Abstract
For the considered application of a Fourier Transform InfraRed (FTIR) spectrometer, a functional package and an inkjet-printed capacitive position sensor are built. The package is made of 3D-printed copper. The copper is then coated with insulator onto which inkjet-printed silver electrodes are subsequently applied. The whole structure builds up a capacitive position sensor. The target application is to measure the position of an electrostatically actuated Micro Electro Mechanical System (MEMS) mirror with nanometer accuracy at high bandwidths and large position offset. The MEMS mirror is part of a Michelson interferometer setup and driven at resonance. The large oscillation amplitude and high required resolution at resonance of the MEMS mirror are also the reason for high demands on the position measurement. Robustness against disturbing frequencies is assured by employment of a carrier-frequency read-out structure.
Highlights
Driven Micro Electro Mechanical System (MEMS) mirrors, oscillating at their mechanical resonance, are ideally suited for the application in interferometers: they enable faster measurements with high spectral resolutions
Transform Infrared (FTIR) spectrometer still makes high demands on system performance: Fast position tracking of the MEMS mirror is necessary to keep the measurement time low and to provide a sufficient Signal to Noise Ratio (SNR)
The sensor is mounted on a μm-stage, so that the position of the micromirror relative to the membrane is measurable in the μm range
Summary
Driven MEMS mirrors, oscillating at their mechanical resonance, are ideally suited for the application in interferometers: they enable faster measurements with high spectral resolutions (compare [1,2] for a more detailed system description). Transform Infrared (FTIR) spectrometer (setup shown in Figure 1) still makes high demands on system performance: Fast position tracking of the MEMS mirror is necessary to keep the measurement time low and to provide a sufficient Signal to Noise Ratio (SNR). Existing devices rely on optical position measurement [3,4]. A multilayer, inkjet-printed capacitive position sensor is built to ease the production of miniaturized devices. 3D-printing is subject to intense research efforts and in the offers high accuracy at moderate costs.
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