Miniaturized mechanical tests are commonly utilized to evaluate properties of materials, including thin films, nanostructured, and irradiated materials. However, the specimen size effect occurs when miniaturized sample geometries contain too few dislocation sources, resulting in elevated yield stresses. The size effect is controlled by extrinsic (specimen dimensions) and intrinsic (microstructure) factors. Here, we summarize extrinsic and intrinsic size effects from micro-compression pillar, micro-cantilever bend, and flexure studies reported in the archival literature. We find an approximately linear relationship between intrinsic and extrinsic size effects. Meaningful mechanical properties can be measured when extrinsic size dominates the intrinsic size.
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