With developments of micro-machining and advanced functional materials, smart actuators have been developed and applied in various micro underwater vehicles (MUVs) or micro underwater robots. Since there is a tradeoff between the miniature size and output performance for MUVs driven by traditional electromagnetic motors, piezoelectric motors with features of compact structure, large force or torque at small size and no electromagnetic interference provide another promising alternative for actuating MUVs. However, there is a few research to explore the possibility of utilizing piezoelectric motors to realize underwater actuations. In this paper, a novel piezoelectric inertial rotary motor is designed to power the underwater vehicle, which is capable of forward swimming, rotating, rising and diving. This motor consists of two rotors and one disk type stator. One piece of piezoelectric wafer adhered to the bottom face of the stator’s metal disk is used to excite the radial in-plane vibration mode of stator’s outer ring, which is converted into the revolved motion of the inner tube through the connection beams. To utilize the inertial driving mechanism, the motor works at a “slip-slip” mode by the saw-tooth type driving signal. One prototype motor with the appearance size of Φ 20 mm × 20 mm and weight of 3.6 g is designed, fabricated and characterized. Experimental results show that the prototype motor could rotate at a steady speed of 2200 r/min with 150 Vp-p driving voltage. In addition, the motor also performs well with a slightly decrease of operating speed in underwater environments when the silver electrode is coated by waterproof material. Consequently, sealing ring is not necessary for the proposed motor as immersed in water, which is different with conventional electromagnetic motors and enables the actuation unit to be smaller. And then, the prototype motor is coupled with a propeller to build a thruster, which could output the steady speed and maximum propulsion force of 1200 r/min and 4.6 mN, respectively. Finally, the thruster is installed in a spherical swimming robot, and the velocity of the robot could reach 80 mm/s. With merits of simple structure, compact size and great waterproof feasibility, the proposed piezoelectric inertial motor opens a new avenue for developing advanced and flexible MUVs.
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