Microelectromechanical Systems Mirror Research Articles

An Electrostatic MEMS Translational Scanner with Large Out-of-Plane Stroke for Remote Axial-Scanning in Multi-Photon Microscopy

We present an electrostatic microelectromechanical systems (MEMS) resonant scanner with large out-of-plane translational stroke for fast axial-scanning in a multi-photon microscope system for real-time vertical cross-sectional imaging. The scanner has a compact footprint with dimensions of 2.1 mm × 2.1 mm × 0.44 mm, and employs a novel lever-based compliant mechanism to enable large vertical displacements of a reflective mirror with slight tilt angles. Test results show that by using parametrical resonance, the scanner can provide a fast out-of-plane translational motion with ≥400 μm displacement and ≤0.14° tilt angle over a wide frequency range of ~390 Hz at ambient pressure. By employing this MEMS translational scanner and a biaxial MEMS mirror for lateral scanning, vertical cross-sectional imaging with a beam axial-scanning range of 200 μm and a frame rate of ~5–10 Hz is enabled in a remote scan multi-photon fluorescence imaging system.

Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

Given the multiple applications for micro-electro-mechanical system (MEMS) mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this paper, we present the modeling of a MEMS mirror structure with four actuators driven by the phase-change of a thin film. The complexity of the device structure and the nonlinear behavior of the actuation mechanism allow for a comprehensive study that encompasses simpler electrothermal designs, thus presenting a general approach that can be adapted to most MEMS mirror designs based on this operation principle. The MEMS mirrors presented in this work are actuated by Joule heating and tested using optical techniques. Mechanical and thermal models including both pitch and roll displacements are developed by combining theoretical analysis (using both numerical and analytical tools) with experimental data and subsequently verifying with quasi-static and dynamic experiments.

In-Plane Optical Beam Collimation Using a Three-Dimensional Curved MEMS Mirror

The collimation of free-space light propagating in-plane with respect to the substrate is an important performance factor in optical microelectromechanical systems (MEMS). This is usually carried out by integrating micro lenses into the system, which increases the cost of fabrication/assembly in addition to limiting the wavelength working range of the system imposed by the dispersion characteristic of the lenses. In this work we demonstrate optical fiber light collimation using a silicon micromachined three-dimensional curved mirror. Sensitivity to micromachining and fiber alignment tolerance is shown to be low enough by restricting the ratio between the mirror focal length and the optical beam Rayleigh range below 5. The three-dimensional curvature of the mirror is designed to be astigmatic and controlled by a process combining deep, reactive ion etching and isotropic etching of silicon. The effect of the micromachining surface roughness on the collimated beam profile is investigated using a Fourier optics approach for different values of root-mean-squared (RMS) roughness and correlation length. The isotropic etching step of the structure is characterized and optimized for the optical-grade surface requirement. The experimental optical results show a beam-waist ratio of about 4.25 and a corresponding 12-dB improvement in diffraction loss, in good agreement with theory. This type of micromirror can be monolithically integrated into lensless microoptoelectromechanical systems (MOEMS), improving their performance in many different applications.

Axial beam scanning in multiphoton microscopy with MEMS-based actuator.

We demonstrate a remotely located microelectromechanical systems (MEMS) actuator that can translate >400 μm to perform axial beam scanning in a multiphoton microscope. We use a 2-dimensional MEMS mirror for lateral scanning, and collected multiphoton excited fluorescence images in either the horizontal or vertical plane with a field-of-view of either 270 × 270 or 270 × 200 μm2, respectively, at 5 frames per second. Axial resolution varied from 4.5 to 7 μm over the scan range. The compact size of the actuator and scanner allows for use in an endomicroscope to collect images in the vertical plane with >200 μm depth.

Fringe-tunable electrothermal Fresnel mirror for use in compact and high-speed diffusion sensor.

This paper reports the development of an electrothermal microelectromechanical systems (MEMS) mirror with serpentine shape actuators. A micro Fresnel mirror with fringe-spacing tunability is required to realize a compact and high-speed diffusion sensor for biological samples whose diffusion coefficient changes significantly because of a conformational change. In this case, the measurement time-constant is dependent on the fringe-spacing and diffusion coefficient of the sample. In this study, a fringe-tunable MEMS mirror with an actuation voltage less than 10 V was developed. The characteristics of the fabricated mirror were investigated experimentally. A high-visibility optical interference fringe was successfully demonstrated using both an ultranarrow-linewidth solid-state laser and a low-cost compact laser diode. The experimental results demonstrated a distinct possibility of developing a measurement device using only simple and low-voltage optical components.

Visualizing epithelial expression of EGFR in vivo with distal scanning side-viewing confocal endomicroscope.

Confocal endomicroscopy is an emerging imaging technology that has recently been introduced into the clinic to instantaneously collect “optical biopsies” in vivo with histology-like quality. Here, we demonstrate a fast scanner located in the distal end of a side-viewing instrument using a compact lens assembly with numerical aperture of 0.5 to achieve a working distance of 100 μm and field-of-view of 300 × 400 μm2. The microelectromechanical systems (MEMS) mirror was designed based on the principle of parametric resonance and images at 5 frames per second. The instrument has a 4.2 mm outer diameter and 3 cm rigid length, and can pass through the biopsy channel of a medical endoscope. We achieved real time optical sections of NIR fluorescence with 0.87 μm lateral resolution, and were able to visualize in vivo binding of a Cy5.5-labeled peptide specific for EGFR to the cell surface of pre-cancerous colonocytes within the epithelium of dysplastic crypts in mouse colon. By performing targeted imaging with endomicroscopy, we can visualize molecular expression patterns in vivo that provide a biological basis for disease detection.

Handheld optical-resolution photoacoustic microscopy.

Optical-resolution photoacoustic microscopy (OR-PAM) offers label-free <italic<in vivo</italic< imaging with high spatial resolution by acoustically detecting optical absorption contrasts via the photoacoustic effect. We developed a compact handheld OR-PAM probe for fast photoacoustic imaging. Different from benchtop microscopes, the handheld probe provides flexibility in imaging various anatomical sites. Resembling a cup in size, the probe uses a two-axis water-immersible microelectromechanical system mirror to scan both the illuminating optical beam and resultant acoustic beam. The system performance was tested in vivo by imaging the capillary bed in a mouse ear and both the capillary bed and a mole on a human volunteer.

LIDAR pulse coding for high resolution range imaging at improved refresh rate.

In this study, a light detection and ranging system (LIDAR) was designed that codes pixel location information in its laser pulses using the direct- sequence optical code division multiple access (DS-OCDMA) method in conjunction with a scanning-based microelectromechanical system (MEMS) mirror. This LIDAR can constantly measure the distance without idle listening time for the return of reflected waves because its laser pulses include pixel location information encoded by applying the DS-OCDMA. Therefore, this emits in each bearing direction without waiting for the reflected wave to return. The MEMS mirror is used to deflect and steer the coded laser pulses in the desired bearing direction. The receiver digitizes the received reflected pulses using a low-temperature-grown (LTG) indium gallium arsenide (InGaAs) based photoconductive antenna (PCA) and the time-to-digital converter (TDC) and demodulates them using the DS-OCDMA. When all of the reflected waves corresponding to the pixels forming a range image are received, the proposed LIDAR generates a point cloud based on the time-of-flight (ToF) of each reflected wave. The results of simulations performed on the proposed LIDAR are compared with simulations of existing LIDARs.

A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range.

A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror’s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work.

Common-path optical coherence tomography using a microelectromechanical-system-based endoscopic probe.

This paper presents a common-path (CP) swept-source optical coherence tomography (SSOCT) system based on a special endoscopic probe design with an in-line internal reflection as the reference and a two-axis electrothermal microelectromechanical system mirror for image scanning. The rear surface of a gradient reflective index (GRIN) lens inside the probe is set as the reference reflection plane. The length of the GRIN lens is optimized to eliminate the artifacts in SSOCT images successfully. Doppler OCT is also demonstrated based on the CP endoscopic probe. The diameter of the probe is only 2.5mm, so it can be easily inserted into the biopsy channel of traditional endoscopes to access human internal organs for in vivo diagnoses.

VO2-Based MEMS Mirrors

This paper reports the integration of vanadium dioxide (VO2) thin films in a microelectromechanical systems (MEMS) mirror device, where the actuation is mainly due to the solid-solid phase transition of VO2. The fabrication process described in this paper provides the details that will enable the integration of VO2 thin films at any step during the fabrication of rather complex MEMS devices. The present VO2-based MEMS mirror device is operated electro-thermally through integrated resistive heaters, and its behavior is characterized across the phase transition of VO2, which occurs at a temperature of ~68 °C and spans about 10 °C. The maximum vertical displacement of the mirror platform is 75 $\mu {\mathrm {m}}$ and it occurs for an input voltage of 1.1 V. This translates to an average power consumption of 6.5 mW per mirror actuator and a total power consumption of 26.1 mW for the entire device. The studies included in this paper are key for future device improvements and further development of MEMS mirror actuation technology, which could include the use of the hysteresis of VO2 for programming tilting angles in MEMS mirrors. [2016-0016]

MEMS-based handheld scanning probe with pre-shaped input signals for distortion-free images in Gabor-domain optical coherence microscopy.

High-speed scanning in optical coherence tomography (OCT) often comes with either compromises in image quality, the requirement for post-processing of the acquired images, or both. We report on distortion-free OCT volumetric imaging with a dual-axis micro-electro-mechanical system (MEMS)-based handheld imaging probe. In the context of an imaging probe with optics located between the 2D MEMS and the sample, we report in this paper on how pre-shaped open-loop input signals with tailored non-linear parts were implemented in a custom control board and, unlike the sinusoidal signals typically used for MEMS, achieved real-time distortion-free imaging without post-processing. The MEMS mirror was integrated into a compact, lightweight handheld probe. The MEMS scanner achieved a 12-fold reduction in volume and 17-fold reduction in weight over a previous dual-mirror galvanometer-based scanner. Distortion-free imaging with no post-processing with a Gabor-domain optical coherence microscope (GD-OCM) with 2 μm axial and lateral resolutions over a field of view of 1 × 1 mm2 is demonstrated experimentally through volumetric images of a regular microscopic structure, an excised human cornea, and in vivo human skin.

Video-rate volumetric optical coherence tomography-based microangiography

Video-rate volumetric optical coherence tomography (vOCT) is relatively young in the field of OCT imaging but has great potential in biomedical applications. Due to the recent development of the MHz range swept laser sources, vOCT has started to gain attention in the community. Here, we report the first in vivo video-rate volumetric OCT-based microangiography (vOMAG) system by integrating an 18-kHz resonant microelectromechanical system (MEMS) mirror with a 1.6-MHz FDML swept source operating at ∼1.3 μm wavelength. Because the MEMS scanner can offer an effective B-frame rate of 36 kHz, we are able to engineer vOMAG with a video rate up to 25 Hz. This system was utilized for real-time volumetric in vivo visualization of cerebral microvasculature in mice. Moreover, we monitored the blood perfusion dynamics during stimulation within mouse ear in vivo. We also discussed this system’s limitations. Prospective MEMS-enabled OCT probes with a real-time volumetric functional imaging capability can have a significant impact on endoscopic imaging and image-guided surgery applications.

A novel technique for die-level post-processing of released optical MEMS

This work presents a novel die-level post-processing technique for dies including released movable structures. The procedure was applied to microelectromechanical systems (MEMS) chips that were fabricated in a commercial process, SOIMUMPs from MEMSCAP. It allows the performance of a clean DRIE etch of sidewalls on the diced chips enabling the optical testing of the pre-released MEMS mirrors through the chip edges. The etched patterns are defined by photolithography using photoresist spray coating. The photoresist thickness is tuned to create photoresist bridges over the pre-released gaps, protecting the released structures during subsequent wet processing steps. Then, the chips are subject to a sequence of wet and dry etching steps prior to dry photoresist removal in O2 plasma. Processed micromirrors were tested and found to rotate similarly to devices without processing, demonstrating that the post-processing procedure does not affect the mechanical performance of the devices significantly.

A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror

This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal microelectromechanical systems (MEMS) mirror and other optical components all integrated on a micromachined silicon optical bench with the footprint of 2 cm $\times \,\, 2$ cm. The linear optical path difference (OPD) scan range generated by the MEMS mirror reaches up to 450 $\mu \text{m}$ , and the tilting of the mirror plate is reduced down to $^{{\mathbf {-1}}}$ , or 1.1 nm at 532 nm, has been achieved. The overall size of the system is reduced dramatically and the performance is improved significantly compared with the prior work. [2015-0298]

Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes.

Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effect caused by the electrostatic force. This effect is reflected in our mathematical model used to simulate the dynamic response of the micro-mirror. The effects of increased forcing and decreased damping on the frequency response are investigated as the mirrors are mostly used in vacuum packages. The results can predict MEMS mirror behaviors in optical devices better than previously-reported models.

Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers

A microelectromechanical systems (MEMS) mirror with large vertical displacement has been developed for Fourier transform microspectrometers, but there exists a large tilting during the large-stroke scanning of the MEMS mirror, which greatly compromises the usable range. In this paper, a closed-loop control method has been established to minimize the tilting of the MEMS mirror. According to experimental results, the tilting motion of the mirror plate can be modeled as a fourth-order system. A feedback controller consisting of a phase-lag compensator, a low-pass filter and a notch filter utilized to stabilize the closed-loop tilt system. A gain scheduling approach is also used to compensate the bias-dependent loop gain and thereby provide more consistent tilting rejection over a wide scan range. Compared with the open-loop drive approach, the closed-loop system offers a stable scan operation with much faster dynamic response and improved overall robustness. The experiments show that the residual tilting is reduced to below ±0.0015° during the full range scan of the MEMS mirror. With this control method, the MEMS mirror achieved a stable scan range up to 356.4 $\mu \text{m}$ , so the measured spectral resolution reached 28 nm at 532 nm in a microspectrometer. The mirror tilting can be reduced dramatically by the proposed active control scheme, and thereby, the usable vertical scan range is increased significantly. [2016-0061]

Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror.

In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides of a central mirror plate. Experiments show that an actuation characteristics difference of as much as 4.0% exists among the four actuators due to process variations, which leads to an average angular scan error of 0.03°. A mathematical model between the actuator input voltage and the mirror-plate position has been developed to predict the actuation behavior of the mirror. It is a four-input, four-output model that takes into account the thermal-mechanical coupling and the differences among the four actuators; the vertical positions of the ends of the four actuators are also monitored. Based on this model, an open-loop control method is established to achieve accurate angular scanning. This model-based open loop control has been experimentally verified and is useful for the accurate control of the mirror. With this control method, the precise actuation of the mirror solely depends on the model prediction and does not need the real-time mirror position monitoring and feedback, greatly simplifying the MEMS control system.

A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 μm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is ±18° at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.

Beam-clipping-induced diffraction effects in MEMS laser scanners for autostereoscopic outdoor displays

In micro-electro-mechanical systems (MEMS) laser scanners, the beams reflected by the micromachined mirror may be truncated at various edges in the system, e.g., due to finite size of the reflective mirror surface, at the rigid supporting mirror frame, and at the package of the light source. In this paper the joint effect of such individual beam clipping is described by introducing a so-called effective system aperture. Diffraction effects induced by this virtual aperture are analyzed by means of Fourier optics incorporating the Fraunhofer far field approximation. The beam clipping theory is then applied to a laser light module with integrated MEMS mirror for autostereoscopic outdoor displays. Employing an optimization of the MEMS mirror tilting angle with respect to the laser light source, the beam-clipping-induced diffraction effects are minimized.