Abstract
Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame rate (HDHF) Lissajous scanning. The MEMS mirror comprised a low Q-factor inner mirror and frame mirror, which provided two-dimensional scanning at two similar resonant scanning frequencies with high mechanical stability. The low Q inner mirror enabled a broad frequency selection range. The high definition and high frame rate (HDHF) Lissajous scanning of the MEMS mirror was achieved by selecting a set of scanning frequencies near its resonance with a high greatest common divisor (GCD) and a high total lobe number. The MEMS mirror had resonant scanning frequencies at 5402 Hz and 6702 Hz in x and y directions, respectively. The selected pseudo-resonant frequencies of 5450 Hz and 6700 Hz for HDHF scanning provided 50 frames per second with 94% fill factor in 256 × 256 pixels. This Lissajous MEMS mirror could be utilized for assorted HDHF laser scanning imaging and display applications.
Highlights
Microscanners play a vital role in various low-power and compact scanning applications, including in display [1,2,3,4], sensing [5,6,7,8], and biomedical imaging [9,10,11,12,13,14,15,16]
Unlike raster scanning MEMS mirrors, Lissajous MEMS mirrors operate at high scanning frequencies in both axes and offer simple fabrication [3,23], high mechanical stability [17,24], and uniform scanning quality [21,25]
In MEMS mirrors, there is still a trade-off between the frame rate (FR) and the fill factor (FF) for high quality laser scanning. This trade-off relationship restricts the implementation of high definition and high frame rate (HDHF) Lissajous scanning
Summary
Microscanners play a vital role in various low-power and compact scanning applications, including in display [1,2,3,4], sensing [5,6,7,8], and biomedical imaging [9,10,11,12,13,14,15,16]. In MEMS mirrors, there is still a trade-off between the frame rate (FR) and the fill factor (FF) for high quality laser scanning. The frequency selection should satisfy a high GCD and high total lobe number results in HDHF
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