The aim of this study is to examine the stresses that will occur under occlusal forces on the cortical bone, spongious bone and the subperiosteal implant systems made of Titanium and%60 Carbon fiber reinforced Polyether ether ketone (PEEK) material. Two different models of subperiosteal implant systems on maxilla made of Titanium and %60 Carbon fiber reinforced Polyether ether ketone (PEEK) material. As a result of vertical and oblique forces, the stress values and distributions on the subperiosteal implant systems and bone were examined. After applying the three different force protocols, von Mises stress, Maximum principal stress and Minimum principal stress values and distribution on the subperiosteal implant body, fixation screws, cortical and spongious bone were analyzed by finite element analysis. In all scenarios, the von Mises values on the Titanium subperiosteal implant system were found to be approximately twice on the 60% carbon fiber reinforced PEEK subperiosteal implant system plates. Subperiosteal implants produced from titanium and carbon fiber reinforced PEEK material exhibited similar stress values on cortical and spongious bone. According to the results of this study, 60% Carbon fiber reinforced PEEK material can be considered as an alternative material to titanium since it exhibits similar biomechanical behavior with titanium subperiosteal implants on cortical and spongious bone. In order to be routinely used as dental subperiosteal implant material, it should be supported by long-term in vivo studies.