MEMS Micro Research Articles

SVD-based MEMS Dynamic Testing Technology

To obtain the MEMS micro structure's high resolution measurement dynamic parameters ,this paper ,by obtaining stroboscopic imaging technology of micro structure of moving image sequence, proposed one kind based on the phase correlation technique and singular value decomposition technique combining sub-pixel measurement method. By the method of phase correlation, image space coordinate can transform into the frequency domain to the coordinates of the parameter space. And then through the singular value decomposition technique to obtain the correlation matrix, using the least-squares fitting, get the sub-pixel level displacement measurement results. The experimental results show that, with this method of measuring MEMS micro structure plane motion amplitude can reach sub-pixel accuracy, and can be effectively reduced by uneven illumination effect on the measuring result, thereby increasing the measurement results of stability and reduces the measuring error. DOI: http://dx.doi.org/10.11591/telkomnika.v11i1.1870

AI制御によるバイオミメティクスMEMSマイクロロボット

AI制御によるバイオミメティクスMEMSマイクロロボット

Based on SVD MEMS Microstructure Amplitude Measurements of the New Algorithm

In order to obtain the MEMS micro structure's high resolution measurement dynamic parameters ,this paper ,by obtaining stroboscopic imaging technology of micro structure of moving image sequence, proposed one kind based on the phase correlation technique and singular value decomposition technique combining sub-pixel measurement method. By the method of phase correlation, image space coordinate can transform into the frequency domain to the coordinates of the parameter space. And then through the singular value decomposition technique to obtain the correlation matrix, using the least-squares fitting, get the sub-pixel level displacement measurement results. The experimental results show that, with this method of measuring MEMS micro structure plane motion amplitude can reach sub-pixel accuracy, and can be effectively reduced by uneven illumination effect on the measuring result, thereby increasing the measurement results of stability and reduces the measuring error.

Study on Method of Autonomous Mobile Robot Integrated Navigation Based on SLAM

Aiming at the problem of navigation in unknown environment of autonomous mobile robot, the self-made mobile robot was taken as research object. The integrated navigation technology was adapted to integrate the SLAM navigation system, DR navigation system and MEMS micro inertial navigation system possessed by the studied robot to construct the SLAM/DR/MEMS integrated navigation system of mobile robot. The experiments were carried to test the method, and the results show that the precision of navigation and location of mobile robot was developed by the integrated navigation scheme.

Analytical study on arbitrary waveform generation by MEMS micro mirror arrays

We provide analytical modeling and the detailed procedure that is used in recently proposed arbitrary waveform generation technique by using MEMS digital micro-mirror arrays. We estimate the achievable temporal resolution, repetition rate, modulation index and the rise/fall times of the final waveform as figure of merit in the proposed systems. We show that reducing the diffraction limit via increasing the ratio of beam size to lens focal length (>0.075) and the spatial modulation down to single mirror pitch size (10.8μm), waveforms up to 18GHz repetition rates with >90% modulation index and <100ps rise times are achievable. Theoretical calculations are compared with experimental generation of 120MHz square waves and 160MHz sawtooth waves and obtained good agreement.

一种新型微机电系统扫描镜的谐振频率研究

一种新型微机电系统扫描镜的谐振频率研究

Integrating Diffractive Optomechatronic System Models in Modelica-based Simulation Environments

AbstractThe performances of optomechatronic systems are generally characterized by optical imaging phenomena and the proper operation is fundamentally affected by changes of the relative geometry caused by thermal influences, mechanical displacements and vibrations. Extrinsic and intrinsic disturbances can be compensated by active control of optical elements like lenses, diffraction gratings or laser sources. In the context of system design and performance analysis tasks it is big challenge to model and simulate the coupled optomechatronic behavior including closed-loop control and disturbances properly on a representative level. A promising approach is the integration of diffractive optics models in the well established physical object oriented modeling environment Modelica®, which offers already a broad support of multi-domain libraries, e.g. electrical, mechanical and thermal. The current paper describes the basic modeling requirements for diffractive optical components and discusses the solution for a computationally efficient implementation of two-dimensional spatial optical interfaces and components for Modelica-based simulation environments. The basic diffractive optical functionality in Modelica is shown by simulation results of a basic Fourier system and a MEMS Micro Mirror Array.

Micro Polymer Capsule Constructed with Micro Pillars Formed by Multi Laminating Method

A micro polymer capsule of 6.5mm length and 4.0mm diameter is fabricated by multi laminating method. The micro polymer capsule has 56 micro pillars for generating a turbulent liquid flow in the inside of capsule. As a fabrication process, the SU-8 resist film based on epoxy resin is coated on a glass substrate. A ring shape image is exposed on the resist film. After pattern development, the ring patterns are peeled from the glass substrate by dipping into HF aqueous solution. The SU-8 ring patterns are stacked in 18 layers by using the micro tweezers under the alignment accuracy of ±0.3mm. In order to adhere the SU-8 ring layers each other, an i-line resist material is pasted into SU-8 ring patterns, then baked on a hotplate at 200°C for 10min. These functional capsule structures can contribute to develop various biological and medical MEMS(Micro Mechanical electronic system) devices.

MEMS micro fluxgate sensors with mutual vertical excitation coils and detection coils

As a classic Earth magnetic field sensor, fluxgate magnetic sensors have great potential applications in many fields. This paper presents a new 3D micro-solenoid fluxgate magnetic sensor based on the MEMS technique. The excitation coils were placed vertically to the detection coils on the chip plane, around a rectangular shaped magnetic core. Polyimide was used to insulate coils and magnetic core. Width of copper conductor lines is 50 μm, and line space is 50 μm. The design of such fluxgate magnetic sensor followed second harmonic signal selecting method. Phase-lock amplifier was used to get second harmonic signal output by detection coils. The linear range of 0–80 μT with sensitivity of 6.7 V/T was achieved from the fabricated sensor with excitation current of 430 mA and the operational frequency of 40 KHz. As the excitation current was 470 mA, linear range of 0–50 μT with sensitivity of 21.7 V/T was achieved.

The Application of Plating on Photoresist for MEMS Micro Structure

not Available.

A precision robot system with modular actuators and MEMS micro gripper for micro system assembly

A robotic system which consists of a precision manipulator and a micro gripper for a micro system assembly is presented. The developed P-R-R type 3 DOF robot is actuated by newly proposed modular revolute and prismatic actuators. As an end-effector of this manipulator, a micro gripper is designed and fabricated with MEMS technology, and the displacement of the jaw is up to 142.8 μm. A real gripping test is conducted to evaluate the robotic system.

Pseudo-Capacitor Structure for Direct Nuclear Energy Conversion

AbstractThe advanced space missions need for more power opened the way for advanced nuclear reactors and for alternative power conversion procedures. The most advanced power systems available in space are the fuel cells and nuclear reactors. Both systems manifest low efficiencies for converting the primary energy into electricity and as consequence are requiring high heat dump into space mainly by infrared radiation. The thermo-nuclear power generator also requires a high temperature gas turbine and a mechano-electric generator, finally driving to low conversion efficiencies. The new nano-materials offer the possibility of creating direct energy conversion devices able of achieving high conversion efficiencies up to 99% in the cryogenic versions. The interest for direct conversion of the nuclear energy into electricity appeared in early 1940th, by the invention of the thermo-ionic fission device by Linder. Then a series of patents and scientific papers improved gradually the designs and performances of the devices, up to the actual concepts of beta-voltaic and liquid-electronics. The most intuitive direct conversion device looks mainly like a super mirror- or a heterogeneous super-capacitor. The issues on its operation are related to global conversion efficiencies and the stable operation life-time in high radiation field. There are combinations of nano-structures and actinides assuring both the neutron flux stability, by meeting criticality conditions and the direct conversion or the nuclear energy into electricity. Achieving a high efficiency internal conversion of the nuclear energy into electricity is not enough if it is not completed by a high efficiency power extraction system from the nuclear reactor core into the outside load. The development of the new MEMS devices and micro electronics in the 40 nm technologies provides an excellent background for the production of the electric power harvesting and conversion devices embedded in the fuel. The new nano-structured materials may be produced as radiation energy harvesting tiles that are free of actinides, using them for harvesting the energy of radioactive sources and controlled fusion devices, or may include actinides in their structure achieving critical or sub-critical accelerator driven nuclear reactor assemblies. Another predictable advantage of the nano-structure is the property of self-repairing and self-organizing to compensate the radiation damage and improve the lifetime. Due to direct conversion the power density of the new materials may increase from the actual average of 0.2 kw/cm3 to about 1 kw/mm3 driving to miniaturization of nuclear power sources and reductions of the shield weight. At these dimensions and power densities of few thousands horse power per liter the nuclear power source becomes suitable for mobile applications as powering trains, strategic airplanes, etc. These new developments may drive to the production of high power solid-state compact nuclear battery for space applications, leading to a new development stage.

SnO 2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations

MEMS micro heater devices capable of long-term operation at temperatures up to 1000 °C are presented. The enhanced long-term stability has been achieved by employing antimony-doped tin oxide (SnO 2:Sb) as a substitute for the conventionally used noble metal heater resistors. A detailed investigation of its high-temperature stability reveals that degradation is caused by out-diffusion of Sb impurities from the SnO 2 film.

A silicon mems micro power generator for wearable micro devices

In this paper, a prototype vibration‐induced micro power generator is fabricated and tested to investigate the feasibility of a wearable silicon micro power source. This prototype device consists of an energy‐collecting electroplated copper coil of 0.1 mm thickness, a nickel‐iron alloy (NiFe) suspension spring and a commercially available neodymium iron boron (NdFeB) magnet of dimension 2 mm ×2 mm ×1 mm. The overall size of the micro power generator is 6 mm ×6 mm ×1mm. The average generated power is 0.32 uW when the device is tapped gently with fingers. This tapping mimics the vibration when the device is worn on a person, and demonstrates power generation feasibility by general human activity. Average power of 1.44uW was measured when the device was placed on a vibration bed excited with a sinusoidal signal of 50 μm amplitude.

A micro shear stress sensor based on laterally aligned carbon nanotubes

This paper reports the development of a micro thermal shear stress sensor that utilizes multiwalled carbon nanotubes as the sensing element. The sensor was fabricated by laterally aligning randomly distributed nanotubes into a 360 μm long and 90 μm wide conductive trace between two triangular shaped micro electrodes through the use of a high frequency AC electric field. During operation, the aligned nanotubes are electrically heated to an elevated temperature and surface shear stress is measured indirectly by the amount of convective heat transfer from the heated nanotubes to the surrounding fluid flow. The nanotube alignment process was primarily controlled by three different phenomena: dielectrophoresis, joule heating, and Brownian motion. Numerical simulations, together with experimental verifications, indicated that a successful alignment could only be realized if: (1) the dielectrophoretic force was positive, (2) the electro-thermal force was also positive, and (3) the dielectrophoretic force was high enough to overcome Brownian motion. The aligned nanotube trace has a room-temperature resistance of 580 Ω, which corresponds to a conductivity of 2.7 × 10 4 S/m. The absolute temperature coefficient of resistivity ranges from 0.01 to 0.04% °C −1. This is about one order of magnitude smaller than the highly doped polysilicon sensing material used in the MEMS micro shear stress sensor. The shear stress sensitivity of the nanotube trace operated at a 3% overheat ratio is found to follow the theoretical sensor power ∝ (shear stress) 1/3 relationship, provided the shear stress level is higher than 0.34 mPa. This result confirms the feasibility of using aligned multi-walled carbon nanotubes as a thermal shear stress sensing material.

Fabrication of diffraction grating for X-ray Talbot interferometer

Imaging technology using the phase data attracts attention from many researchers as the observation technique of a biomechanical material. We produced a diffraction grating for obtaining high-resolution phase data. We designed the new process flow and developed the fabrication technique composed of MEMS technology, X-ray lithography, and micro electroplating. The X-ray lithography process was performed using the NewSUBARU synchrotron radiation facility. The line and the aspect ratio of this grating were 4 μm and above 5 μm, respectively. We evaluated the diffraction grating in SPring-8.

MEMS Micro Reactor with a Wall Coated Catalyst for Hydrogen Production

not Available.

W1 Power MEMS・マイクロヒートエンジンの開発動向(技術ワークショップ『MEMS開発の最新動向と材料力学への期待』)

W1 Power MEMS・マイクロヒートエンジンの開発動向(技術ワークショップ『MEMS開発の最新動向と材料力学への期待』)

FIBER BUNDLE OPTICAL COHERENCE TOMOGRAPHY SYSTEM FOR ENDOSCOPIC AIRWAY IMAGING

PURPOSE: Optical coherence tomography (OCT) is a novel, non-invasive technology which can provide high and ultrahigh resolution structural and functional endoscopic/bronchoscopic imaging information in biological tissues, in-vivo, in real time, at resolutions as fine as 1um. Movable components such as MEMS micro motors, mirrors and lenses, etc., needed to provide scanning for image generation in 2 or 3 dimensions have limited the utility of OCT endoscopy. We describe a novel approach to development of 3-D OCT probes using fiber-bundles for airway and pleural endoscopy that overcomes the requirement for internal moving parts within the probe.

Improvements of an oscillatory squeezing flow rheometer for small elasticity measurements of liquids

Dilute dispersions and polymer solutions used as functional fluids or operation fluids are required to be controlled in an extremely high quality level in the semiconductor industry or MEMS (Micro Mechanical Electric System) devices, such as inkjet print heads and micro pumps. Many of the quality items depend on microscopic state of dispersion or solution stem from mutual interactions among the dispersed particles and solved polymers; hence, close investigations of these complex interactions are of great concern for developments of highly functional fluids and micro fluidic devices. Here, some great improvements are presented on a random oscillatory squeezing flow rheometer to detect subtle rheological properties arise as results of interactions between micro solid particles dispersed in liquids. To detect subtle elasticity within fundamentally viscous liquids, very small phase difference from the viscous response has to be measured, and for this reason effects from three major sources (sensor nonlinearity, nonlinear squeeze flow response, and instrument compliance) that give phase errors and noises as well as fluid inertia are completely compensated by data processing, achieving sensitivity for subtle dynamic modulus G′ to the extent of G′/G ∼0.001. As examples of the dilute dispersions, water dispersions of monodisperse acrylic latex were measured and detections of dynamic modulus G′ of 10−3 Pa at 100 Hz were demonstrated.