In this report, it is found that high accuracy and efficient drilling of ceramics can be done by using discontinuous pulsating cutting force and ultrasonic vibration of ceramics (USVC). The main results are as follows : (1) In order to confirm the drilling accuracy of ceramics by this discontinuous pulsating cutting force and ultrasonic vibration of ceramics, a quite new precision ultrasonic super position vibration drilling machine has been able to be created. (2) Experimental results show that high accuracy drilling of ceramics can be obtained with the same sense of operation as drilling of metal by this discontinuous pulsating cutting force and ultrasonic vibration of ceramics. (3) It has been verified that the torsional ultrasonic vibration core drill is suitable for high accuracy drilling of ceramics and the longitudinal ultrasonic vibration core drill is suitable for high efficient drilling of ceramics.