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Abstract
This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal microelectromechanical systems (MEMS) mirror and other optical components all integrated on a micromachined silicon optical bench with the footprint of 2 cm $\times \,\, 2$ cm. The linear optical path difference (OPD) scan range generated by the MEMS mirror reaches up to 450 $\mu \text{m}$ , and the tilting of the mirror plate is reduced down to $^{{\mathbf {-1}}}$ , or 1.1 nm at 532 nm, has been achieved. The overall size of the system is reduced dramatically and the performance is improved significantly compared with the prior work. [2015-0298]
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