The influence of O 2 concentration on metal–insulator transition (MIT) of vanadium oxide (VO x ) thin films was studied in terms of structural and electrical properties. The VO x films were prepared by varying O 2 concentration using reactive radio frequency magnetron sputtering with a vanadium target. As the O 2 concentration in O 2/Ar gas increased from 1% to 7%, the deposition rate of VO x films abruptly decreased and the crystalline phases of the films were transformed from V 2O 3 to V 2O 5. The VO x films deposited at 2% O 2 mainly consisted of the VO 2 phase and showed better crystallinity than those deposited at other O 2 concentrations. From the current–voltage measurements of Pt/VO x /Pt capacitors, the VO x films deposited at 2% O 2 showed excellent MIT properties which can be applied to memory devices.
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