laser usually has a Gaussian distribution, with limitations in spatial and temporal energy and shape distribution, making it difficult to meet the requirements of processing efficiency and quality, which poses new challenges to ultrafast laser manufacturing technology. Therefore, by shaping the ultrafast laser beam and regulating nonlinear optical effects, the optimization and adjustment of the beam shape can be achieved, thus improving the quality and efficiency of micro-optical element processing. Ultrafast laser beam shaping technology provides a new method for the manufacture of micro-optical elements. This article first introduces the commonly used manufacturing methods for micro-optical elements. Second, from the perspective of the temporal domain, spatial domain, and spatiotemporal domain, the basic principles, methods, and existing problems of ultrafast laser beam shaping are summarized. Then, the application of these shaping technologies in the preparation of micro-optical elements is elaborated. Finally, the challenges and future development prospects of ultrafast laser beam shaping technology are discussed.

EXPERIMENTAL EVALUATION OF THE HOMOGENEITY OF THE OUTPUT STREAMS OF OPTICAL RADIATION OF A RECTANGULAR SHAPE FOR VARIOUS VERSIONS OF THE OUTPUT SECTIONS OF THE LIGHT GUIDE NOZZLES FOR MEDICAL LASER EQUIPMENT

The article presents the results of a study of the homogeneity of rectangular optical radiation fluxes for different versions of the initial sections of the light guide nozzles. When conducting a significant part of laser exposure in medicine, pathological areas of biological tissue or their projections located on the surface of the body are covered with light spots with contours, as a rule, in the form of flat geometric shapes.&#x0D; The variability of the implementation of light spots in shape (circle, square, rectangle, triangle, rhombus, etc.) and linear dimensions of the cross section allows you to select the shape and size of the light spot, covering a specific pathological surface with minimal capture of intact tissues. At the same time, regardless of the shape and linear dimensions, the light spots should be as uniform as possible. To date, of particular interest is the provision of optical uniformity of rectangular light spots.&#x0D; Firstly, similar forms of spots are widely used under the influence of laser medicine. Secondly, in the original optical stages of laser equipment and the light guides connected to them, first of all, optical fibers of a cylindrical shape with a rounded cross section of the optical flow at the output are used. The purpose of this work is to optimize the parameters of light guide nozzles of medical laser equipment with rectangular output optical radiation fluxes by evaluating the uniformity of the power density distribution for various options for the output sections of the nozzles. In the work, optical flows at the output of three versions of the distal sections of light guides were studied. The light guides were formed by optical fibers, including the use of microlenses at the output ends, and were apertured by channel optical waveguides in the form of rectangular parallelepipeds.&#x0D; The experimental results obtained at the stage of physical modeling show the promise of using spherical micro-optical elements at the initial ends of optical fibers in combination with rectangular apertures in the form of channel optical waves to obtain rectangular light spots with a high level of optical homogeneity.

Fabrication of GRIN microstructures by two-photon lithography

The method of two-photon lithography is used to fabricate GRIN microstructures. Test rectangular structures with sizes 25 × 25 × 3 micrometers were used with varying laser intensity by linear or gaussian distribution in one dimension. The resulting refractive index has been tuned in the range of 0.03. The suggested method can be applied to produce arbitrarily shaped 3D GRIN micro-optical elements.

Polarisation Control in Arrays of Microlenses and Gratings: Performance in Visible-IR Spectral Ranges.

Microlens arrays (MLAs) which are increasingly popular micro-optical elements in compact integrated optical systems were fabricated using a femtosecond direct laser write (fs-DLW) technique in the low-shrinkage SZ2080TM photoresist. High-fidelity definition of 3D surfaces on IR transparent CaF2 substrates allowed to achieve ∼50% transmittance in the chemical fingerprinting spectral region 2-5 μm wavelengths since MLAs were only ∼10 μm high corresponding to the numerical aperture of 0.3 (the lens height is comparable with the IR wavelength). To combine diffractive and refractive capabilities in miniaturised optical setup, a graphene oxide (GO) grating acting as a linear polariser was also fabricated by fs-DLW by ablation of a 1 μm-thick GO thin film. Such an ultra-thin GO polariser can be integrated with the fabricated MLA to add dispersion control at the focal plane. Pairs of MLAs and GO polarisers were characterised throughout the visible-IR spectral window and numerical modelling was used to simulate their performance. A good match between the experimental results of MLA focusing and simulations was achieved.

Fresnel zone plate sculptured out of diamond by femtosecond laser for harsh environments.

With the rapid development of micro-optical applications, there is an increasing demand for micro-optical elements that can be made with minimal processing steps. Current research focuses on practical functionalities of optical performance, lightweight, miniaturization, and easy integration. As an important planar diffractive optical element, the Fresnel zone plate (FZP) provides a compact solution for focusing and imaging. However, the fabrication of FZPs with high quality out of hard and brittle materials remains challenging. Here, we report on the fabrication of diamond FZP by femtosecond laser direct writing. FZPs with the same outer diameter and different focal lengths of 250-1000 µm were made via ablation. The fabricated FZPs possess well-defined geometry and excellent focusing and imaging ability in the visible spectral range. Arrays of FZPs with different focal lengths were made for potential applications in imaging, sensing, and integrated optical systems.

Phase-type diffractive micro-optics elements in sulfur-based polymeric glass by femtosecond laser direct writing.

Sulfur-based polymeric glasses are promising alternative low-cost IR materials due to their profoundly high IR transparency. In this Letter, femtosecond-laser-induced refractive index change (RIC) was investigated in one typical sulfur-based polymeric glass material, poly(S-r-DIB), for the first time, to the best of our knowledge. The RIC in the laser-engineered region was quantitively characterized, which laid a foundation for phase-type optical element design. By the integration of RIC traces, embedded phase-type micro-optics elements, including Fresnel zone plates, and a Dammann grating were fabricated in bulk poly(S-r-DIB) polymeric glass substrate via the femtosecond laser direct writing technique. The imaging and beam shaping performance were demoed in the near-infrared (NIR) region.

Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

Imaging/nonimaging microoptical elements and stereoscopic systems based on femtosecond laser direct writing

Benzylidene Cyclopentanone Derivative Photoinitiator for Two-Photon Photopolymerization-Photochemistry and 3D Structures Fabrication for X-ray Application.

Micron- and submicron-scale 3D structure realization nowadays is possible due to the two-photon photopolymerization (TPP) direct laser writing photolithography (DLW photolithography) method. However, the achievement of lithographic features with dimensions less than 100 nm is in demand for the fabrication of micro-optical elements with high curvature values, including X-ray microlenses. Spectroscopic and photochemical study of a photoinitiator (PI) based on a methyl methacrylate derivative of 2,5-bis(4-(dimethylamino)benzylidene) cyclopentanone was performed. Enhanced intersystem crossing in the methyl methacrylate derivative results in increased radical generation for the subsequent initiation of polymerization. A comprehensive study of the new photocompositions was performed, with particular emphasis on photochemical constants, the degree of photopolymerization, and topology. The optimal parameters for the fabrication of mechanically stable structures were determined in this research. The threshold dose parameters for lithography (radiation power of 5 mW at a speed of 180 µm/s) when trying to reach saturation values with a conversion degree of (35 ± 1) % were defined, as well as parameters for sub-100 nm feature fabrication. Moreover, the 45 nm feature size for elements was reached. Fabrication of X-ray lens microstructures was also demonstrated.

On-Chip Quantum Communication Devices

We present here results of the Quantum Technology Flagship project UNIQORN in the area of integrated photonics for quantum communication applications. Three distinct integration platforms, namely indium phosphide based monolithic integration, polymer-based hybrid integration and the CMOS-compatible silicon platform, have been employed to manufacture components and sub-systems on chip for quantum communication devices. The choice of different platforms was made to exploit the best characteristics of each platform for the intended quantum communication device. The indium phosphide platform was employed to manufacture a transmitter chip for quantum key distribution featuring laser, modulators, and attenuators. The transmitter chip was evaluated in a QKD experiment achieving a secure rate of 1 kbit/s. The polymer platform was investigated for engineering non-classical light sources. Entangled and heralded single-photon sources, based on non-linear optics, were assembled on the polymer in a hybrid fashion together with waveguides and other passive micro-optical elements. A quantum random number generator, featuring a 70% randomness extraction efficiency, was also fabricated using the polymer integration technique. An array of 32 individual single-photon avalanche diodes, operating at room temperature and featuring an onboard coincidence logic, was coupled to the chip to demonstrate direct detection of photons on the polymer. Finally, a transimpedance amplifier based on gallium arsenide high electron mobility transistors was produced with an exceptional large electrical noise clearance of 28 dB at 100 MHz.

Miniature optoelectronic compound eye camera.

Inspired by insect compound eyes (CEs) that feature unique optical schemes for imaging, there has recently been growing interest in developing optoelectronic CE cameras with comparable size and functions. However, considering the mismatch between the complex 3D configuration of CEs and the planar nature of available imaging sensors, it is currently challenging to reach this end. Here, we report a paradigm in miniature optoelectronic integrated CE camera by manufacturing polymer CEs with 19~160 logarithmic profile ommatidia via femtosecond laser two-photon polymerization. In contrast to μ-CEs with spherical ommatidia that suffer from defocusing problems, the as-obtained μ-CEs with logarithmic ommatidia permit direct integration with a commercial CMOS detector, because the depth-of-field and focus range of all the logarithmic ommatidia are significantly increased. The optoelectronic integrated μ-CE camera enables large field-of-view imaging (90°), spatial position identification and sensitive trajectory monitoring of moving targets. Moreover, the miniature μ-CE camera can be integrated with a microfluidic chip and serves as an on-chip camera for real-time microorganisms monitoring. The insect-scale optoelectronic μ-CE camera provides a practical route for integrating well-developed planar imaging sensors with complex micro-optics elements, holding great promise for cutting-edge applications in endoscopy and robot vision.