MEMS Field Research Articles

A high temporal-spatial resolution three-dimensional imaging method using arrayed-focus structured illumination with differential axial enhancement

High precision and fast three-dimensional (3D) microscopic imaging technology plays an extremely important role in MEMS, micro optics, microelectronics, biomedicine and other fields. In this paper, a confocal microscopic 3D imaging method based on differential array focusing structured light illumination (DAF-SIM) is proposed. Theoretical analysis and experimental results show that under the 100x/NA 0.95 objective lens, the lateral resolution of this method reaches 173 nm, exceeding the optical diffraction limit, the axial sensitivity is better than 10 nm, and the time resolution is about 3 Hz@2.3 M Pixel, achieving the goal of high horizontal and axial resolution and time resolution. The high spatial and temporal resolution of DAF-SIM 3D micro imaging method provides a highly applicable, efficient and high-precision online micro terrain detection scheme for intelligent manufacturing and other fields.

MEMS-based Sensing Technology for the Gas Chromatograph Analysis

Device miniaturization based on MEMS technology is an important research direction in the field of MEMS. The gas chromatograph is a commonly used instrument for detecting complex gases, but due to its large size, high power consumption, and heavyweight, it is not convenient and cannot meet people’s needs for real-time, online, and rapid access to information. Therefore, the miniaturization of gas chromatographs combined with MEMS technology is a research trend. This paper first introduces the basic structure of the gas chromatograph. Then it studies the miniaturization of columns, detector miniaturization, and flow meter miniaturization based on MEMS technology, combined with cross-micro-nano scale integration technology to further improve sensitivity, and summarizes the prospects.

Investigation on a sustainable composite method of glass microstructures fabrication—Electrochemical discharge milling and grinding (ECDM-G)

Glass structures with microchannel morphology play an important role in the fields of biology, medicine and MEMS. The non-traditional machining methods currently used to machining glass have problems such as excessive energy consumption, poor sustainability, and harmful to operators and the environment. To achieve precision, efficient, green, sustainable production and save resources, a novel composite machining method of electrochemical discharge milling and grinding (ECDM-G) was proposed in this paper. Compared with tranditional electrochemical discharge machining, lower discharge energy is applied, and KH2PO4 solution is used as electrolyte instead of alkaline solution, thus realizing energy-saving and green machining. Compared with mechanical grinding, tool wear is reduced and the sustainability of machining is improved. In the theoretical part, the heat conduction process of electrochemical discharge was simulated and the softening effect of workpiece material was analyzed. Furthermore, the matching mathematical model between electrochemical discharge energy and material removal by grinding was established. So as to accurately control the energy and avoid waste. In the experiment part, the key parameters were determined through the Plackett-Burman experiment, and then the Box-Behnken experiment was conducted on the key parameters and the Response Surface Methodology (RSM) was used to obtain the optimal combination of machining parameters. Compared with mechanical grinding, the problems of edge collapse and breakage are solved. The overcut is reduced by 35.1%, the edge damage is reduced by 42.2%, the surface morphology is improved and the surface roughness value is reduced by 47.7%. Compared with ECDM, the problems of heat affected zone and thermal defects are solved. The overcut is reduced by 49.1%, the edge damage is reduced by 56.6%, the surface feather morphology is removed and the surface roughness value is reduced by 74.9%. The machining stability and consistency of ECDM-G method are analyzed by machining array microchannels. Finally, with the optimized machining parameters, the microfluidic chip with typical microchannel structure was fabricated by ECDM-G, and the tool electrode has no severe wear after machining the long path complex structure, which proves that ECDM-G can be an energy-saving, sustainable and effective method for machining precision glass microstructures with high quality, and further shows that ECDM-G has industrial application prospects in the manufacturing of key biological and medical components.

A Novel Method of Water Mist Bonding for Manufacturing Biological Gel Artificial Muscle with High Actuation Performance

Biological gel artificial muscle (BGAM) has a promising future in the field of MEMS. In contrast to the material research of BGAM, relatively little research is conducted on the preparation process method of BGAM. Therefore, a water mist bonding method for the preparation of BGAM is proposed. The main application of the water mist bonding method is to complete the assembly of the electrode membrane with the electrically actuated membrane, and the actuation properties of the BGAM can be further enhanced. In this paper, experiments on mechanical, electrical, and actuation properties are conducted to investigate the effects of the water mist bonding process parameters on BGAM. The comprehensive experimental results revealed that BGAM possessed a more comprehensive optimization effect when the humidification time is 2.5 min: the bond strength reached the highest 0.92 MPa, the internal resistance, and elastic modulus are significantly reduced to 28 Ω and 2.08 MPa, respectively, and the output force response rate reached the highest 0.138 mN s−1. In conclusion, the water mist bonding process proposed does not require complicated equipment, features optimized BGAM actuation performance, and makes up for the lack of process methods for preparing BGAM at this stage.

Measurement of thermal properties of liquid analytes using microfluidic resonators via photothermal modulation

Understanding the thermal properties of fluids at the nanoscale with high spatial, temporal, and thermal resolution are on great demand in the fields of MEMS, drug development, biomedical devices, and analytical systems. Microfluidic channel-integrated cantilevers are considered as an established benchtop sensor platform for physical and thermal characterization of materials at the picogram amount of analytes. This paper reports analysis of thermal characteristics of liquid analytes using photothermal heating effect of the microfluidic cantilever. Using real-time tracking of frequency shift of microfluidic resonator, the thermal properties of liquid samples can be estimated whilst the liquid analytes in the cantilever are locally heated by laser-induced irradiation. The heating results in the expansion of the liquid inside the channel which induces thermal stress on the walls of the channel. This thermal stress contributes to the rise of the resonance frequency of the microfluidic resonator and, therefore, the frequency shift is linearly dependent on the volumetric coefficient expansion of the liquid. A threefold improved sensitivity is observed when the second order flexural vibration mode is analyzed compared to that of the fundamental resonance. This approach, which combines photothermal heating and the dynamic mode of operation, can serve as a platform for the development of a portable, lab on a chip device for the use of real time detection of thermomechanical properties of fluids at low cost.

Nanomechanics serving polymer-based composite research

Tremendous progress in nanomechanical testing and modelling has been made during the last two decades. This progress emerged from different areas of materials science dealing with the mechanical behaviour of thin films and coatings, polymer blends, nanomaterials or microstructure constituents as well as from the rapidly growing field of MEMS. Nanomechanical test methods include, among others, nanoindentation, in-situ testing in a scanning or transmission electron microscope coupled with digital image correlation, atomic force microscopy with new advanced dynamic modes, micropillar compression or splitting, on-chip testing, or notched microbeam bending. These methods, when combined, reveal the elastic, plastic, creep, and fracture properties at the micro- and even the nanoscale. Modelling techniques including atomistic simulations and several coarse graining methods have been enriched to a level that allows treating complex size, interface or surface effects in a realistic way. Interestingly, the transfer of this paradigm to advanced long fibre-reinforced polymer composites has not been as intense compared to other fields. Here, we show that these methods put together can offer new perspectives for an improved characterisation of the response at the elementary fibre-matrix level, involving the interfaces and interphases. Yet, there are still many open issues left to resolve. In addition, this is the length scale, typically below 10 micrometres, at which the current multiscale modelling paradigm still requires enhancements to increase its predictive potential, in particular with respect to non-linear plasticity and fracture phenomena.

Characterization of Nonlinear Behavior of Weakly Coupled Resonators Based on Nonlinearity Factor

Mode-localization is a promising method to realize high sensitivity sensors, especially in the field of MEMS. Since these sensors monitor amplitude change of weakly coupled resonators, it is important to grasp condition that induces multi-valued amplitude-frequency curve. In this paper, we provide an efficient tool to characterize the nonlinear behavior of the weakly coupled resonators. To analyze the nonlinearity, we solve a two-degrees-of-freedom (2-DoF) coupled equation of motion with nonlinear spring terms. Two approximations are employed to solve the equation; Krylov–Bogoliubov averaging method and approximation based on eigenmode amplitude-ratio at the resonances. As a result, we obtain two decoupled Duffing-like amplitude-frequency equations. We show that nonlinearity of the system is described by factors contained in the equations. The factors can be explicitly written in terms of basic parameters of the system, including coupling spring constant and nonlinear terms. Thus, instead of relying on numerical calculations, we can find parameter condition that brings about multi-valued amplitude-frequency curve. This method can also be utilized to find a condition that eliminates the nonlinearity. As an example, we apply this method to a weakly coupled resonator which uses parallel plate electrode as a coupling spring. We demonstrate the effectiveness and validity of this method by comparing the result with FEM simulations. The methodology and results presented here are general one and can be applied to various systems described by nonlinear coupled resonators.

Molecular dynamics simulation of evolution of nanostructures and functional groups in glassy carbon under pyrolysis

With the continued and sustained growth of the field of carbon MEMS (C-MEMS) in several application areas, there is a corresponding increased and renewed interest in understanding the exact molecular structure of the ensuing glassy carbon (GC) material and, therefore, potential to engineer some of its key characteristics. Associated with that interest, the effects of key process parameters like temperature ramping, holding and cooling times on carbonization, the final nanostructures and – importantly – on the nature and distribution of functional groups remain to be of significant research importance to the GC community. While recent in-situ imaging approaches during the synthesis process have opened up opportunities for better understanding of these nanostructures, the 2D nature of the approaches, however, had introduced significant barriers. In this paper, therefore, we present a simulation-based approach using reactive molecular dynamics (MD) where we model the synthesis process and investigate in detail (i) the intermediate and final stages of carbonization with particular focus on GC nanostructures and (ii) formation of functional groups and the processes and parameters that drive their evolution. Our simulation captured the pyrolysis-driven synthesis process where the polymer structure degraded followed by increased carbonization and formation of flakes of 3-, 4-, membered carbon rings that further grew into graphene-type 6-member carbon rings as well as 5- and 7-member rings. These eventually evolved into a complex multi-layer 3D nanostructure consisting of connected but distinct zones of (a) dominant cage-like tubular components and (b) long chains of flat graphene-like parts rich with functional groups. Taken together, the MD simulations demonstrate that (i) holding time at the maximum temperature has the most significant effect in the formation of complex cage-like 3D nanostructures with stacked layers, (ii) the closed cage-like zones have crystallite diameter (La) in the range of 3.2 Å - 9.5 Å with clear and well-defined curved and stacked graphene-like sheets of stacking thickness (Lc) = 3.0 Å - 3.3 Å, (iii) carbonyl, ether, epoxide, hydroxyl, and alkyne groups form predominately on the edges of flat components of GC where abundant non-6 membered rings, dangling bonds, long sp carbon chains, and intermediate structures exist, and to a lesser extent on edges of vacancy defects inside cage-like zones.

Metamaterials with remarkable thermal–mechanical stability and high specific modulus: Mechanical designs, theoretical predictions and experimental demonstrations

In the fields of aerospace, flexible electronics, intelligent manufacturing, and MEMS, the mechanical metamaterials with remarkable zero thermal expansion of coefficient (CTE) are of increasing interest due to their advantages in maintaining their original shapes upon a temperature change. Though recently published researches have demonstrated several designs in achieving a desirable CTE, it is still very challenging to develop the mechanical metamaterial with high-level thermal–mechanical stability (i.e., CTE < 0.5 ppm/°C). Additionally, most of these studies only focused on obtaining a remarkable zero CTE through optimizing the geometrical parameters, and did not provide enough performances in consideration of their mechanical behaviors (e.g., lightweight, high specific modulus), imposing certain limitations on their operation in devices that require combined thermal–mechanical attributes. This paper demonstrates a mechanical metamaterial design concept with lightweight, high specific modulus properties and high-level thermal–mechanical stability. Each of the unit cell in our designs composed of two or four bilayer beams filled by hourglass lattices in Al and Ti materials offers a tunable CTE from negative to positive, revealing its capability to offer remarkable zero CTE. A theoretical model that preciously predicts the design’s thermal and mechanical performances provides a clear understanding of the effects of geometric parameters on their corresponding effective properties, facilitating the design of metamaterials with desired mechanical and thermal expansion performances. Excellent agreements between theoretical predictions, FEAs, and experiments demonstrate the advantages of our design in achieving the combined attributes of lightweight (i.e., relative density ρ¯Uniaxial ¡ 0.123 for the design with uniaxial thermal–mechanical stability and ρ¯Biaxial ¡ 0.069 for the one with biaxial thermal–mechanical stability), high specific modulus (i.e., 1104 kN⋅ mm/kg and 1203 kN⋅ mm/kg for the designs with uniaxial and biaxial thermal–mechanical stability), and a remarkable zero CTE (αeffective ¡ 0.32 ppm/°C). Ashby plot of the effective CTE with respect to density, serving as an especially useful tool in selecting materials according to the requirements of practical applications, provides quantitative evidences for our design’s outstanding thermal–mechanical performances as compared to the previously reported studies.

Effect of laser parameters on ultra-short laser processing of SiC

Crystalline silicon carbide (SiC) is a very attractive material in the fields of microelectronics, MEMS and biomedicine mainly due to its chemical inertness and mechanical strength. It is used for SiC MEM sensors, micro motors and resonators [1]. In the biomedical field, SiC is emerging as a promising material for additional coating of biomaterials due to its other useful properties (hardness, lightness, impermeability and good compatibility). For instance, in combination with bioglass, it is used for bone regeneration and as coating of some metal alloys, as it forms a bone-like layer on the surface upon contact with body fluids [2]. We studied the results of microporous modifications on the SiC surface irradiated by ultrashort laser pulses in view of further biomedical applications. The nanostructures were formed on the surface of a silicon carbide sample by using a regeneratively amplified Ti:sapphire femtosecond laser emitting at 800 nm. The SiC samples were irradiated as the laser light parameters (power, energy and number of applied pulses) were varied and the surface morphological changes were investigated. Modification of the topography of the silicon carbide substrates could substantially improve the bioactivity properties of this material, which, after proper laser parameters optimization, could make its biomedical application even more successful.

Metamaterials with a controllable thermal-mechanical stability: Mechanical designs, theoretical predictions and experimental demonstrations

Mechanical metamaterials with tunable thermal expansion are of increasing interest due to their capability for matching the thermal expansion of surrounding components to maintain high-level thermal-mechanical stability upon a temperature change and show their promising applications in the fields of flexible electronics, aerospace, MEMS, and precision instruments. Though numerous of studies on metamaterials with zero thermal expansion of coefficient (CTE) has been developed to access these demands, the experimentally demonstrated designs with a remarkable zero CTE value (e.g. <0.5 ppm/K) still remain a challenge. In this paper, a design concept of metamaterial capable of offering a tailorable CTE, especially the excellent thermal-mechanical stability, is systematically studied, whose underlying mechanism is the conversion of thermal-induced deflection of bilayer beams (in Al and Ti) into unusual, effective thermal expansion or shrinkage of metamaterials. Notably, the experimentally demonstrated CTE of this metamaterial is 0.42 ppm/K, which is the unprecedented zero CTE result as compared to the previously reported studies. The theoretical model for CTE and elastic modulus of this design, which is verified by FEA and experiments, provides a clear understanding of relationships between configuration parameters and effective thermal and mechanical performances. Combined theoretical predictions, FEA, and experimental studies demonstrate the capability of this metamaterial to serve as a design platform for devices or components that require excellent thermal-mechanical stability.

Fabrication of Silicon Microtips with Integrated Electrodes

This paper describes a simple method to fabricate silicon microtips with integrated self-aligned polarization electrodes for development of MEMS and electron field emission devices. The method is based on the wet bulk micromachining of the silicon substrate in KOH solutions and utilizes low stress PECVD SiOxNy films obtained at low temperatures (320°C) as structural material for both mechanical support and electrical insulation of the electrodes. For the electrodes sputtered Cr films were utilized. The microtip formation process was studied by optical and electronic microscopy to analyze tip geometry and the characteristic etch rate of the different stages during the tips formation. The fabricated devices were matrixes with different numbers of microtips, each with a typical height of 52 μm and with diameter at the apex below 1 μm. In the best case, the distance between the apex of the tips and the metallic electrode was lower than 5 μm. The results also show that the low stress SiOxNy film is essential to attain the necessary flatness required by the process.

Tubular/helical architecture construction based on rolled-up AlN nanomembranes and resonance as optical microcavity

Aluminum nitride (AlN) has attracted a great amount of interest due to the fact that these group III–V semiconductors present direct band gap behavior and are compatible with current micro-electro-mechanical systems. In this work, three dimensional (3D) AlN architectures including tubes and helices were constructed by rolling up AlN nanomembranes grown on a silicon-on-insulator wafer via magnetron sputtering. The properties of the AlN membrane were characterized through transmission electron microscopy and X-ray diffraction. The thickness of AlN nanomembranes could be tuned via the RIE thinning method, and thus micro-tubes with different diameters were fabricated. The intrinsic strain in AlN membranes was investigated via micro-Raman spectroscopy, which agrees well with theory prediction. Whispering gallery mode was observed in AlN tubular optical microcavity in photoluminescence spectrum. A postprocess involving atomic layer deposition and R6G immersion were employed on as-fabricated AlN tubes to promote the Q-factor. The AlN tubular micro-resonators could offer a novel design route for Si-based integrated light sources. In addition, the rolled-up technology paves a new way for AlN 3D structure fabrication, which is promising for AlN application in MEMS and photonics fields.

Effect of numerical aperture on molten area characteristics in micro-joining of glass by picosecond pulsed laser

Glass products with precise and sophisticated shapes are highly demanded in the field of MEMS due to their excellent properties. Ultrashort pulsed laser has been expected to be a powerful and reliable tool for micro-welding of glass. Focusing condition such as numerical aperture (N.A.) is a critical parameter that controls how ultrashort laser pulses interact with and propagate in glass, and it has a great influence on the laser micro-welding characteristics of glass. In order to investigate the quality of welding process, it is important to understand the dependence of the mechanical strength of molten area created in glass specimen with various numerical apertures. Therefore, the mechanical strength of molten area with various numerical apertures was evaluated in micro-welding of glass by picosecond pulsed laser. Higher bending strength could be obtained under an appropriate volume ratio of molten area and glass specimen, when continuous molten areas were formed. In addition, high density and large size of molten area without crack led to higher breaking stress. It is concluded that superior focusing characteristics such as N.A. 0.65 enable a long region of high power density in beam axis, which can satisfy both high mechanical strength and high processing speed.

Eigenvalues and dynamic stiffness of picket-shaped cantilevers

A comprehensive data set is presented that covers eigenvalues and dynamic stiffness of picket-shaped microcantilevers for a wide range of the taper ratio and tip mass ratios. The shape of these microcantilevers is such that most of the length is of uniform cross section and the end segment of the beam is width-tapered to a point at the free end. This configuration is widely used in MEMS devices. Closed form expressions are presented for the eigenvalues, and for static and dynamic stiffness. These expressions could help designers and researchers in the MEMS field in general, and atomic force microscopy in particular.

Role of tool-substrate gap in the micro-holes formation by electrochemical discharge machining

Electrochemical discharge machining (ECDM) is an efficient micro-machining technique for fabricating hard to machine materials such as glass, alumina, zirconia, etc. Glass based substrates have many applications in the field of MEMS and microfluidic systems. The tool-substrate gap is one of the important process parameters which affects ECD machining characteristics such as micro-feature overcut, width, depth, etc. The reported work investigates the effect of the tool-substrate gap on the ECD machining performance with NaOH and KOH electrolytes. A tapered tool with 130 µm average tip size was used to create blind micro-holes in glass substrate with varying tool-substrate gap and machining time. Numerical and experimental results showed a similar decreasing trend of the depth of blind holes as the tool-substrate gap increases. Higher overcut was observed in the case of a tool-substrate gap of 20 µm in the NaOH electrolyte and 10 µm in the KOH electrolyte. The maximum tool-substrate gap up to which machining happened was observed to be 60 µm and 30 µm in the case of the NaOH and KOH electrolytes, respectively. Tool wear was found to be higher when the tool was in physical contact and when the NaOH electrolyte was used for a machining duration of 60s.

Dynamic spring constants of higher resonance modes of uniform and tapered microcantilevers with tip masses

A comprehensive data set is presented that covers eigenvalues and dynamic stiffness of width-tapered microcantilevers for a wide range of the taper ratio and tip mass ratios. Closed form expressions are presented, which could help designers and researchers in the MEMS field in general, and atomic force microscopy in particular.

Welcome

Greetings, and welcome to Daytona Beach, FL and PowerMEMS 2018 – the 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications!The objective of PowerMEMS 2018 is to catalyze innovation in micro- and nano-scale technologies for the energy domain. The scope of the meeting ranges from basic principles, to materials and fabrication, to devices, systems and applications. The topics span the lifecycle of energy from power generation or harvesting to storage, conversion and conditioning, and integrated systems that manage these processes. The applications include micro power generation for wireless sensors and portable devices, as well as microsystems for actuation, pumping and propulsion.Our Conference aims to stimulate the exchange of insights and information, as well as the development of new ideas, in the power MEMS field. Our goal is to allow the attendees to interact and network within our multidisciplinary community that includes professionals from many branches of science and engineering, as well as energy and entrepreneurial specialists interested in the commercialization of power MEMS technologies.Since the first PowerMEMS in Sendai, Japan in 2000, the Conference has grown in size, reputation, impact, and technical breadth. This year’s technical program is highlighted by three plenary talks from prominent experts on wearable energy harvesting systems, magneto-electric generators, and near-zero-power microsystems. Each plenary talk anchors a “Focus Session” in each of these themes. The contributed program received 162 abstract and late news submissions. After careful review by the 35-member Technical Program Committee, a total of 135 papers were selected for presentation, 51 for oral, and 84 posters. There oral presentations are divided into 16 sessions, and the posters divided into two afternoon poster sessions. Nine PowerMEMS-in-Action live demos will be featured during the poster sessions, showcasing mature technologies and novel approaches hands-on. The conference proceedings are made available to attendees via direct download. All authors have the option to “elevate” their conference paper into a fully peer-reviewed journal article in either J. Micromechanics and Microengineering or Smart Materials and Structures. All non-elevated conference papers will be archived online around May 2019 under IoP’s J. of Physics: Conference Series.We hope to maximize interaction among participants and stimulate lively discussion through technical and social events. The PowerMEMS School provides opportunity to learn from leading experts in topics ranging from fundamentals of energy harvesting technologies to applications of PowerMEMS in selected domains. The PowerMEMS-in-Action live demos stimulates researchers to push their power MEMS technologies out of the laboratory and get feedback. Our tabletop exhibitors will help catalyze conversations between our industrial partners and the research community. On Thursday, the conference banquet will be held at the Kennedy Space Center, with dinner served directly below the retired Space Shuttle Atlantis orbiter. This will be a once-in-a-lifetime experience!This meeting is made possible by many generous contributions of time, effort, and financial support. Thanks are due to our co-organizers Florian Herrault (TPC Chair), Shad Roundy (Sponsorship and industry Chair), and Alexandra Garraud (School Chair), Peter Woias (PMiA Chair), to the Technical Program Committee for their intensive efforts in reviewing abstract submissions, and to the International Steering Committee for their advice and support. We are grateful to Preferred Meeting Management Inc. for their many contributions to the management and organization of our Conference. Finally, we gratefully acknowledge the organizational and financial support provided for this meeting by the Transducers Research Foundation, Université de Sherbrooke, University of Florida, University of Utah, HRL Laboratories, and our exhibitors, publication partners, and other supporters.We hope that you find PowerMEMS 2018 enjoyable and fruitful, while enjoying the beautiful scenery and unique attractions of Daytona Beach!Sincerely,

Capillary Force Gripper for Complex-Shaped Micro-Objects With Fast Droplet Forming by On–Off Control of a Piston Slider

In this letter, we describe the newly proposed capillary force gripper that combines fast water refilling via the capillary phenomenon and fast droplet forming via the ON-OFF control of a piston slider. The capillary force is suitable for capturing and releasing heterogeneous and complex-shaped micro-objects because it is one of the most dominant forces in the microscopic world and acts on any shaped objects by the water flexible deformation. However, a water droplet easily evaporates and loses during every pick-and-place operations. To solve this problem, we developed a gripper that can quickly form droplets with simple control. In the experiments, we confirm that the gripper can generate a sufficient capillary force to grip a 1-mm3 micro-object for over 100 s. Furthermore, we realize the automatic pick-and-place of cube, cone, and semicylinder samples. We compare the positioning errors among them to discuss the feasibility, future prospects, and applications in electronics and MEMS fields.

Simulation of raindrop-shaped flow tube valveless piezoelectric pump

In order to promote the application of raindrop-shaped flow tube valveless piezoelectric pump (RSFTV PZT pump), basing on the existing research, the RSFTV PZT pump was simulated by computer. Firstly, the existence of the flow resistance of the flow tube was proved by simulation of FLUENT. Then, the dynamic mesh analysis of the pump was carried out to simulate the pumping flow rate at different driving frequencies. Lastly, the simulated results were compared with the experimental results, which shows that the flow rate tendency and value obtained by simulation are basically consistent with that by experiment. The simulation of the RSFTV PZT pump would be helpful to further accelerate related researches and promote the application of RSFTV PZT pump in MEMS and other fields.