Micro-fabricated Alkali Vapor Cells Research Articles

Integration of Passivated Gold Mirrors into Microfabricated Alkali Vapor Cells

Measurements of weak magnetic fields demand a small distance between the sensor and the to-be-measured object. Optically pumped magnetometers (OPMs) utilize laser light and the Zeeman effect in alkali vapor cells to measure those fields. OPMs can be used in transmission or reflection geometry. A minimization of the distance between active volume and magnetized source calls for reflection geometry with integrated mirrors. Unfortunately, cesium reacts chemically with most materials, especially high-performing materials, such as gold. Herein, we show the first functional OPM cell using a gold mirror inside the cell. We fabricated the gold mirrors with and without a passivation layer in order to evaluate the feasibility of expanding on the limited list of possible mirror materials. A comparison of this implementation revealed that mirrors without a passivation layer only reach a reflectivity of about 6% while mirrors with a passivation layer retain reflectivity values of about 90% in the visible light to near-infrared spectrum. This result and the proof of elemental cesium in the alkali vapor cell demonstrates the feasibility of passivated gold mirrors for applications in alkali vapor cells for OPMs.

Reduction of helium permeation in microfabricated cells using aluminosilicate glass substrates and Al2O3 coatings

The stability and accuracy of atomic devices can be degraded by the evolution of their cell inner atmosphere. Hence, the undesired entrance or leakage of background or buffer gas, respectively, that can permeate through the cell walls, should be slowed down. In this work, we investigate helium permeation in microfabricated alkali vapor cells filled with He and whose windows are made of borosilicate glass (BSG) or aluminosilicate glass (ASG). The permeation is then derived from routine measurements of the pressure-shifted hyperfine transition frequency of an atomic clock. We first confirm that ASG reduces the He permeation rate by more than two orders of magnitude, in comparison to BSG. In addition, we demonstrate that Al2O3 thin-film coatings, known to avoid alkali consumption in vapor cells, can also significantly reduce He permeation. The permeation through BSG is thereby reduced by a factor up to 130, whereas the one through ASG is decreased by a factor up to 5.0 compared to uncoated substrates. These results may contribute to the development of miniaturized atomic clocks and sensors with improved long-term stability or sensitivity.

Recent Progress on Micro-Fabricated Alkali Metal Vapor Cells.

Alkali vapor cells are the core components of atomic sensing instruments such as atomic gyroscopes, atomic magnetometers, atomic clocks, etc. Emerging integrated atomic sensing devices require high-performance miniaturized alkali vapor cells, especially micro-fabricated vapor cells. In this review, bonding methods for vapor cells of this kind are summarized in detail, including anodic bonding, sacrificial micro-channel bonding, and metal thermocompression bonding. Compared with traditional through-lighting schemes, researchers have developed novel methods for micro-fabricated vapor cells under both single- and double-beam schemes. In addition, emerging packaging methods for alkali metals in micro-fabricated vapor cells can be categorized as physical or chemical approaches. Physical methods include liquid transfer and wax pack filling. Chemical methods include the reaction of barium azide with rubidium chloride, ultraviolet light decomposition (of rubidium azide), and the high-temperature electrolysis of rubidium-rich glass. Finally, the application trend of micro-fabricated alkali vapor cells in the field of micro-scale gyroscopes, micro-scale atomic clocks, and especially micro-scale biomagnetometers is reviewed. Currently, the sensing industry has become a major driving force for the miniaturization of atomic sensing devices, and in the near future, the micro-fabricated alkali vapor cell technology of atomic sensing devices may experience extensive developments.

The Microfabricated Alkali Vapor Cell with High Hermeticity for Chip-Scale Atomic Clock

Herein, a microfabricated millimeter-level vapor alkali cell with a high hermeticity is fabricated through a wet etching and single-chip anodic bonding process. The vapor cell, containing Rb and N2, was investigated in a coherent population trapping (CPT) setup for the application of a chip-scale atomic clock (CSAC). The contrast of CPT resonance is up to 1.1% within the only 1 mm length of light interacting with atom. The effects of some critical external parameters on the CPT resonance, such as laser intensity, cell temperature, and buffer gas pressure, are thoroughly studied and optimized. The improved microfabricated vapor cell also exhibited great potential for other chip-scale atomic devices.

Laser cooling in a chip-scale platform

Chip-scale atomic devices built around micro-fabricated alkali vapor cells are at the forefront of compact metrology and atomic sensors. We demonstrate a micro-fabricated vapor cell that is actively pumped to ultra-high-vacuum (UHV) to achieve laser cooling. A grating magneto-optical trap (GMOT) is incorporated with a 4 mm-thick Si/glass vacuum cell to demonstrate the feasibility of a fully miniaturized laser cooling platform. A two-step optical excitation process in rubidium is used to overcome surface-scatter limitations to the GMOT imaging. The unambiguous miniaturization and form-customizability made available with micro-fabricated UHV cells provide a promising platform for future compact cold-atom sensors.

Portable Magnetometry for Detection of Biomagnetism in Ambient Environments

We present a method of optical magnetometry with parts-per-billion resolution that is able to detect biomagnetic signals generated from the human brain and heart in Earth's ambient environment. Our magnetically silent sensors measure the total magnetic field by detecting the free-precession frequency of highly spin-polarized alkali metal vapor. A first-order gradiometer is formed from two magnetometers that are separated by a 3 cm baseline. Our gradiometer operates from a laptop consuming 5 W over a USB port, enabled by state-of-the-art micro-fabricated alkali vapor cells, advanced thermal insulation, custom electronics, and laser packages within the sensor head. The gradiometer obtains a sensitivity of 16 fT/cm/Hz$^{1/2}$ outdoors, which we use to detect neuronal electrical currents and magnetic cardiography signals. Recording of neuronal magnetic fields is one of a few available methods for non-invasive functional brain imaging that usually requires extensive magnetic shielding and other infractructure. This work demonstrates the possibility of a dense array of portable biomagnetic sensors that are deployable in a variety of natural environments.

Micro-fabricated alkali vapor cells sealed at low temperature using asymmetric Au–In transient liquid phase (TLP) bonding

Vapor cells as the key part of chip-scale atomic clocks determine their volume stability and power consumption. Micro-fabrication, especially the cavity packaging, is challenging. In this paper, micro-fabricated rubidium vapor cells are fabricated and the Au-In TLP bonding with asymmetric metal configuration is proposed and designed to package wafer-scale cell chips at a low processing temperature of 200 °C. Tests show that the designed intermetallic compounds AuIn2 and AuIn are uniformly formed in the asymmetric TLP bonding interlayer, indicating that the bonded interlayer can endure a post-processing temperature as high as 490 °C. The TLP bonded surface exhibits shear strength of 31.68 MPa, and the upper limit for the leak rate of the sealed vapor cell is 5 × 10−10 mbar · L s–1 which remains stable after undergoing a high temperature post-treatment. Meaning the proposed Au-In TLP bonding technique is applicable at low-temperature, hermetic and reliable wafer-scale packaging for micro-fabricated alkali vapor cells.

Improvement of Sensitivity by Using Microfabricated Spherical Alkali Vapor Cells for Chip-Scale Atomic Magnetometers

The designs of microfabricated alkali vapor cells play an important role when the atomic magnetometers are developing toward on-chip integration. This paper presents microfabricated spherical alkali vapor cells with improved sensitivity for chip-scale atomic magnetometers. A microfabricated spherical rubidium vapor cell and a traditional microfabricated planar rubidium vapor cell are designed for comparison, which are of the same volume and interconnected by a microchannel to acquire equal inner buffer gas pressure. In chip-scale spin-exchange relaxation-free (SERF) atomic magnetometers, the rubidium polarization lifetimes of three pairs of spherical and planar vapor cells at different buffer gas pressures of 0.35, 0.73, and 2.00 amg are measured, respectively. The sensitivity of SERF atomic magnetometers using the vapor cells at a 0.35-amg buffer gas pressure is also measured. The results show that the transverse polarization lifetime of the spherical vapor cell is 2.46, 1.44, and 1.05 times that of the planar one at 0.35-, 0.73-, and 2.00-amg buffer gas pressures, respectively. Combining the improved polarization lifetime and increased optical path length, chip-scale SERF atomic magnetometer using the microspherical vapor cell has the sensitivity of 60 fT/Hz1/2 from 5 to 15 Hz, while that based on the planar one is demonstrated with the sensitivity of 400 fT/Hz1/2 from 5 to 15 Hz.

Chip-scale atomic devices

Chip-scale atomic devices combine elements of precision atomic spectroscopy, silicon micromachining, and advanced diode laser technology to create compact, low-power, and manufacturable instruments with high precision and stability. Microfabricated alkali vapor cells are at the heart of most of these technologies, and the fabrication of these cells is discussed in detail. We review the design, fabrication, and performance of chip-scale atomic clocks, magnetometers, and gyroscopes and discuss many applications in which these novel instruments are being used. Finally, we present prospects for future generations of miniaturized devices, such as photonically integrated systems and manufacturable devices, which may enable embedded absolute measurement of a broad range of physical quantities.

Lifetime assessment of RbN3-filled MEMS atomic vapor cells with Al2O3 coating.

Micro-fabricated (MEMS) alkali vapor cells are at the heart of the miniaturization of atomic devices such as atomic magnetometers, atomic gyroscopes and atomic clocks. Among the different techniques used to fill microfabricated alkali vapor cell, UV decomposition of rubidium azide (RbN3) into metallic Rb and nitrogen in Al2O3 coated cells is a very promising approach for low-cost wafer-level fabrication. Here we present a detailed lifetime study of such cells. The rubidium consumption being the main identified cell failure mode, it is monitored with an novel image analysis technique and with high temperature long term aging tests.

Widefield microwave imaging in alkali vapor cells with sub-100 μm resolution

We report on widefield microwave vector field imaging with sub- resolution using a microfabricated alkali vapor cell. The setup can additionally image dc magnetic fields, and can be configured to image microwave electric fields. Our camera-based widefield imaging system records 2D images with a 6 × 6 mm2 field of view at a rate of 10 Hz. It provides up to spatial resolution, and allows imaging of fields as close as above structures, through the use of thin external cell walls. This is crucial in allowing us to take practical advantage of the high spatial resolution, as feature sizes in near-fields are on the order of the distance from their source, and represent an order of magnitude improvement in surface-feature resolution compared to previous vapor cell experiments. We present microwave and dc magnetic field images above a selection of devices, demonstrating a microwave sensitivity of per voxel, at present limited by the speed of our camera system. Since we image 120 × 120 voxels in parallel, a single scanned sensor would require a sensitivity of at least to produce images with the same sensitivity. Our technique could prove transformative in the design, characterization, and debugging of microwave devices, as there are currently no satisfactory established microwave imaging techniques. Moreover, it could find applications in medical imaging.

Laser light routing in an elongated micromachined vapor cell with diffraction gratings for atomic clock applications.

This paper reports on an original architecture of microfabricated alkali vapor cell designed for miniature atomic clocks. The cell combines diffraction gratings with anisotropically etched single-crystalline silicon sidewalls to route a normally-incident beam in a cavity oriented along the substrate plane. Gratings have been specifically designed to diffract circularly polarized light in the first order, the latter having an angle of diffraction matching the (111) sidewalls orientation. Then, the length of the cavity where light interacts with alkali atoms can be extended. We demonstrate that a longer cell allows to reduce the beam diameter, while preserving the clock performances. As the cavity depth and the beam diameter are reduced, collimation can be performed in a tighter space. This solution relaxes the constraints on the device packaging and is suitable for wafer-level assembly. Several cells have been fabricated and characterized in a clock setup using coherent population trapping spectroscopy. The measured signals exhibit null power linewidths down to 2.23 kHz and high transmission contrasts up to 17%. A high contrast-to-linewidth ratio is found at a linewidth of 4.17 kHz and a contrast of 5.2% in a 7-mm-long cell despite a beam diameter reduced to 600 μm.

Aging studies on micro-fabricated alkali buffer-gas cells for miniature atomic clocks

We report an aging study on micro-fabricated alkali vapor cells using neon as a buffer gas. An experimental atomic clock setup is used to measure the cell's intrinsic frequency, by recording the clock frequency shift at different light intensities and extrapolating to zero intensity. We find a drift of the cell's intrinsic frequency of (−5.2 ± 0.6) × 10−11/day and quantify deterministic variations in sources of clock frequency shifts due to the major physical effects to identify the most probable cause of the drift. The measured drift is one order of magnitude stronger than the total frequency variations expected from clock parameter variations and corresponds to a slow reduction of buffer gas pressure inside the cell, which is compatible with the hypothesis of loss of Ne gas from the cell due to its permeation through the cell windows. A negative drift on the intrinsic cell frequency is reproducible for another cell of the same type. Based on the Ne permeation model and the measured cell frequency drift, we determine the permeation constant of Ne through borosilicate glass as (5.7 ± 0.7) × 10−22 m2 s−1 Pa−1 at 81 °C. We propose this method based on frequency metrology in an alkali vapor cell atomic clock setup based on coherent population trapping for measuring permeation constants of inert gases.

Microfabricated alkali vapor cell with anti-relaxation wall coating

We present a microfabricated alkali vapor cell equipped with an anti-relaxation wall coating. The anti-relaxation coating used is octadecyltrichlorosilane and the cell was sealed by thin-film indium-bonding at a low temperature of 140 °C. The cell body is made of silicon and Pyrex and features a double-chamber design. Depolarizing properties due to liquid Rb droplets are avoided by confining the Rb droplets to one chamber only. Optical and microwave spectroscopy performed on this wall-coated cell are used to evaluate the cell's relaxation properties and a potential gas contamination. Double-resonance signals obtained from the cell show an intrinsic linewidth that is significantly lower than the linewidth that would be expected in case the cell had no wall coating but only contained a buffer-gas contamination on the level measured by optical spectroscopy. Combined with further experimental evidence this proves the presence of a working anti-relaxation wall coating in the cell. Such cells are of interest for applications in miniature atomic clocks, magnetometers, and other quantum sensors.

Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings

Alumina (Al2O3), silicon dioxide (SiO2) and titanium dioxide (TiO2) films were examined for their suitability as a protection coating for micro-fabricated cesium vapor cells. The layers were deposited by atomic layer deposition (ALD). This technique enables the deposition of pinhole-free passivation layers with a low roughness, a high conformality and a high homogeneity, even at three-dimensional surfaces. It is shown that Al2O3 and SiO2 films, in contrast to TiO2 films, do not hamper anodic bonding up to thicknesses of 20nm. The resistance enhancement of the vapor cells by means of the implementation of the ALD films is demonstrated by absorption measurements of the cesium D1 line. SiO2 coatings showed no effects on the resistance of the vapor cells against the reducing behavior of cesium. In contrast, Al2O3 coatings improved the resistance of the vapor cells by a factor of ~100.

Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks

A low-temperature sealing technique for micro-fabricated alkali vapor cells for chip-scale atomic clock applications is developed and evaluated. A thin-film indium bonding technique was used for sealing the cells at temperatures of ≤140 °C. These sealing temperatures are much lower than those reported for other approaches, and make the technique highly interesting for future micro-fabricated cells, using anti-relaxation wall coatings. Optical and microwave spectroscopy performed on first indium-bonded cells without wall coatings are used to evaluate the cleanliness of the process as well as a potential leak rate of the cells. Both measurements confirm a stable pressure inside the cell and therefore an excellent hermeticity of the indium bonding. The double-resonance measurements performed over several months show an upper limit for the leak rate of 1.5 × 10−13 mbar·l/s. This is in agreement with additional leak-rate measurements using a membrane deflection method on indium-bonded test structures.

チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術

This paper reports on a novel and simple packaging technique to enhance the atmosphere controllability of the microfabricated alkali vapor cell used for CSAMs (Chip Scale Atomic Magnetometers), in which sacrificial microchannels at the bonded interface are utilized as gas feedthrough for evacuation and filling, subsequently sealed by glass-frit reflow. By applying the proposed method, a 10 mm3 potassium vapor cell with 0.1 MPa helium buffer gas was fabricated. Sealing of the microchannels by glass-frit reflow were successfully demonstrated adopting the optimized parameters as 460–480 °C at bonding pressure of more than 250 kPa. The leak rate of less than 3.1×10−14 Pa·m3/s, which is required sealing quality for CSAM, was verified through a high resolution helium leak test.