Micromirror Array Research Articles

Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays

This article presents the electrostatic actuation performance of micromirror arrays for intelligent active daylight control and energy management in green buildings using a capacitive–voltage (C-V) measurement technique. In order to understand how geometric hinge parameters, initial opening angles, and materials affect the overall efficiency and functionality of the system, micromirror arrays have been analyzed using C-V measurements considering (i) full and broken hinge structures, (ii) 90° and 130° initial tilt angles (Φ), and (iii) different material layer combinations. The measurement results indicate that both an increase in the Young’s modulus of the applied materials and increasing the initial tilt angles increase the threshold voltages during the closing process of the micromirrors.

Tip-Tilt-Decoupled Vertical Comb-Drive Micromirror Based on D-SOI Wafer and Interlayer TSV

Abstract Mechanical cross-axis coupling in biaxial scanning increases calibration workload and affects performance of tip-tilt (TT) micromirror. The integration of gimbal and inner-axis vertical comb-drive (VCD) actuator is a viable design for TT-decoupled micromirror. The key to developing such structure is guaranteeing integrated inner-axis VCD actuator insulated from the gimbal and electrically connected to the substrate while minimizing fabrication difficulty. For this purpose, this paper introduces double-silicon-on-insulator (D-SOI) wafer that has two mutually-insulated device layers into the development of TT-decoupled VCD micromirror. For both tip and tilt scanning modes, two vertical comb (VC) sets in each VCD actuator are arranged on different device layers of the D-SOI wafer. Gimbal, reflective mirror and springs are fabricated on the identical device layer of the D-SOI wafer, forming an integrated structure together with inner-axis VCD actuator. Besides, polysilicon-based interlayer through-silicon-vias (TSVs) and surface metal redistribution layers (RDLs) are employed to electrically connect all the driving signals to the wiring substrate. The D-SOI wafer is bonded to the wiring substrate using the thermocompression bonding processing before removing D-SOI handle layer and structure release. Based on the proposed structure and micromachining process, this paper fabricates 3×3 micromirror array (MMA), in which each pixel is 951×1096 μm2 in footprint and has fill factor of 50 %. Testing results of fabricated MMA exhibit a quasi-static mechanical tilt/tip angle of 1.266/1.436 ° at 35/35 volt, and RMS reflective mirror roughness of 5.323 nm.

Advancements in MEMS Micromirror and Microshutter Arrays for Light Transmission Through a Substrate.

This paper reviews and compares electrostatically actuated MEMS (micro-electro-mechanical system) arrays for light modulation and light steering in which transmission through the substrate is required. A comprehensive comparison of the technical achievements of micromirror arrays and microshutter arrays is provided. The main focus of this paper is MEMS micromirror arrays for smart glass in building windows and façades. This technology utilizes millions of miniaturized and actuatable micromirrors on transparent substrates, enabling use with transmissive substrates such as smart windows for personalized daylight steering, energy saving, and heat management in buildings. For the first time, subfield-addressable MEMS micromirror arrays with an area of nearly 1 m2 are presented. The recent advancements in MEMS smart glass technology for daylight steering are discussed, focusing on aspects like the switching speed, scalability, transmission, lifetime study, and reliability of micromirror arrays. Finally, simulations demonstrating the potential yearly energy savings for investments in MEMS smart glazing are presented, including a comparison to traditional automated external blind systems in a model office room with definite user interactions throughout the year. Additionally, this platform technology with planarized MEMS elements can be used for laser safety goggles to shield pilots, tram, and bus drivers as well as security personal from laser threats, and is also presented in this paper.

Double-layer-stacked Silicon Interposer for 2.5D Packaging of 32×32 Micromirror Array Chip

Double-layer-stacked Silicon Interposer for 2.5D Packaging of 32×32 Micromirror Array Chip

MEMS Smart Glass with Larger Angular Tuning Range and 2D Actuation.

Millions of electrostatically actuatable micromirror arrays have been arranged in between windowpanes in inert gas environments, enabling active daylighting in buildings for illumination and climatization. MEMS smart windows can reduce energy consumption significantly. However, to allow personalized light steering for arbitrary user positions with high flexibility, two main limitations must be overcome: first, limited tuning angle spans by MEMS pull-in effects; and second, the lack of a second orthogonal tuning angle, which is highly required. Firstly, design improvements of electrostatically actuatable micromirror arrays are reported by utilizing tailored bottom electrode structures for enlarging the tilt angle (Φ). Considerably larger tuning ranges are presented, significantly improving daylight steering into buildings. Secondly, 2D actuation means free movement of micromirrors via two angles-tilt (Φ) and torsion angle (θ)-while applying two corresponding voltages between the metallic micromirrors and corresponding FTO (fluorine-doped tin oxide) counters bottom electrode pads. In addition, a solution for a notorious problem in MEMS actuation is presented. Micromirror design modifications are necessary to eliminate possible crack formation on metallic structure due to stress concentration during the free movement of 2D actuatable micromirror arrays. The concept, design of micromirror arrays and bottom electrodes, as well as technological fabrication and experimental results are presented and discussed.

Optomagnetic Micromirror Arrays for Mapping Large Area Stiffness Distributions of Biomimetic Materials.

A new device termed "Optomagnetic Micromirror Arrays" (OMA) is demonstrated capable of mapping the stiffness distribution of biomimetic materials across a 5.1 mm × 7.2 mm field of view with cellular resolution. The OMA device comprises an array of 50000 magnetic micromirrors with optical grating structures embedded beneath an elastic PDMS film, with biomimetic materials affixed on top. Illumination of a broadband white light beam onto these micromirrors results in the reflection of microscale rainbow light rays on each micromirror. When a magnetic field is applied, it causes each micromirror to tilt differently depending on the local stiffness of the biomimetic materials. Through imaging these micromirrors with low N.A. optics, a specific narrow band of reflection light rays from each micromirror is captured. Changing a micromirror's tilt angle also alters the color spectrum it reflects back to the imaging system and the color of the micromirror image it represents. As a result, OMA can infer the local stiffness of the biomimetic materials through the color change detected on each micromirror. OMA offers the potential for high-throughput stiffness mapping at the tissue-level while maintaining spatial resolution at the cellular level.

Fast and light-efficient wavefront shaping with a MEMS phase-only light modulator

Over the last two decades, spatial light modulators (SLMs) have revolutionized our ability to shape optical fields. They grant independent dynamic control over thousands of degrees-of-freedom within a single light beam. In this work we test a new type of SLM, known as a phase-only light modulator (PLM), that blends the high efficiency of liquid crystal SLMs with the fast switching rates of binary digital micro-mirror devices (DMDs). A PLM has a 2D mega-pixel array of micro-mirrors. The vertical height of each micro-mirror can be independently adjusted with 4-bit precision. Here we provide a concise tutorial on the operation and calibration of a PLM. We demonstrate arbitrary pattern projection, aberration correction, and control of light transport through complex media. We show high-speed wavefront shaping through a multimode optical fiber – scanning over 2000 points at 1.44 kHz. We make available our custom high-speed PLM control software library developed in C++. As PLMs are based upon micro-electromechanical system (MEMS) technology, they are polarization agnostic, and possess fundamental switching rate limitations equivalent to that of DMDs – with operation at up to 10 kHz anticipated in the near future. We expect PLMs will find high-speed light shaping applications across a range of fields including adaptive optics, microscopy, optogenetics and quantum optics.

Considerations for a Micromirror Array Optimized for Compressive Sensing (VIS to MIR) in Space Applications.

Earth observation (EO) is crucial for addressing environmental and societal challenges, but it struggles with revisit times and spatial resolution. The EU-funded SURPRISE project aims to improve EO capabilities by studying space instrumentation using compressive sensing (CS) implemented through spatial light modulators (SLMs) based on micromirror arrays (MMAs) to improve the ground sampling distance. In the SURPRISE project, we studied the development of an MMA that meets the requirements of a CS-based geostationary instrument working in the visible (VIS) and mid-infrared (MIR) spectral ranges. This paper describes the optical simulation procedure and the results obtained for analyzing the performance of such an MMA with the goal of identifying a mirror design that would allow the device to meet the optical requirements of this specific application.

HaptoFloater: Visuo-Haptic Augmented Reality by Embedding Imperceptible Color Vibration Signals for Tactile Display Control in a Mid-Air Image.

We propose HaptoFloater, a low-latency mid-air visuo-haptic augmented reality (VHAR) system that utilizes imperceptible color vibrations. When adding tactile stimuli to the visual information of a mid-air image, the user should not perceive the latency between the tactile and visual information. However, conventional tactile presentation methods for mid-air images, based on camera-detected fingertip positioning, introduce latency due to image processing and communication. To mitigate this latency, we use a color vibration technique; humans cannot perceive the vibration when the display alternates between two different color stimuli at a frequency of 25 Hz or higher. In our system, we embed this imperceptible color vibration into the mid-air image formed by a micromirror array plate, and a photodiode on the fingertip device directly detects this color vibration to provide tactile stimulation. Thus, our system allows for the tactile perception of multiple patterns on a mid-air image in 59.5 ms. In addition, we evaluate the visual-haptic delay tolerance on a mid-air display using our VHAR system and a tactile actuator with a single pattern and faster response time. The results of our user study indicate a visual-haptic delay tolerance of 110.6 ms, which is considerably larger than the latency associated with systems using multiple tactile patterns.

Single-step beam intensity and profile optimization using a 256 × 256 micromirror array and reinforcement learning.

Many optical applications require accurate control over a beam's spatial intensity profile, in particular, achieving uniform irradiance across a target area can be critically important for nonlinear optical processes such as laser machining. This paper introduces a novel control algorithm for Digital Micromirror Devices (DMDs) that simultaneously and adaptively modulates both the intensity and the spatial intensity profile of an incident beam with random and intricate intensity variations in a single step. The algorithm treats each micromirror within the DMD as an independent Bernoulli distribution characterized by a learnable parameter. By integrating reinforcement learning with fully convolutional neural networks, we demonstrate that the control of 65,536 (256 × 256) micromirrors in a DMD can be achieved with modest computational expense. Furthermore, we implement the Error Diffusion (ED) algorithm as a sampling method and show that an incident beam with random and intricate intensity variations can be modulated to a predefined shape with high uniformity in intensity, both in simulated and experimental environments.

Binary amplitude holograms for shaping complex light fields with digital micromirror devices

Abstract Digital micromirror devices are a popular type of spatial light modulators for wavefront shaping applications. While they offer several advantages when compared to liquid crystal modulators, such as polarization insensitivity and rapid-switching, they only provide a binary amplitude modulation. Despite this restriction, it is possible to use binary holograms to modulate both the amplitude and phase of the incoming light, thus allowing the creation of complex light fields. Here, a didactic exploration of various types of binary holograms is presented. A particular emphasis is placed on the fact that the finite number of pixels coupled with the binary modulation limits the number of complex values that can be encoded into the holograms. This entails an inevitable trade-off between the number of complex values that can be modulated with the hologram and the number of independent degrees of freedom available to shape light, both of which impact the quality of the shaped field. Nonetheless, it is shown that by appropriately choosing the type of hologram and its parameters, it is possible to find a suitable compromise that allows shaping a wide range of complex fields with high accuracy. In particular, it is shown that choosing the appropriate alignment between the hologram and the micromirror array allows for maximizing the number of complex values. Likewise, the implications of the type of hologram and its parameters on the diffraction efficiency are also considered.

High efficiency regulation method to generate an illumination source by adopting the micromirror array in DUV lithography

Source and mask optimization (SMO) is an important lithography resolution enhancement technique for 22 nm technology nodes and beyond in lithography. This technique generates freeform sources by adjusting the inclination angle of the micromirror array (MMA). In this paper, a high efficiency regulation method to generate an illumination source by adopting the micromirror array in DUV lithography is proposed. The number and inclination angles of micromirrors required for adjustment to convert the initial source into any illumination source are quickly and accurately obtained by using the proposed method. The illumination source is obtained on the pupil plane by adjusting the inclination angles of some micromirrors. The simulation results show that the initial source is converted into another illumination source with different complexities by adjusting some micromirrors. Compared with the traditional MMA allocation method, when the initial source is the freeform source, the regulation efficiency of micromirrors has been improved by at least 20%. The method reduces the regulation time of micromirrors and the number of micromirrors required for adjustment. Moreover, the number of micromirrors required for adjustment is positively correlated with the coherence coefficient. The results illustrate that this method is effective and has significant engineering implications.

A novel quasi-static MEMS piezoelectric micromirror array with a high fill factor and three degrees of freedom

This paper presents the design of a novel 3×3 piezoelectric micromirror array (PMMA) with an 84.6 % fill factor and describes a three-dimensional hidden fabrication platform. The fabricated device operates with quasi-static mode in 3-degree-of-freedom, namely tip, tilt, and piston. In order to achieve a high fill factor, a three-dimensional hidden micromirror array structure is introduced, and is realized through multi-layer bonding. In addition, a double-stop-layer’s glass cover for optical device was employed to realize transparent wafer-level packaging. The device testing result achieves a mechanical tilting angle of 4.4 mrad at 82.5 VDC with over 99.5 % linearity. This design has the potential to achieve a larger size of micromirror arrays.

Extended depth-of-field wide-field fluorescence microscopy with a micro-mirror array lens system for versatile cellular examination.

We present a versatile extended depth-of-field (EDOF) wide-field fluorescence microscopy using a new, to the best of our knowledge, active device, micro-mirror array lens system (MALS) for calibration-free and orientation-insensitive EDOF imaging. The MALS changed the focal plane during image acquisition, and the system could be operated in any orientation. Two EDOF imaging modes of high-speed accumulation and low-speed surface sectioning were implemented. The performance was demonstrated in non-contact imaging of conjunctival goblet cells in live mice and depth-resolved cellular examination of ex-vivo human cancer specimens. MALS-based EDOF microscopy has potential for versatile cellular examination.

Omnidirectional mid-air image system using micro-mirror array plates

We proposed and implemented an omnidirectional mid-air image optical system that suppresses stray light and transmitted light. When micro-mirror array plates (MMAP) are integrated with view control films and rotated these optical elements at high speed, stray and transmitted light are effectively suppressed. This enables the visibility of omnidirectional mid-air image. We evaluated the effects of the view control film and high-speed rotation on the luminance and resolution of mid-air images, respectively. Our system facilitates the simultaneous viewing of mid-air images by multiple users, expanding the accessibility of mid-air image content to a large audience.

A new fabrication method for enhancing the yield of linear micromirror arrays assisted by temporary anchors

As one of the most common spatial light modulators, linear micromirror arrays (MMAs) based on microelectromechanical system (MEMS) processes are currently utilized in many fields. However, two crucial challenges exist in the fabrication of such devices: the adhesion of silicon microstructures caused by anodic bonding and the destruction of the suspended silicon film due to residual stress. To solve these issues, an innovative processing method assisted by temporary anchors is presented. This approach effectively reduces the span of silicon microstructures and improves the Euler buckling limit of the silicon film. Importantly, these temporary anchors are strategically placed within the primary etching areas, enabling easy removal without additional processing steps. As a result, we successfully achieved wafer-level, high-yield manufacturing of linear MMAs with a filling factor as high as 95.1%. Demonstrating superior capabilities to those of original MMAs, our enhanced version boasts a total of 60 linear micromirror elements, each featuring a length-to-width ratio of 52.6, and the entire optical aperture measures 5 mm × 6 mm. The linear MMA exhibits an optical deflection angle of 20.4° at 110 Vdc while maintaining exceptional deflection flatness and uniformity. This study offers a viable approach for the design and fabrication of thin-film MEMS devices with high yields, and the proposed MMA is promising as a replacement for digital micromirror devices (DMDs, by TI Corp.) in fields such as spectral imaging and optical communication.

Micromirror Array with Adjustable Reflection Characteristics Based on Different Microstructures and Its Application.

The conventional reflective optical surface with adjustable reflection characteristics requires a complex external power source. The complicated structure and preparation process of the power system leads to the limited modulation of the reflective properties and difficulty of use in large-scale applications. Inspired by the biological compound eye, different microstructures are utilized to modulate the optical performance. Convex aspheric micromirror arrays (MMAs) can increase the luminance gain while expanding the field of view, with a luminance gain wide angle > 90° and a field-of-view wide angle close to 180°, which has the reflective characteristics of a large gain wide angle and a large field-of-view wide angle. Concave aspheric micromirror arrays can increase the luminance gain by a relatively large amount of up to 2.66, which has the reflective characteristics of high gain. Industrial-level production and practical applications in the projection display segment were carried out. The results confirmed that convex MMAs are able to realize luminance gain over a wide spectrum and a wide range of angles, and concave MMAs are able to substantially enhance luminance gain, which may provide new opportunities in developing advanced reflective optical surfaces.

Fabrication of High‐Density Micro‐Bump Arrays for 3D Integration of MEMS and CMOS

Cu‐Sn transient‐liquid‐phase bonding has a limit in achieving small diameter/high‐density bumps due to the extrusion of the melted Sn layer during bonding. This paper report a new method that can fabricate small diameter Cu‐Sn bumps with 5 μm diameter and 25 μm pitch based on a new thermal reflow and pre‐bonding method that enables solid‐state Cu‐Sn reaction for avoiding Sn extrusion. Using the new method, 3D integration of a 640 × 480 MEMS array on a CMOS circuit chip has been demonstrated. This method can be used in 3D integration of MEMS arrays and CMOS circuits such as micromirror arrays. © 2024 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.

State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various applications. In particular, this review is intended to draw attention to the fact that MEMS micro-mirrors can be successful in many other material systems besides silicon. In particular, the review is intended to draw attention to two material systems that have so far been used less for MEMS micromirror arrays, that have been less researched, and of which fewer applications have been reported to date: metallic heterostructures and 2D materials. However, the main focus is on metallic MEMS micromirror arrays on glass substrates for applications like personalized light steering in buildings via active windows, energy management, active laser safety goggles, interference microscopy, and endoscopy. Finally, the different micromirror arrays are compared with respect to fabrication challenges, switching speed, number of mirrors, mirror dimensions, array sizes, miniaturization potential for individual mirrors, reliability, lifetime, and hinge methodology.

Spatial Mode Division Multiplexing of Free-Space Optical Communications Using a Pair of Multiplane Light Converters and a Micromirror Array for Turbulence Emulation

Multi-plane light converters (MPLC) are a means of deconstructing a wavefront into constituent modes that are focused at specific spatial locations, and the reverse—that specific inputs result in controlled modal output. We have used a pair of MPLCs with 21 Hermite–Gaussian modes to represent a free-space optical connection. The effects of strong atmospheric turbulence (Cn2 = 10−13 m−2/3) are emulated using a micromirror array producing a time sequence of aberrating frames. The modal crosstalk between transmitter and receiver modes induced by the turbulence is presented by measuring the intensity in receiver channels for the same turbulence. Six receiver modes are used for optical communication channels with a rate of 137 Gbits/s displaying the benefits of single input multiple output (SIMO) operation for overcoming the deleterious effects of turbulence.