Abstract
Owing to the advantages of small size and high integration that accelerometers made by MEMS technology, the Pulse Width Modulation (PWM) closed-loop feedback interface circuit of a sandwich capacitive accelerometer based on ARM is designed. Based on the design, a simulation by SIMULINK and a PCB board-level circuit are conducted. Simulation and measurement are provided to support the design. The realization of Proportion Integral Differential (PID) control algorithm and the generation of PWM are performed by STM32 microcontroller instead of the circuit in the design. The output form of the interface circuit is PWM with different duty cycle and filtered DC voltage. According to the measurement results, the output of the PWM duty cycle change is 16.9%/g, and the sensitivity is 1.045 V/g.
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