MEMS Technology Research Articles

Analysis TPACK framework in ISLE-based STEM approach model: case study

TPACK is a framework that integrates technological knowledge, pedagogical knowledge, and content knowledge in a learning context. This article discusses the analysis of the TPACK framework in the application of the ISLE-based STEM approach for the case of mass-spring oscillations. The successful application of the ISLE-based STEM approach model in learning activities must start from increasing the TPACK ability. However, TPACK and ISLE-based STEM information are currently still limited, so it is necessary to conduct a study to analyze the TPACK relationship through the development of ISLE-based STEM learning instruments. This research was conducted based on the development of learning media, namely a prototype of spring vibrations using MEMS and IoT technology as well as student worksheets designed with an ISLE-based STEM approach model by the STEM Research Center of Universitas Syiah Kuala. The analysis results show that the application of TPACK through the ISLE-based STEM model approach requires a complex process. This information is a step in the development and assessment of ISLE-based STEM learning media on the TPACK framework to strengthen 21st-century skills.

Miniaturized Half-Mode T-Septum SIW Bandpass Filter With an Ultrawide Stopband

In this letter, novel miniaturized bandpass filters with wide stopband performance are proposed on the basis of the half-mode T-septum substrate integrated waveguide (HMTSSIW) resonator. The resonant TE <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n00</sub> and TE <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n0m</sub> modes of the HMTSSIW resonator are analyzed precisely using the Ritz-Galerkin method, and their resonant frequencies can be controlled flexibly by adjusting the sizes of resonator. A three-order HMTSSIW filter is fabricated using MEMS technology on the benzocyclobutene dielectric. Simulated and measured results show the advantages of compact size and wide stopband. Then, an electric coupling structure is introduced, which allows the further suppression of the spurious TE <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">300</sub> mode by the controllable mixed coupling. Finally, a miniaturized HMTSSIW filter with 20-dB suppression beyond 10.37f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0</sub> is simulated and measured.

Fabrication and characterization of a miniaturized octupole deflection system for the MEMS electron microscope

This article describes a miniature electron beam scanning system based on an octupole electrode as the key stage of the implementation of the MEMS electron microscope. The scanning system consists of a silicon electrode with a central hole, containing 8 properly powered elements and a special electronic system controlling voltage. Octupole electrode was made using MEMS technology. First, it was examined using computer simulations, and then the operation of the octupole system was tested using a reference electron beam in the SEM JEOL microscope. The scanning system parameters depend on the electron beam energy, distance between the octupole and the sample, and the applied voltage. It is possible either to obtain an octupole scanning system resolution of 27 nm (for electron beam energy E = 4 keV and octupole observation plane distance H = 1 mm) or a large scanning area up to 2.7 mm (E = 4 keV, H = 20 mm), without any significant distortion of the sample image. Subsequently, the first model of the MEMS electron microscope microcolumn was assembled, containing the field-emission cathode, an extraction electrode, a focusing electrode, an octupole electrode, and an anode. The first images of the observed hexagonal metal grid placed on the silicon anode were recorded inside a reference high vacuum chamber.

Miniaturized antenna design for communication establishment of peer-to-peer communication in the oil pipelines

In the oil pipeline world, wireless automation plays an important role through integrated electronic technology in antenna design for robust performance. The technology gets evaluated by its power consumption and compactness to afford a better solution to real-world problems with better sophistication to adopt a modernized wireless world. Among that, the IoT (Internet of Things) technology plays a predominant role by combining with Artificial Intelligence to optimize and revolute the characterization of data communication. When the data communication is initiated, the main contributor to the transmission is the miniaturized antenna holding different types in its structure and processing. It acquires the required radio spectrum channel with the advanced multi coding modulating technique by utilizing token ring mesh topology for the data transfer with acquired data channels. This chapter describes the design and fabrication of a miniaturized antenna using MEMS technology (Micro-Electro-Mechanical System) and its different types using INTELLISUITE software to get suited for better communication in oil pipelines. Based on the application, it also enumerates the choices of micro or nanoantennas with its specification upholding data adopting techniques with modulation schemes to support IoT applications.

Application of Fractal Geometry in Gas Sensor: A Review

Increasing the specific superficial area of gas sensing layer is a direction to improve the performance of sensors. Considering the special features, high specific superficial area of fractal geometry and the fractal properties of thin film in the deposition and growth progress, many studies have explored the relationship between fractal geometry and gas sensing characteristics of the sensors. In this paper, the application and development of fractal geometry in gas sensors are reviewed, the superiority of fractal geometry in the application of gas sensors, as well as the formation mechanism and influencing factors of fractal geometry are indicated. The advantages of fractal analysis in the characterization of film morphology and properties are also discussed. This review demonstrates that fractal geometry can be successfully used in the design of macro and micro structure of gas sensors to improve the performance of sensors. Films with appropriate fractal structure and best gas sensing performance can be obtained by controlling the deposition and parameters. 3D printing and MEMS technologies provide an implementation scheme to prepare sensors with fractal structure, such as electrodes and heater based on Hilbert curve and substrates based on Menger sponge.

Design and Analysis of a Non-Uniform Meander RF MEMS Switch

This paper aimed to design and analysis of non-uniform meander capacitive shunt RF MEMS switch. The less pull in voltage is obtained in flexure type membrane by proposed RF MEMS Switch. The selection of materials for the beam and dielectric layer is expressed in this paper and also shown the performance depends on materials utilized for the design. The high isolation of -31.15dB actuating at the pull-in voltage of 7.69V with a spring constant of 3.28N/m produced the switch and is obtained by the optimization process. Capacitive contact switches have capability of power handling. The actuated switch state provides an excellent isolation. It shorts the ground by RF signal. MEMS technology is the integration of electrical and mechanical components on single platform i.e. substrate [10]. From the literature, various researchers have proposed different RF MEMS Switch, but still there few challenges on optimization of the Switch for best performance. The electromechanical analysis such as Upstate, Downstate capacitances and stress analysis have been carried out. The performance of the switch is analyzed by taking appropriate materials selected by Ashby’s approach. These optimized dimensions are feasible to fabricate. The substrate height, material for the substrate and coplanar waveguides are used for the impendence matching. For obtaining the less pull in voltage overlapping area is to be increased.

Optimization of MEMS Vibration Energy Harvester With Perforated Electrode

In this paper, electret based vibration energy harvesters are designed and fabricated with perforated electrode based on MEMS technology. Through-holes are distributed onthe fixed electrode in the device to optimize the energy harvesting process. The effect of the holes on the output power of the device are analyzed and discussed both in the finite element method (FEM) simulation and the experiments. It can be noticed that the through-holes can effectively lower the squeeze-film air damping force on the moveable proof mass at the atmosphere. Therefore, the energy loss due to the air damping could be reduced, and the output power of the device increases. Theeffects of the hole diameter and numbers on the output power of our device are also investigated in detail. By optimizing the configuration of the holes, the perforated device with the hole diameter of 400μm and depth of 100μm exhibits the highest power output at the low acceleration of 1.84 m/s <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ,which proves promising application for self-powered electronics in the future.

Design, simulation and analysis of micro electro-mechanical system microneedle for micropump in drug delivery systems.

This article reports on the mechanical strength analysis and flow characteristics of square tip and circular tip microneedles by employing highly potent drugs that are given in extremely little quantity (microlitres) using MEMS technology, which proves to be a significant component of micropump in the application of Bio‐MEMS. These microneedles are well suitable for a MEMS‐based micropump in the drug delivery systems. It is an essential part of the micropump through which the drug is released into the patient’s body. The proposed microneedles can withstand a stress of 23 MPa and 20 KPa. An extensive investigation on selection of material for the microneedle is carried out to meet the requirements of the biocompatibility and high yield, as well as tensile strength. As mighty drugs such as vasopressin, atropine and digoxin are administered in large quantities, the microneedle is designed so as to deliver 800 µl of drug, with each microneedle delivering 90 µl. in a 3 3 array. 3 × 3 array releasing 90 µl.

Sensitive label-free immunoglobulin G detection using a MEMS quartz crystal microbalance biosensor with a 125 MHz wireless quartz resonator

We present a wireless quartz crystal microbalance (QCM) biosensor fabricated using MEMS technology. The MEMS QCM biosensor contains a 125 MHz AT-cut quartz resonator embedded in the microchannel. Because of the compact design, the MEMS QCM biosensor is suitable for mass production and device miniaturization. We performed immunoglobulin G (IgG) detection measurements with different concentrations of IgG. The detection limit was 1 ng ml–1 or less, which is superior to that of the gold-standard surface plasma resonance method. Furthermore, we studied the binding affinity between protein A and IgG by studying the frequency response of the QCM biosensor. We found good agreement with reported values. Therefore, the presented MEMS QCM biosensor has the advantages of compactness, low cost, low power consumption, high sensitivity, and reliability.

Investigation of a new method for sound generation \u2013 Advanced Digital Sound Reconstruction

The current loudspeaker market has a high demand for portable audio devices. Hence, the miniaturization of loudspeakers (microspeakers) is of great importance for manufacturers. Traditional loudspeakers – for example the electrodynamic loudspeaker – are the forerunners, but so-called MEMS loudspeakers (Micro-Electro-Mechanical-System) have emerged recently. MEMS devices have already been used for sensors (i.e., microphones) to a great extend due to their advantages regarding form factor and production efficiency. Albeit additional challenges for actuators like moving enough air with a microstructure – as it is the case for a loudspeaker – the usage of MEMS technology for loudspeakers is very attractive.Since especially low-frequency audio signals often pose problems for microspeakers, this article focuses on a new sound generation technique called Advanced Digital Sound Reconstruction (ADSR) which is especially well-suited for low-frequency audio signals since ADSR can generate more volume displacement relative to its size. Based on a general description of the principle, an outlook of the possibilities regarding achievable sound pressure compared to the classical excitation scheme is derived. Furthermore, measurements are presented, which aim to prove the concept of ADSR based on already existing actuators.

Design and implementation for the PWM closed-loop feedback interface circuit of a sandwich capacitive accelerometer based on ARM

Owing to the advantages of small size and high integration that accelerometers made by MEMS technology, the Pulse Width Modulation (PWM) closed-loop feedback interface circuit of a sandwich capacitive accelerometer based on ARM is designed. Based on the design, a simulation by SIMULINK and a PCB board-level circuit are conducted. Simulation and measurement are provided to support the design. The realization of Proportion Integral Differential (PID) control algorithm and the generation of PWM are performed by STM32 microcontroller instead of the circuit in the design. The output form of the interface circuit is PWM with different duty cycle and filtered DC voltage. According to the measurement results, the output of the PWM duty cycle change is 16.9%/g, and the sensitivity is 1.045 V/g.

IOP Preface

The Micromechanics and Microsystems Europe Workshop has been a well-established event in the area of micromachining, microengineering and microtechnology. The goals of the MME workshop are stimulation and improvement of the technical knowledge as well as the establishment of cooperation and friendship between delegates. The accent has always been on enabling mutual discussions around poster presentations rather than on formal oral presentations with a small number of world-leading talks from experts to review key research topics, focusing on both the latest results and background concepts. The areas of interest span over all aspects of MEMS and Microsystems Technology, including design and fabrication, modelling and simulation, experimental evaluation and commercial use.MME 2019 was held at Wolfson College, University of Oxford.We had four extraordinary talks, including a keynote from Professor Michael Dickey (North Carolina State University) on Liquid Metals for Microsystems. Equally interesting were the 25 flash presentations and subsequent discussions around the posters. Our 2-day meeting in the relaxed surroundings of Wolfson College provided ample room for the intense exchange of thoughts and opinions. In particular they provided PhD students and young researchers from different countries a great deal of new inspiration and impetus to their early scientific career. It was also beneficial to senior researchers as they gained new insights through the eyes of early career researchers in emerging areas such as micromechanics, micromachining, microfabrication, and microsystems.15 early career researchers also participated in the paper review session led by Professor Leon Abelmann. Our conference dinner was accompanied by a live violin concert – music never fails to get the creative juices flowing!I thank the steering committee for enabling us to host this workshop at Oxford and look forward to this innovative conference in the years to come.Harish BhaskaranDepartment of MaterialsUniversity of OxfordUnited KingdomList of titles Conference Chair, Local Organisation, Program Committee, Steering Committee are available in this pdf.

Simulation of platform-free inertial navigation system of unmanned aerial vehicles based on neural network algorithms

The object of research is the process of controlling the trajectory of unmanned aerial vehicles (UAVs) in autonomous flight mode based on neural network algorithms. The study is based on the application of numerical-analytical approach to the selection of modern technical solutions for the construction of standard models of platformless inertial navigation systems (BINS) for micro and small UAVs, followed by support for assumptions. The results of simulation in the Matlab environment allowed to simulate the operation of the UAV control system based on MEMS technology (using microelectromechanical systems) and Arduino microcomputers. It was also possible to experimentally determine the nature of the influence of the structure of the selected neural network on the process of formation of navigation data during the disappearance of the GPS signal. Thus, to evaluate the effectiveness of the proposed solutions for the construction of BINS, a comparative analysis of the application of two algorithms ELM (Extreme Learning Machine)-Kalman and WANN (Wavelet Artificial Neural Network)-RNN (Recurrent Neural Network)-Madgwick in the form of two experiments. The purpose of the experiments was to determine: the study of the influence of the number of neurons of the latent level of the neural network on the accuracy of approximation of navigation data; determining the speed of the process of adaptive learning of neural network algorithms BINS UAV. The results of the experiments showed that the application of the algorithm based on ELM-Kalman provides better accuracy of learning the BINS neural network compared to the WANN-RNN-Madgwick algorithm. However, it should be noted that the accuracy of learning improved with the number of neurons in the structure of the latent level &lt;500, which iincreases computational complexity and increases the learning process time. This can complicate the practical implementation using micro- and small UAV equipment. In addition, thanks to the simulation, the result of the study of the application of the proposed neural network algorithms to replace the input data instead of GPS signals to the input BINS, allowed to estimate the positioning error during the disappearance of GPS signals. Also, the application of the WANN-RNN-Madgwick algorithm allows to approximate and extrapolate the input signals of navigation parameters in a dynamic environment, while the process of adaptive learning in real time.

Study on the vibration performances for a high temperature fiber F-P accelerometer

In order to meet the vibration detection needs in high temperature environments such as aerospace, nuclear power, high temperature casting, etc., a fiber F-P accelerometer is investigated. This paper studies the vibration characteristics of a fiber-optic F-P high temperature sensor based on MEMS technology. It introduces the sensor mechanism, simulation, design and manufacturing process, and on this basis, deeply studies the vibration characteristics of the sensor in different directions. The sensitive part of the detection probe, essentially composed of a single-mode fiber and an SiC element sensitive to vibrations, constitutes the F-P resonant cavity. The thermal properties of all elements of the probe made it possible to detect vibrations in the probe main and lateral axis in the temperature range of 27 °C to 800 °C. In the main measurement axis of the probe, experimental results show that the sensor can detect vibration signals with high accuracy. It has a sensitivity of about 370 mV/g in the flat range of 100 to 1000 Hz and its natural frequency is about 3750 Hz. The sensor has frequency repeatability errors of less than 0.5%, and excellent linearity of about 1 between input and output frequencies. Arranged on its lateral axis, the probe shows a working frequency range of 100 to 700 Hz and its resonance frequency is approximately 1450 Hz. In the lateral axis, it reproduces all input frequencies with a linearity of 1 and at an amplitude of 11% of that of the main axis. The field application shows that the relative error on the frequency measurements is less than 4% in both axes, and the absolute error less than 5 Hz according to the technical index of the test site. To obtain this stability and good precision in the two measurement axes, the method of automatic and rapid tracking of the Q-point was used as demodulation algorithm.

Improvement of RF MEMS devices by spring constant scaling laws

The technology for radio frequency micro-electro-mechanical system (RF MEMS) is well established. In the next phase of miniaturization, RF MEMS transforming into RF nano-electro-mechanical system (NEMS) requires scaling laws. For MEMS devices, vertical scaling laws are available in the literature. However, existing scaling laws are isotropic and not valid for the majority of the MEMS devices. Like VLSI technology, the scaling in the MEMS is asymmetric and needs optimization in each direction. In the MEMS, depending upon the working principle, the scaling laws vary from device to device. In the present work, spring constant scaling laws for the electrostatic RF MEMS devices are derived given the device performance. The scaling laws are derived in such a way that existing limitations of the MEMS technology like low switching speed, high pull-in voltage, stiction, etc., are minimized and the response of the switch is improved.

Optimization of Nano Capacitive Pressure Sensor for Medical Applications

Nano/NEMS sensors have emerged from MEMS technology. Nano sensors have got lot of applications in medical and health care applications. Nano sensors have lot of attributes which make them very unique and special, such as: small size, low mass, high sensitivity and low cost of production. In this paper we present optimization of nano capacitive pressure sensor dimensions for medical applications. Capacitive pressure sensors are well suited for low pressure sensing applications. Typically, in medical field involve low pressure levels ranging from few Pascals to kilo Pascals. DoE is used for the optimization of sensor dimensions. The sensor is optimized to operate over the pressure range up to 100 kPa. Over this pressure range the sensor dimensions are optimized to get better response in terms of capacitance. The proposed optimization illustrates the dimensions best suited for the design of nano capacitive pressure sensor for operational range up to 100 kPa.

Enabling Batteryless Wearable Devices by Transferring Power Through The Human Body

Over the past few decades, we have witnessed tremendous advancements in semiconductor and MEMS technologies, leading to the proliferation of ultra-miniaturized and ultra-low-power (in micro-watt ranges) wearable devices for wellness and healthcare [1]. Most of these wearable sensors are battery powered for their operation. The use of an on-device battery as the primary energy source poses a number of challenges that serve as the key barrier to the development of novel wearable applications and the widespread use of numerous, seamless wearable sensors [5].

Nucleation and bubble evolution in subcooled liquid under pulse heating

The transient heating of liquid using a local heat source is widely used in practice including MEMS and laser medicine technologies. In particular the laser heating of liquid through the optical fiber has become a widespread method for obliteration of varicose veins (endovenous laser ablation, EVLA) and treatment of cysts of various localization. In this research there is proposed to use the electrically heated transparent microheater based on ITO film to simulate the laser-induced heating of the subcooled liquid through the optical fiber. The paper reports the experimental results on the nucleation and evolution of vapor bubbles in subcooled water induced by pulsed heating of the microheater. The experiments were performed at the initial liquid temperature of 27, 38, and 51°C, with heating power in the pulse of 3.6 - 41W and pulse duration of 100–2000 ms using high-speed visualization and infrared thermography. The boiling and convection onsets, the rates of growth and condensation of vapor bubbles, and their maximum sizes depending on the heating power and the liquid initial temperature were measured. The development of convection before the boiling onset was shown to significantly affect the nucleation and further evolution of bubbles. It was found that at the stage of bubbles condensation, the shape of the interfacial surface significantly deviates from the spherically symmetric one, and the maximum condensation rate is observed at some distance from the heated surface. Using infrared thermography and numerical simulation, the time dependences of the ITO microheater and sapphire surface temperature for various heating power and initial liquid temperatures were obtained. On the basis of the temperature dependences and experimentally measured times of boiling onset, the nucleation temperatures were determined.

Investigation into the Selection of Dielectric Material using MCDM Methodologies for MEMS Switches with High Power

This paper presents MCDM techniques (TOPSIS and VIKOR) for determining the optimum dielectric material for MEMS technology based high power capacitive switches. These techniques are used for picking the best material from a given set of materials under some given criterion. The capacitance ratio and dielectric leakage current which are important parameters in obtaining the good RF-response of a switch have been taken into consideration along with other parameters like thermal expansion, heat dissipation and melting point for choosing the best material. Under high power condition, chosen material must have lowest value of TCE, highest possible thermal conductivity, highest melting point, along with highest value of electrical resistivity and relative permittivity for good RF response. The result of both the methods shows that AlN is the best material followed by TiO2. Kindly check and confirm the inserted country name in affiliation 1 is correcly identified. Yes, It is correct.

High power density of microhydraulic source by MEMS technology and its application

This paper intrdouces an electro-conjugate fluid (ECF) micropump whose pumping sources are fabricated by MEMS technology and mounted on the inside of fluidic channels. ECF is a kind of functional and dielectric fluid. A strong and active jet flow of ECF is generated between electrodes surrounded by ECF, when high DC voltage is applied to the electrodes. Our ECF micropump consists of triangular prism and slit electrode pairs (TPSEs), which can be fabricated by the MEMS technology based on the micromolding of a thick photoresist followed by the electroforming. The experimental results prove that the MEMS-fabricated ECF micropump can be a good candidate as a microhydraulic pressure source for various microactuator systems. The paper also introduces the integration of TPSEs for higher output power. Thanks to the modular design of a TPSE, the output pressure and flow rate of the ECF micropumps are increased by only integrating TPSEs in series and parallel, respectively. In addition to this 2D integration of TPSEs, this paper describes the multilayer fabrication, which is the 3D integration of TPSEs to realize high-aspect-ratio TPSEs. These proposed MEMS-fabricated ECF micropumps as microhydraulic power sources have been applied for various applications, such as soft robots, focus-tunable microlens, droplet-based lab-on-a-chip devices, and so on.