In latest years, TENGs are used in a wide range of fields. However, the low output performance of TENGs prevents them from continuously supplying power to devices, which motivates us to reduce this limitation. Currently, several studies have been conducted to improve the output performance of TENG by increasing the specific surface area of friction materials through plasma treatment, photolithography, and other methods. Yet the common methods are too cumbersome and expensive. In this work, we proposed a triboelectric nanogenerator with micro-grid patterned PDMS(X-TENG) using a metal woven test sieve as a mold and a modified thermal embossing technique, which is low-cost, easy-to-make, mass-produced. The micro-grid pattern is roughly square and the side lengths d of the pattern is 5000 μm, 500 μm, 50 μm, and 5 μm, respectively. As d gradually decreases, the specific surface area SS increases, the charge density on the surface (σ) increases, moreover, the performance is improved. When d is 5 μm, X-TENG has the optimal capability with 1.5 times the short-circuit current and 2.3 times the open-circuit voltage of a TENG composed of smooth PDMS film (S-TENG). In addition, X-TENG serves as a self-powered sensing to monitor human health for application. X-TENG also acts as a self-powered control device, which implements the state change of the Linux-based Raspberry Pi 4B pressurized music player. Hence, the X-TENG holds great promise for intelligent sensing and self-powered supply.
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